Method for reuse of wafers for growth of vertically-aligned wire arrays

Spurgeon, Joshua M; Plass, Katherine E; Lewis, Nathan S; Atwater, Harry A

Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Abstract

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Inventors:: Spurgeon, Joshua M; Plass, Katherine E; Lewis, Nathan S; Atwater, Harry A

Issue Date:: Tue Jun 04 00:00:00 EDT 2013

Research Org.:: California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1084359

Patent Number(s):: 8455333

Application Number:: 13/550,395

Assignee:: California Institute of Technology (Pasadena, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L21/02381 - {Silicon, silicon germanium, germanium}
H01L21/0256 - {Selenides}
H01L21/02562 - {Tellurides}
H01L21/02603 - {Nanowires}
H01L21/0262 - {Reduction or decomposition of gaseous compounds, e.g. CVD}
H01L21/02639 - {Preparation of substrate for selective deposition}
H01L21/02645 - {Seed materials}
H01L21/02653 - {Vapour-liquid-solid growth}
H01L29/0665 - {the shape of the body defining a nanostructure
H01L29/0673 - {oriented parallel to a substrate}
H01L29/0676 - {oriented perpendicular or at an angle to a substrate}
H01L29/16 - including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
H01L29/20 - including, apart from doping materials or other impurities, only AIIIBV compounds
H01L29/22 - including, apart from doping materials or other impurities, only AIIBVI compounds

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S438/962 - Quantum dots and lines

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DOE Contract Number:: FG02-03ER15483

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays.  United States: N. p., 2013. 
        Web.

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                    Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, & Atwater, Harry A. Method for reuse of wafers for growth of vertically-aligned wire arrays.  United States.

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                    Spurgeon, Joshua M, Plass, Katherine E, Lewis, Nathan S, and Atwater, Harry A. Tue .  
        "Method for reuse of wafers for growth of vertically-aligned wire arrays".  United States.  https://www.osti.gov/servlets/purl/1084359.

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@article{osti_1084359,

  title        = {Method for reuse of wafers for growth of vertically-aligned wire arrays},

  author       = {Spurgeon, Joshua M and Plass, Katherine E and Lewis, Nathan S and Atwater, Harry A},

  abstractNote = {Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jun 04 00:00:00 EDT 2013},

  month        = {Tue Jun 04 00:00:00 EDT 2013}

}

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Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Abstract

Citation Formats

Semiconductor Nanowires: From Self-Organization to Patterned Growth journal, April 2006

Epitaxial core–shell and core–multishell nanowire heterostructures journal, November 2002

Impurities in silicon solar cells journal, April 1980

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array journal, January 2008

High‐efficiency electrodeposited cadmium telluride solar cells journal, February 1982

High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization journal, January 2006

Highly Anisotropic Crystals book, January 1987

Si nanowires synthesized with Cu catalyst journal, January 2007

Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells journal, June 2005

Impurity effects in silicon for high efficiency solar cells journal, May 1986

High efficiency inorganic nanorod-enhanced photovoltaic devices patent-application, September 2006

Photoelectric conversion device and method of production thereof patent, November 2003

Nanowire light emitting device and method of fabricating the same patent-application, October 2005

Systems and Methods for Nanowire Growth patent-application, May 2009

Macroporous Silicon as a Model for Silicon Wire Array Solar Cells journal, April 2008

Controlled Growth of Si Nanowire Arrays for Device Integration journal, March 2005

Silicon nanowire solar cells journal, December 2007

Electrochemical fabrication of cadmium chalcogenide microdiode arrays journal, July 1993

Nanowire dye-sensitized solar cells journal, May 2005

Electrodeposition of CdTe Thin Films journal, January 1984

Use of sacrificial layers in the manufacture of high performance systems on tailored substrates patent, December 2007

Computer-Assisted Web Services Access Application Program Generation patent-application, June 2008

Structures of and Methods for Forming Vertically Aligned Si Wire Arrays patent-application, January 2009

"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions journal, May 1989

Growth of vertically aligned Si wire arrays over large areas (>1cm2) with Au and Cu catalysts journal, September 2007

Controlled partial embedding of carbon nanotubes within flexible transparent layers journal, December 2007

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water journal, July 1986

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics journal, January 2002

Thermal interface material with carbon nanotubes patent, August 2007

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications journal, September 2005

Silicon Nanowire Array Photoelectrochemical Cells journal, September 2007

Kinetic studies of carrier transport and recombination at the n-silicon methanol interface journal, August 1986

