Method for reuse of wafers for growth of vertically-aligned wire arrays

Title: Method for reuse of wafers for growth of vertically-aligned wire arrays

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Reusing a Si wafer for the formation of wire arrays by transferring the wire arrays to a polymer matrix, reusing a patterned oxide for several array growths, and finally polishing and reoxidizing the wafer surface and reapplying the patterned oxide.

Inventors:: Spurgeon, Joshua M; Plass, Katherine E; Lewis, Nathan S; Atwater, Harry A

Issue Date:: 2013-06-04

OSTI Identifier:: 1084359

Assignee:: California Institute of Technology (Pasadena, CA) DOESC

Patent Number(s):: 8,455,333

Application Number:: 13/550,395

Contract Number:: FG02-03ER15483

Research Org:: California Institute of Technology (Pasadena, CA)

Sponsoring Org:: USDOE

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

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