Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector
Abstract
The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1107633
- Patent Number(s):
- 8569677
- Application Number:
- 12/843,773
- Assignee:
- LBNL
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States: N. p., 2013.
Web.
Gessner, Oliver, Kornilov, Oleg A, & Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States.
Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Tue .
"Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector". United States. https://www.osti.gov/servlets/purl/1107633.
@article{osti_1107633,
title = {Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector},
author = {Gessner, Oliver and Kornilov, Oleg A and Wilcox, Russell B},
abstractNote = {The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 29 00:00:00 EDT 2013},
month = {Tue Oct 29 00:00:00 EDT 2013}
}
Works referenced in this record:
Efficient monochromator to isolate VUV light generated by four-wave mixing techniques
journal, January 1988
- VonDrasek, William A.; Okajima, Shigeo; Hessler, Jan P.
- Applied Optics, Vol. 27, Issue 19
Time-delay compensated monochromator for the spectral selection of extreme-ultraviolet high-order laser harmonics
journal, December 2009
- Poletto, Luca; Villoresi, Paolo; Frassetto, Fabio
- Review of Scientific Instruments, Vol. 80, Issue 12
Achromatic interferometric lithography for 100-nm-period gratings and grids
journal, November 1995
- Savas, T. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 6
VUV laser beam characterization system
patent, September 2003
- Eckert, Gerd; Mann, Klaus; Vogler, Klaus
- US Patent Document 6,624,424
Laser generator
patent, January 2008
- Haji, Nobuyuki; Eguchi, Satoshi; Yamamoto, Atsuki
- US Patent Document 7,315,561
Vacuum optical system
patent, July 1996
- Nagai, Komei; Iketaki, Yoshinori; Horikawa, Yoshiaki
- US Patent Document 5,533,083
Methods for Achieving High Resolution Microfluoroscopy
patent-application, October 2005
- Hirsch, Gregory
- US Patent Application 11/095085; 20050220266
Slit Detector for Optical Detector System
patent, November 1975
- Whitman, Robert L.
- US Patent Document 3919562
Variable magnification variable dispersion glancing incidence imaging x-ray spectroscopic telescope
patent, May 1991
- Hoover, Richard B.
- US Patent Document 5,016,265
Beam parameter monitoring unit for a molecular fluorine (F2) laser
patent, March 2003
- Voss, Frank
- US Patent Document 6,529,533
Systems and methods for measurement or analysis of a specimen using separated spectral peaks in light
patent, June 2006
- Janik, Gary
- US Patent Document 7,067,819
Optical pickup apparatus for detection of focusing error, tracking error, and information
patent, July 1990
- Sunagawa, Hiroshi
- US Patent Document 4,945,527
Vacuum ultraviolet laser wavelength measuring apparatus
patent, October 2003
- Wakabayashi, Osamu; Enami, Tatsuo; Nagai, Shinji
- US Patent Document 6,636,297
Instrumentation for analysis and utilization of extreme-ultraviolet and soft x-ray high-order harmonics
journal, November 2004
- Poletto, L.; Bonora, S.; Pascolini, M.
- Review of Scientific Instruments, Vol. 75, Issue 11
Nanograting-based compact vacuum ultraviolet spectrometer and beam profiler for in situ characterization of high-order harmonic generation light sources
journal, June 2010
- Kornilov, Oleg; Wilcox, Russell; Gessner, Oliver
- Review of Scientific Instruments, Vol. 81, Issue 6
Methods and apparatus for DNA sequencing
patent, October 1997
- Ulmer, Kevin
- US Patent Document 5,674,743
Large-area achromatic interferometric lithography for 100 nm period gratings and grids
journal, November 1996
- Savas, T. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 6