630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction journal, August 1984

Rare Earth Elements—Critical Resources for High Technology report, November 2002

Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays journal, January 2004

Flexible energy storage devices based on nanocomposite paper journal, August 2007

Nanofiber surface based capacitors patent, October 2006

Semiconducting Cadmium Telluride journal, December 1954

Semiconductors for Photoelectrolysis journal, August 1978

Nanofiber surface based capacitors patent, June 2006

Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates journal, January 1996

Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices journal, October 2003

Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth journal, October 2003

Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells journal, February 2008

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique journal, October 1997

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures patent, July 2007

Polymer-Embedded Semiconductor Rod Arrays patent-application, March 2009

Method of making silicon quantum wires on a substrate patent, November 1999

Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography journal, January 2006

Amorphous-crystalline tandem nanostructured solar cells patent-application, May 2008

Nanowire vias patent-application, December 2008

Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density journal, March 2007

SEMICONDUCTOR NANOWIRES AND NANOTUBES journal, August 2004

A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires journal, January 1998

Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes patent, May 1994

Light-induced generation of hydrogen at CdS-monograin membranes journal, March 1983

Silicon Nanowires: Preparation, Device Fabrication, and Transport Properties journal, December 2000

Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts journal, March 2002

Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration journal, June 2002

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom patent-application, November 2002

Embedded Carbon-Nanotube-Stiffened Polymer Surfaces journal, January 2005

Vapor-liquid-solid mechanism of single crystal growth journal, March 1964

A review of some charge transport properties of silicon journal, February 1977

One-Dimensional Nanostructures: Synthesis, Characterization, and Applications journal, March 2003

Nanostructured imaging transfer element patent, October 1994

Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors patent, September 2006

Silicon optoelectronic device using silicon nanowire and method for preparing the same patent-application, November 2005

Properties of gold in silicon journal, February 1966

n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell journal, February 1983

Nanoimprint Lithography: Methods and Material Requirements journal, February 2007

Solubility and Diffusivity of Gold, Iron, and Copper in Silicon journal, December 1956

Nanostructure Arrays and Methods for Forming Same patent-application, April 2008

Multilayered Film-Nanowire Composite, Bifacial, and Tandem Solar Cells patent-application, July 2008

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth journal, April 2002

Strong broadband optical absorption in silicon nanowire films journal, July 2007

Optoelectronic devices utilizing materials having enhanced electronic transitions patent-application, December 2007

Growth of single crystal nanowires patent, February 2008

Semiconductor Nanowires: From Self-Organization to Patterned Growth
journal, April 2006

Epitaxial core–shell and core–multishell nanowire heterostructures
journal, November 2002

Impurities in silicon solar cells
journal, April 1980

Experimental Observation of an Extremely Dark Material Made By a Low-Density Nanotube Array
journal, January 2008

High‐efficiency electrodeposited cadmium telluride solar cells
journal, February 1982

High Density Germanium Nanowire Assemblies: Contact Challenges and Electrical Characterization
journal, January 2006

Highly Anisotropic Crystals
book, January 1987

Si nanowires synthesized with Cu catalyst
journal, January 2007

Comparison of the device physics principles of planar and radial p-n junction nanorod solar cells
journal, June 2005

Impurity effects in silicon for high efficiency solar cells
journal, May 1986

High efficiency inorganic nanorod-enhanced photovoltaic devices
patent-application, September 2006

Photoelectric conversion device and method of production thereof
patent, November 2003

Nanowire light emitting device and method of fabricating the same
patent-application, October 2005

Systems and Methods for Nanowire Growth
patent-application, May 2009

Macroporous Silicon as a Model for Silicon Wire Array Solar Cells
journal, April 2008

Controlled Growth of Si Nanowire Arrays for Device Integration
journal, March 2005

Silicon nanowire solar cells
journal, December 2007

Electrochemical fabrication of cadmium chalcogenide microdiode arrays
journal, July 1993

Nanowire dye-sensitized solar cells
journal, May 2005

Electrodeposition of CdTe Thin Films
journal, January 1984

Use of sacrificial layers in the manufacture of high performance systems on tailored substrates
patent, December 2007

Computer-Assisted Web Services Access Application Program Generation
patent-application, June 2008

Structures of and Methods for Forming Vertically Aligned Si Wire Arrays
patent-application, January 2009

"Ideal" behavior of the open circuit voltage of semiconductor/liquid junctions
journal, May 1989

Growth of vertically aligned Si wire arrays over large areas (>1cm²) with Au and Cu catalysts
journal, September 2007

Controlled partial embedding of carbon nanotubes within flexible transparent layers
journal, December 2007

A study on deep etching of silicon using ethylene-diamine-pyrocatechol-water
journal, July 1986

Semiconductor Nanowire Array: Potential Substrates for Photocatalysis and Photovoltaics
journal, January 2002

Thermal interface material with carbon nanotubes
patent, August 2007

Aligned Single-Crystalline Si Nanowire Arrays for Photovoltaic Applications
journal, September 2005

Silicon Nanowire Array Photoelectrochemical Cells
journal, September 2007

Kinetic studies of carrier transport and recombination at the n-silicon methanol interface
journal, August 1986

630‐mV open circuit voltage, 12% efficient n ‐Si liquid junction
journal, August 1984

Rare Earth Elements—Critical Resources for High Technology
report, November 2002

Fabrication of Large-Area Silicon Nanowire p–n Junction Diode Arrays
journal, January 2004

Flexible energy storage devices based on nanocomposite paper
journal, August 2007

Nanofiber surface based capacitors
patent, October 2006

Semiconducting Cadmium Telluride
journal, December 1954

Semiconductors for Photoelectrolysis
journal, August 1978

Nanofiber surface based capacitors
patent, June 2006

Electrochemical Fabrication of CdS Nanowire Arrays in Porous Anodic Aluminum Oxide Templates
journal, January 1996

Solvent Compatibility of Poly(dimethylsiloxane)-Based Microfluidic Devices
journal, October 2003

Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth
journal, October 2003

Photovoltaic Measurements in Single-Nanowire Silicon Solar Cells
journal, February 2008

Control of the Size and Position of Silicon Nanowires Grown via the Vapor-Liquid-Solid Technique
journal, October 1997

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures
patent, July 2007

Polymer-Embedded Semiconductor Rod Arrays
patent-application, March 2009

Method of making silicon quantum wires on a substrate
patent, November 1999

Well-ordered ZnO nanowire arrays on GaN substrate fabricated via nanosphere lithography
journal, January 2006

Amorphous-crystalline tandem nanostructured solar cells
patent-application, May 2008

Nanowire vias
patent-application, December 2008

Fabrication of Silicon Nanowire Arrays with Controlled Diameter, Length, and Density
journal, March 2007

SEMICONDUCTOR NANOWIRES AND NANOTUBES
journal, August 2004

A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998

Method for the controlled growth of crystal whiskers and application thereof to the making of tip microcathodes
patent, May 1994

Light-induced generation of hydrogen at CdS-monograin membranes
journal, March 1983

Silicon Nanowires: Preparation, Device Fabrication, and Transport Properties
journal, December 2000

Effects of Interfacial Energetics on the Effective Surface Recombination Velocity of Si/Liquid Contacts
journal, March 2002

Synthesis of Molybdenum Nanowires with Millimeter-Scale Lengths Using Electrochemical Step Edge Decoration
journal, June 2002

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
patent-application, November 2002

Embedded Carbon-Nanotube-Stiffened Polymer Surfaces
journal, January 2005

Vapor-liquid-solid mechanism of single crystal growth
journal, March 1964

A review of some charge transport properties of silicon
journal, February 1977

One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
journal, March 2003

Nanostructured imaging transfer element
patent, October 1994

Method of making an enhanced optical absorption and radiation tolerance in thin-film solar cells and photodetectors
patent, September 2006

Silicon optoelectronic device using silicon nanowire and method for preparing the same
patent-application, November 2005

Properties of gold in silicon
journal, February 1966

n-Type silicon photoelectrochemistry in methanol: Design of a 10.1% efficient semiconductor/liquid junction solar cell
journal, February 1983

Nanoimprint Lithography: Methods and Material Requirements
journal, February 2007

Solubility and Diffusivity of Gold, Iron, and Copper in Silicon
journal, December 1956

Nanostructure Arrays and Methods for Forming Same
patent-application, April 2008

Multilayered Film-Nanowire Composite, Bifacial, and Tandem Solar Cells
patent-application, July 2008

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth
journal, April 2002

Strong broadband optical absorption in silicon nanowire films
journal, July 2007

Optoelectronic devices utilizing materials having enhanced electronic transitions
patent-application, December 2007

Growth of single crystal nanowires
patent, February 2008

Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008

Controlled growth of highly uniform, axial/radial direction-defined, individually addressable InP nanowire arrays
journal, October 2005

Nanowire horizontal growth and substrate removal
patent, July 2009