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Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.
Inventors:
; ; ;
Issue Date:
OSTI Identifier:
1084359
Assignee:
California Institute of Technology (Pasadena, CA) DOESC
Patent Number(s):
8,455,333
Application Number:
13/550,395
Contract Number:
FG02-03ER15483
Research Org:
California Institute of Technology (Pasadena, CA)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE