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Title: MEMS based pyroelectric thermal energy harvester

Abstract

A pyroelectric thermal energy harvesting apparatus for generating an electric current includes a cantilevered layered pyroelectric capacitor extending between a first surface and a second surface, where the first surface includes a temperature difference from the second surface. The layered pyroelectric capacitor includes a conductive, bimetal top electrode layer, an intermediate pyroelectric dielectric layer and a conductive bottom electrode layer. In addition, a pair of proof masses is affixed at a distal end of the layered pyroelectric capacitor to face the first surface and the second surface, wherein the proof masses oscillate between the first surface and the second surface such that a pyroelectric current is generated in the pyroelectric capacitor due to temperature cycling when the proof masses alternately contact the first surface and the second surface.

Inventors:
;
Issue Date:
Research Org.:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1093276
Patent Number(s):
8519595
Application Number:
12/874,407
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Hunter, Scott R, and Datskos, Panagiotis G. MEMS based pyroelectric thermal energy harvester. United States: N. p., 2013. Web.
Hunter, Scott R, & Datskos, Panagiotis G. MEMS based pyroelectric thermal energy harvester. United States.
Hunter, Scott R, and Datskos, Panagiotis G. Tue . "MEMS based pyroelectric thermal energy harvester". United States. https://www.osti.gov/servlets/purl/1093276.
@article{osti_1093276,
title = {MEMS based pyroelectric thermal energy harvester},
author = {Hunter, Scott R and Datskos, Panagiotis G},
abstractNote = {A pyroelectric thermal energy harvesting apparatus for generating an electric current includes a cantilevered layered pyroelectric capacitor extending between a first surface and a second surface, where the first surface includes a temperature difference from the second surface. The layered pyroelectric capacitor includes a conductive, bimetal top electrode layer, an intermediate pyroelectric dielectric layer and a conductive bottom electrode layer. In addition, a pair of proof masses is affixed at a distal end of the layered pyroelectric capacitor to face the first surface and the second surface, wherein the proof masses oscillate between the first surface and the second surface such that a pyroelectric current is generated in the pyroelectric capacitor due to temperature cycling when the proof masses alternately contact the first surface and the second surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 27 00:00:00 EDT 2013},
month = {Tue Aug 27 00:00:00 EDT 2013}
}

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