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Title: Thermochemical nanolithography components, systems, and methods


Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

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DOESC (USDOE Office of Science (SC) (United States))
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Georgia Tech Research Corporation (Atlanta, GA)
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United States

Citation Formats

Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., and Hua, Yueming. Thermochemical nanolithography components, systems, and methods. United States: N. p., 2013. Web.
Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., & Hua, Yueming. Thermochemical nanolithography components, systems, and methods. United States.
Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., and Hua, Yueming. Tue . "Thermochemical nanolithography components, systems, and methods". United States.
title = {Thermochemical nanolithography components, systems, and methods},
author = {Riedo, Elisa and Marder, Seth R. and de Heer, Walt A. and Szoskiewicz, Robert J. and Kodali, Vamsi K. and Jones, Simon C. and Okada, Takashi and Wang, Debin and Curtis, Jennifer E. and Henderson, Clifford L. and Hua, Yueming},
abstractNote = {Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}

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