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Title: MEMS based pyroelectric thermal energy harvester

Abstract

A pyroelectric thermal energy harvesting apparatus for generating an electric current includes a cantilevered layered pyroelectric capacitor extending between a first surface and a second surface, where the first surface includes a temperature difference from the second surface. The layered pyroelectric capacitor includes a conductive, bimetal top electrode layer, an intermediate pyroelectric dielectric layer and a conductive bottom electrode layer. In addition, a pair of proof masses is affixed at a distal end of the layered pyroelectric capacitor to face the first surface and the second surface, wherein the proof masses oscillate between the first surface and the second surface such that a pyroelectric current is generated in the pyroelectric capacitor due to temperature cycling when the proof masses alternately contact the first surface and the second surface.

Inventors:
;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1093276
Patent Number(s):
8519595
Application Number:
12/874,407
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Hunter, Scott R, and Datskos, Panagiotis G. MEMS based pyroelectric thermal energy harvester. United States: N. p., 2013. Web.
Hunter, Scott R, & Datskos, Panagiotis G. MEMS based pyroelectric thermal energy harvester. United States.
Hunter, Scott R, and Datskos, Panagiotis G. Tue . "MEMS based pyroelectric thermal energy harvester". United States. https://www.osti.gov/servlets/purl/1093276.
@article{osti_1093276,
title = {MEMS based pyroelectric thermal energy harvester},
author = {Hunter, Scott R and Datskos, Panagiotis G},
abstractNote = {A pyroelectric thermal energy harvesting apparatus for generating an electric current includes a cantilevered layered pyroelectric capacitor extending between a first surface and a second surface, where the first surface includes a temperature difference from the second surface. The layered pyroelectric capacitor includes a conductive, bimetal top electrode layer, an intermediate pyroelectric dielectric layer and a conductive bottom electrode layer. In addition, a pair of proof masses is affixed at a distal end of the layered pyroelectric capacitor to face the first surface and the second surface, wherein the proof masses oscillate between the first surface and the second surface such that a pyroelectric current is generated in the pyroelectric capacitor due to temperature cycling when the proof masses alternately contact the first surface and the second surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {8}
}

Works referenced in this record:

Thermal energy harvesting through pyroelectricity
journal, March 2010


Thermoelectric automotive waste heat energy recovery using maximum power point tracking
journal, June 2009


Si-monolithic integrated pyroelectric infrared sensor made of PbTiO3 thin films
journal, January 1985


Energy Scavenging for Mobile and Wireless Electronics
journal, January 2005


Energy scavenging with shoe-mounted piezoelectrics
journal, January 2001


On thermoelectric and pyroelectric energy harvesting
journal, September 2009