DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

Abstract

The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Inventors:
; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1107633
Patent Number(s):
8569677
Application Number:
12/843,773
Assignee:
LBNL
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01J - MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States: N. p., 2013. Web.
Gessner, Oliver, Kornilov, Oleg A, & Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States.
Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Tue . "Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector". United States. https://www.osti.gov/servlets/purl/1107633.
@article{osti_1107633,
title = {Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector},
author = {Gessner, Oliver and Kornilov, Oleg A and Wilcox, Russell B},
abstractNote = {The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {10}
}

Works referenced in this record:

Efficient monochromator to isolate VUV light generated by four-wave mixing techniques
journal, January 1988


Time-delay compensated monochromator for the spectral selection of extreme-ultraviolet high-order laser harmonics
journal, December 2009


Achromatic interferometric lithography for 100-nm-period gratings and grids
journal, November 1995


VUV laser beam characterization system
patent, September 2003


Laser generator
patent, January 2008


Vacuum optical system
patent, July 1996


Methods for Achieving High Resolution Microfluoroscopy
patent-application, October 2005


Slit Detector for Optical Detector System
patent, November 1975


X-ray microscope
patent, September 1995


Vacuum ultraviolet laser wavelength measuring apparatus
patent, October 2003


Instrumentation for analysis and utilization of extreme-ultraviolet and soft x-ray high-order harmonics
journal, November 2004


Large-area achromatic interferometric lithography for 100 nm period gratings and grids
journal, November 1996