Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy
Abstract
An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.
- Inventors:
- Issue Date:
- Research Org.:
- Hysitron, Inc. (Minneapolis, MN)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1084371
- Patent Number(s):
- 8453498
- Application Number:
- 12/886,745
- Assignee:
- Hysitron, Inc. (Minneapolis, MN)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01D - MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
- DOE Contract Number:
- FG02-04ER83979
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 47 OTHER INSTRUMENTATION
Citation Formats
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, and Kounev, Kalin. Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy. United States: N. p., 2013.
Web.
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, & Kounev, Kalin. Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy. United States.
Warren, Oden L, Asif, Syed Amanula Syed, Cyrankowski, Edward, and Kounev, Kalin. Tue .
"Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy". United States. https://www.osti.gov/servlets/purl/1084371.
@article{osti_1084371,
title = {Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy},
author = {Warren, Oden L and Asif, Syed Amanula Syed and Cyrankowski, Edward and Kounev, Kalin},
abstractNote = {An actuatable capacitive transducer including a transducer body, a first capacitor including a displaceable electrode and electrically configured as an electrostatic actuator, and a second capacitor including a displaceable electrode and electrically configured as a capacitive displacement sensor, wherein the second capacitor comprises a multi-plate capacitor. The actuatable capacitive transducer further includes a coupling shaft configured to mechanically couple the displaceable electrode of the first capacitor to the displaceable electrode of the second capacitor to form a displaceable electrode unit which is displaceable relative to the transducer body, and an electrically-conductive indenter mechanically coupled to the coupling shaft so as to be displaceable in unison with the displaceable electrode unit.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jun 04 00:00:00 EDT 2013},
month = {Tue Jun 04 00:00:00 EDT 2013}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
patent, February 2000
- Bonin, Wayne A.
- US Patent Document 6,026,677
High-resolution capacitive load-displacement transducer and its application in nanoindentation and adhesion force measurements
journal, April 2005
- Yu, Ning; Bonin, Wayne A.; Polycarpou, Andreas A.
- Review of Scientific Instruments, Vol. 76, Issue 4
Multi-dimensional capacitive transducer
patent, February 1999
- Bonin, Wayne A.
- US Patent Document 5,869,751
Mems Nanoindenter
patent-application, November 2008
- Enoksson, Peter; Nafari, Alexandra; Olin, Hakan
- US Patent Application 10/586729; 20080276727
Dual capacitance type bonded pressure transducer
patent, April 1980
- Sikorra, Charles F.
- US Patent Document 4,196,632
Micromachined comb drive for quantitative nanoindentation
patent, April 2012
- Oh, Yunje; Syed Asif, Syed Amanula; Warren, Oden Lee
- US Patent Document 8,161,803
Multi-dimensional capacitive transducer
patent, August 1997
- Bonin, Wayne A.
- US Patent Document 5,661,235
Capacitive transducer with electrostatic actuation
patent, November 1996
- Bonin, Wayne A.
- US Patent Document 5,576,483
Mechanical and surface force nanoprobe
patent, March 1993
- Burnham, Nancy A.; Colton, Richard J.
- US Patent Document 5,193,383
Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
patent, September 1996
- Bonin, Wayne A.
- US Patent Document 5,553,486
Capacitive auto-sensing micro-probe
patent, November 1998
- Cheng, Shih-Tung
- US Patent Document 5,834,643
Probes for measuring apparatus
patent, February 1985
- Heathcote, Geoffrey L.; Hollowell, Alan C.
- US Patent Document 4,498,043
Vehicle performance analyzer
patent, September 1987
- Bonin, Wayne A.; McCumber, Roger D.; Teder, Rein S.
- US Patent Document 4,694,687