Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Abstract

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Inventors:

Spurgeon, Joshua M; Plass, Katherine E; Lewis, Nathan S; Atwater, Harry A

Issue Date:

2013-06-04

Research Org.:

California Institute of Technology (CalTech), Pasadena, CA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1084359

Patent Number(s):

8455333

Application Number:

13/550,395

Assignee:

California Institute of Technology (Pasadena, CA)

Patent Classifications (CPCs):

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L29/16 - including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
H01L21/02653 - {Vapour-liquid-solid growth}
H01L21/02562 - {Tellurides}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10S438/962 - Quantum dots and lines

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L21/02381 - {Silicon, silicon germanium, germanium}
H01L29/0676 - {oriented perpendicular or at an angle to a substrate}
H01L21/02645 - {Seed materials}
H01L29/20 - including, apart from doping materials or other impurities, only AIIIBV compounds
H01L29/22 - including, apart from doping materials or other impurities, only AIIBVI compounds
H01L21/02603 - {Nanowires}
H01L29/0665 - {the shape of the body defining a nanostructure

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

H01L29/0673 - {oriented parallel to a substrate}
H01L21/02639 - {Preparation of substrate for selective deposition}
H01L21/0262 - {Reduction or decomposition of gaseous compounds, e.g. CVD}
H01L21/0256 - {Selenides}

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DOE Contract Number:  

FG02-03ER15483

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

36 MATERIALS SCIENCE