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Title: Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus

Abstract

Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.

Inventors:
; ; ;
Issue Date:
Research Org.:
LBNL (Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1108010
Patent Number(s):
8,580,130
Application Number:
12/743,550
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats

Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, and Minor, Andrew M. Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus. United States: N. p., 2013. Web.
Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, & Minor, Andrew M. Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus. United States.
Mao, Samuel S, Grigoropoulos, Costas P, Hwang, David J, and Minor, Andrew M. Tue . "Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus". United States. https://www.osti.gov/servlets/purl/1108010.
@article{osti_1108010,
title = {Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus},
author = {Mao, Samuel S and Grigoropoulos, Costas P and Hwang, David J and Minor, Andrew M},
abstractNote = {Laser-assisted apparatus and methods for performing nanoscale material processing, including nanodeposition of materials, can be controlled very precisely to yield both simple and complex structures with sizes less than 100 nm. Optical or thermal energy in the near field of a photon (laser) pulse is used to fabricate submicron and nanometer structures on a substrate. A wide variety of laser material processing techniques can be adapted for use including, subtractive (e.g., ablation, machining or chemical etching), additive (e.g., chemical vapor deposition, selective self-assembly), and modification (e.g., phase transformation, doping) processes. Additionally, the apparatus can be integrated into imaging instruments, such as SEM and TEM, to allow for real-time imaging of the material processing.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {11}
}

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