DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators

Abstract

A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.

Inventors:
; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1088940
Patent Number(s):
8497747
Application Number:
13/039,029
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States: N. p., 2013. Web.
Wojciechowski, Kenneth E, Olsson, III, Roy H, & Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States.
Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Tue . "Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators". United States. https://www.osti.gov/servlets/purl/1088940.
@article{osti_1088940,
title = {Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators},
author = {Wojciechowski, Kenneth E and Olsson, III, Roy H and Ziaei-Moayyed, Maryam},
abstractNote = {A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {7}
}

Works referenced in this record:

Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
journal, April 2007


Contour-mode piezoelectric micromechanical resonators
patent-application, December 2006


In-plane mechanically coupled microelectromechanical tuning fork resonators
patent, January 2008


VHF and UHF mechanically coupled aluminum nitride MEMS filters
conference, May 2008


Resonator filter structure having equal resonance frequencies
patent, January 2008


Fully-differential mechanically-coupled PZT-on-silicon filters
conference, November 2008


Parallel-resonator HF micromechanical bandpass filters
conference, January 1997


Super high frequency width extensional aluminum nitride (AlN) MEMS resonators
conference, September 2009


One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing
journal, November 2007


Single-resonator fourth-ordfr micromechanical disk filters
conference, January 2005


Filter device and transmitter-receiver utilizing beam-structured micro-resonators
patent, March 2009


Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
conference, May 2007

  • Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
  • 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum
  • https://doi.org/10.1109/FREQ.2007.4319108

High-Q micromechanical resonator devices and filters utilizing same
patent, November 2007


Contour-mode piezoelectric micromechanical resonators
patent, February 2009


Thin-film piezoelectric resonator and filter circuit
patent, June 2009


An MSI Micromechanical Differential Disk-Array Filter
conference, June 2007


Micro-electromechanical device
patent, July 2010