Stable wafer-carrier system
Abstract
One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.
- Inventors:
- Issue Date:
- Research Org.:
- Silevo, Inc. (Fremont, CA)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1107612
- Patent Number(s):
- 8562745
- Application Number:
- 12/963,445
- Assignee:
- Silevo, Inc. (Fremont, CA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
- DOE Contract Number:
- EE0000589
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Rozenzon, Yan, Trujillo, Robert T, and Beese, Steven C. Stable wafer-carrier system. United States: N. p., 2013.
Web.
Rozenzon, Yan, Trujillo, Robert T, & Beese, Steven C. Stable wafer-carrier system. United States.
Rozenzon, Yan, Trujillo, Robert T, and Beese, Steven C. Tue .
"Stable wafer-carrier system". United States. https://www.osti.gov/servlets/purl/1107612.
@article{osti_1107612,
title = {Stable wafer-carrier system},
author = {Rozenzon, Yan and Trujillo, Robert T and Beese, Steven C},
abstractNote = {One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 22 00:00:00 EDT 2013},
month = {Tue Oct 22 00:00:00 EDT 2013}
}
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