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Title: Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector

Abstract

The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.

Inventors:
; ;
Issue Date:
Research Org.:
LBNL (Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1107633
Patent Number(s):
8,569,677
Application Number:
12/843,773
Assignee:
LBNL
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States: N. p., 2013. Web.
Gessner, Oliver, Kornilov, Oleg A, & Wilcox, Russell B. Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector. United States.
Gessner, Oliver, Kornilov, Oleg A, and Wilcox, Russell B. Tue . "Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector". United States. https://www.osti.gov/servlets/purl/1107633.
@article{osti_1107633,
title = {Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector},
author = {Gessner, Oliver and Kornilov, Oleg A and Wilcox, Russell B},
abstractNote = {The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {10}
}

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