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Title: Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators

Abstract

A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.

Inventors:
; ;
Issue Date:
Research Org.:
SNL-A (Sandia National Laboratories, Albuquerque, NM (United States))
Sponsoring Org.:
USDOE
OSTI Identifier:
1088940
Patent Number(s):
8,497,747
Application Number:
13/039,029
Assignee:
Sandia Corporation (Albuquerque, NM)
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States: N. p., 2013. Web.
Wojciechowski, Kenneth E, Olsson, III, Roy H, & Ziaei-Moayyed, Maryam. Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators. United States.
Wojciechowski, Kenneth E, Olsson, III, Roy H, and Ziaei-Moayyed, Maryam. Tue . "Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators". United States. https://www.osti.gov/servlets/purl/1088940.
@article{osti_1088940,
title = {Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators},
author = {Wojciechowski, Kenneth E and Olsson, III, Roy H and Ziaei-Moayyed, Maryam},
abstractNote = {A microelectromechanical (MEM) filter is disclosed which has a plurality of lattice networks formed on a substrate and electrically connected together in parallel. Each lattice network has a series resonant frequency and a shunt resonant frequency provided by one or more contour-mode resonators in the lattice network. Different types of contour-mode resonators including single input, single output resonators, differential resonators, balun resonators, and ring resonators can be used in MEM filter. The MEM filter can have a center frequency in the range of 10 MHz-10 GHz, with a filter bandwidth of up to about 1% when all of the lattice networks have the same series resonant frequency and the same shunt resonant frequency. The filter bandwidth can be increased up to about 5% by using unique series and shunt resonant frequencies for the lattice networks.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {7}
}

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