Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
Abstract
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
- Inventors:
- Issue Date:
- Research Org.:
- Hysitron, Inc. (Minneapolis, MN)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1084371
- Patent Number(s):
- 8453498
- Application Number:
- 12/886,745
- Assignee:
- Hysitron, Inc. (Minneapolis, MN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
- DOE Contract Number:
- FG02-04ER83979
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 47 OTHER INSTRUMENTATION
Citation Formats
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, and Kounev, Kalin. Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy. United States: N. p., 2013.
Web.
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, & Kounev, Kalin. Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy. United States.
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, and Kounev, Kalin. Tue .
"Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy". United States. https://www.osti.gov/servlets/purl/1084371.
@article{osti_1084371,
title = {Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy},
author = {Warren, Oden L and Asif, Syed Amanula Syed and Cyrankowski, Edward and Kounev, Kalin},
abstractNote = {An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}
}
Works referenced in this record:
High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements
journal, April 2005
- Yu, Ning; Bonin, Wayne A.; Polycarpou, Andreas A.
- Review of Scientific Instruments, Vol. 76, Issue 4