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Title: Nonlinear nanomechanical oscillators for ultrasensitive inertial detection

Abstract

A system for ultrasensitive mass and/or force detection of this invention includes a mechanical oscillator driven to oscillate in a nonlinear regime. The mechanical oscillator includes a piezoelectric base with at least one cantilever resonator etched into the piezoelectric base. The cantilever resonator is preferably a nonlinear resonator which is driven to oscillate with a frequency and an amplitude. The system of this invention detects an amplitude collapse of the cantilever resonator at a bifurcation frequency as the cantilever resonator stimulated over a frequency range. As mass and/or force is introduced to the cantilever resonator, the bifurcation frequency shifts along a frequency axis in proportion to the added mass.

Inventors:
;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1093227
Patent Number(s):
8505382
Application Number:
13/024,797
Assignee:
UT-Battelle, LLC (Oak Ridge, TN)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Datskos, Panagiotis George, and Lavrik, Nickolay V. Nonlinear nanomechanical oscillators for ultrasensitive inertial detection. United States: N. p., 2013. Web.
Datskos, Panagiotis George, & Lavrik, Nickolay V. Nonlinear nanomechanical oscillators for ultrasensitive inertial detection. United States.
Datskos, Panagiotis George, and Lavrik, Nickolay V. Tue . "Nonlinear nanomechanical oscillators for ultrasensitive inertial detection". United States. https://www.osti.gov/servlets/purl/1093227.
@article{osti_1093227,
title = {Nonlinear nanomechanical oscillators for ultrasensitive inertial detection},
author = {Datskos, Panagiotis George and Lavrik, Nickolay V},
abstractNote = {A system for ultrasensitive mass and/or force detection of this invention includes a mechanical oscillator driven to oscillate in a nonlinear regime. The mechanical oscillator includes a piezoelectric base with at least one cantilever resonator etched into the piezoelectric base. The cantilever resonator is preferably a nonlinear resonator which is driven to oscillate with a frequency and an amplitude. The system of this invention detects an amplitude collapse of the cantilever resonator at a bifurcation frequency as the cantilever resonator stimulated over a frequency range. As mass and/or force is introduced to the cantilever resonator, the bifurcation frequency shifts along a frequency axis in proportion to the added mass.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {8}
}

Works referenced in this record:

Dynamic pull-in phenomenon in MEMS resonators
journal, September 2006


Linear and Nonlinear Tuning of Parametrically Excited MEMS Oscillators
journal, April 2007


Mass Sensing Based on Deterministic and Stochastic Responses of Elastically Coupled Nanocantilevers
journal, September 2009