DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Method for reuse of wafers for growth of vertically-aligned wire arrays


Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

; ; ;
Issue Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
OSTI Identifier:
Patent Number(s):
Application Number:
California Institute of Technology (Pasadena, CA)
Patent Classifications (CPCs):
DOE Contract Number:  
Resource Type:
Country of Publication:
United States

Citation Formats

Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States: N. p., 2013. Web.
Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, & Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays. United States.
Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Tue . "Method for reuse of wafers for growth of vertically-aligned wire arrays". United States.
title = {Method for reuse of wafers for growth of vertically-aligned wire arrays},
author = {Spurgeon, Joshua M and Plass, Katherine E and Lewis, Nathan S and Atwater, Harry A},
abstractNote = {Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}

Works referenced in this record:

Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006

Epitaxial core–shell and core–multishell nanowire heterostructures
journal, November 2002

Impurities in silicon solar cells
journal, April 1980

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array
journal, January 2008

High‐efficiency electrodeposited cadmium telluride solar cells
journal, February 1982

High Density Germanium Nanowire Assemblies:  Contact Challenges and Electrical Characterization
journal, January 2006

Highly Anisotropic Crystals
book, January 1987

Si nanowires synthesized with Cu catalyst
journal, January 2007

Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells
journal, June 2005

Impurity effects in silicon for high efficiency solar cells
journal, May 1986

High efficiency inorganic nanorod-enhanced photovoltaic devices
patent-application, September 2006

Nanowire light emitting device and method of fabricating the same
patent-application, October 2005

Systems and Methods for Nanowire Growth
patent-application, May 2009

Macroporous Silicon as a Model for Silicon Wire Array Solar Cells
journal, April 2008

Controlled Growth of Si Nanowire Arrays for Device Integration
journal, March 2005

Silicon nanowire solar cells
journal, December 2007

Electrochemical fabrication of cadmium chalcogenide microdiode arrays
journal, July 1993

Nanowire dye-sensitized solar cells
journal, May 2005

Electrodeposition of CdTe Thin Films
journal, January 1984

Computer-Assisted Web Services Access Application Program Generation
patent-application, June 2008

Structures of and Methods for Forming Vertically Aligned Si Wire Arrays
patent-application, January 2009

"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions
journal, May 1989

Growth of vertically aligned Si wire arrays over large areas (>1cm2) with Au and Cu catalysts
journal, September 2007

Controlled partial embedding of carbon nanotubes within flexible transparent layers
journal, December 2007

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
journal, July 1986

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics
journal, January 2002

Thermal interface material with carbon nanotubes
patent, August 2007

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications
journal, September 2005

Silicon Nanowire Array Photoelectrochemical Cells
journal, September 2007

  • Goodey, Adrian P.; Eichfeld, Sarah M.; Lew, Kok-Keong
  • Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12344-12345

Kinetic studies of carrier transport and recombination at the n-silicon methanol interface
journal, August 1986

630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction
journal, August 1984

Rare Earth Elements—Critical Resources for High Technology
report, November 2002

Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays
journal, January 2004

Flexible energy storage devices based on nanocomposite paper
journal, August 2007

Nanofiber surface based capacitors
patent, October 2006

Semiconducting Cadmium Telluride
journal, December 1954

Semiconductors for Photoelectrolysis
journal, August 1978

Nanofiber surface based capacitors
patent, June 2006

Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates
journal, January 1996

Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
journal, October 2003

Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth
journal, October 2003

Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells
journal, February 2008

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
journal, October 1997

Polymer-Embedded Semiconductor Rod Arrays
patent-application, March 2009

Method of making silicon quantum wires on a substrate
patent, November 1999

Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography
journal, January 2006

Amorphous-crystalline tandem nanostructured solar cells
patent-application, May 2008

Nanowire vias
patent-application, December 2008

Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
journal, March 2007

journal, August 2004

A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998

Light-induced generation of hydrogen at CdS-monograin membranes
journal, March 1983

Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000

Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts
journal, March 2002

Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration
journal, June 2002

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
patent-application, November 2002

Embedded Carbon-Nanotube-Stiffened Polymer Surfaces
journal, January 2005

Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964

A review of some charge transport properties of silicon
journal, February 1977

One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003

Nanostructured imaging transfer element
patent, October 1994

Silicon optoelectronic device using silicon nanowire and method for preparing the same
patent-application, November 2005

