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Title: Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material

Abstract

A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.

Inventors:
; ; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1092768
Patent Number(s):
8525619
Application Number:
12/790,303
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Olsson, Roy H., El-Kady, Ihab F., Ziaei-Moayyed, Maryam, Branch, Darren W., Su, Mehmet F., and Reinke, Charles M. Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material. United States: N. p., 2013. Web.
Olsson, Roy H., El-Kady, Ihab F., Ziaei-Moayyed, Maryam, Branch, Darren W., Su, Mehmet F., & Reinke, Charles M. Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material. United States.
Olsson, Roy H., El-Kady, Ihab F., Ziaei-Moayyed, Maryam, Branch, Darren W., Su, Mehmet F., and Reinke, Charles M. Tue . "Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material". United States. https://www.osti.gov/servlets/purl/1092768.
@article{osti_1092768,
title = {Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material},
author = {Olsson, Roy H. and El-Kady, Ihab F. and Ziaei-Moayyed, Maryam and Branch, Darren W. and Su, Mehmet F. and Reinke, Charles M.},
abstractNote = {A very high-Q, low insertion loss resonator can be achieved by storing many overtone cycles of a lateral acoustic wave (i.e., Lamb wave) in a lithographically defined suspended membrane comprising a low damping resonator material, such as silicon carbide. The high-Q resonator can sets up a Fabry-Perot cavity in a low-damping resonator material using high-reflectivity acoustic end mirrors, which can comprise phononic crystals. The lateral overtone acoustic wave resonator can be electrically transduced by piezoelectric couplers. The resonator Q can be increased without increasing the impedance or insertion loss by storing many cycles or wavelengths in the high-Q resonator material, with much lower damping than the piezoelectric transducer material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {9}
}

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