Properties of gold in silicon
journal, February 1966

n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell
journal, February 1983

Nanoimprint Lithography: Methods and Material Requirements
journal, February 2007

Solubility and Diffusivity of Gold, Iron, and Copper in Silicon
journal, December 1956

Nanostructure Arrays and Methods for Forming Same
patent-application, April 2008

Multilayered Film-Nanowire Composite, Bifacial, and Tandem Solar Cells
patent-application, July 2008

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth
journal, April 2002

Strong broadband optical absorption in silicon nanowire films
journal, July 2007

Growth of single crystal nanowires
patent, February 2008

Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008

Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays
journal, October 2005

Nanowire horizontal growth and substrate removal
patent, July 2009

Systems and methods for nanowire growth and harvesting
patent, September 2006

Photovoltaic Wire
patent-application, October 2009

Vertically Oriented Germanium Nanowires Grown from Gold Colloids on Silicon Substrates and Subsequent Gold Removal
journal, June 2007

Spectroscopic ellipsometry investigation of optical and interface properties of CdTe films deposited on metal foils
journal, May 2004

Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices
journal, April 2002

Synthesis of High Density, Size-Controlled Si Nanowire Arrays via Porous Anodic Alumina Mask
journal, January 2006

Synthesis of stoichiometric cadmium selenide films via sequential monolayer electrodeposition
journal, November 1991

Method of synthesizing silicon wires
patent-application, July 2007

Electrical Characteristics and Chemical Stability of Non-Oxidized, Methyl-Terminated Silicon Nanowires
journal, June 2006

High‐efficiency electroplated heterojunction solar cell
journal, January 1984

Photovoltaic Device Using Nanostructured Material
patent-application, February 2009

Large-area blown bubble films of aligned nanowires and carbon nanotubes
journal, May 2007

Hybrid solar cells with vertically aligned CdTe nanorods and a conjugated polymer
journal, March 2005

Quantitative Measurement of the Electron and Hole Mobility−Lifetime Products in Semiconductor Nanowires
journal, April 2006

Nanochannel apparatus and method of fabricating
patent-application, May 2007

Nanowires in thin-film silicon solar cells
patent-application, February 2008

Diameter-Controlled Synthesis of Silicon Nanowires Using Nanoporous Alumina Membranes
journal, January 2005

Microwave assisted patterning of vertically aligned carbon nanotubes onto polymer substrates
journal, January 2006

  • Sunden, Erik; Moon, Jack K.; Wong, C. P.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 24, Issue 4, p. 1947-1950

Structures of Ordered Arrays of Semiconductors
patent-application, January 2009

Biomimetic Assembly of Zinc Oxide Nanorods onto Flexible Polymers
journal, October 2007

Efficient photoinduced charge transfer in TiO2 nanorod/conjugated polymer hybrid materials
journal, November 2006

Hybrid Nanorod-Polymer Solar Cells
journal, March 2002

Photoconverters based on silicon-crystal whiskers
journal, April 1978

Diameter-Dependent Growth Direction of Epitaxial Silicon Nanowires
journal, April 2005

Cadmium Telluride Solar Cells
book, April 2003

Thermal interface material and method for manufacturing same
patent-application, June 2006

Method and apparatus for growing oriented whisker arrays
patent, October 2001

Aligned Carbon Nanotube−Polymer Hybrid Architectures for Diverse Flexible Electronic Applications
journal, February 2006

Fabrication of densely packed, well-ordered, high-aspect-ratio silicon nanopillars over large areas using block copolymer lithography
journal, August 2006

Nanostructure-reinforced composite articles and methods
patent-application, March 2008

High Aspect Ratio Silicon Wire Array Photoelectrochemical Cells
journal, October 2007

  • Maiolo, James R.; Kayes, Brendan M.; Filler, Michael A.
  • Journal of the American Chemical Society, Vol. 129, Issue 41, p. 12346-12347

A 14% efficient nonaqueous semiconductor/liquid junction solar cell
journal, November 1984

Systems and methods for nanowire growth and manufacturing
patent-application, December 2005

New Facets of CdTe Electrodeposition in Acidic Solutions with Higher Tellurium Concentrations
journal, January 2004