DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Thermochemical nanolithography components, systems, and methods


Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.

; ; ; ; ; ; ; ; ; ;
Issue Date:
Research Org.:
DOESC (USDOE Office of Science (SC) (United States))
Sponsoring Org.:
OSTI Identifier:
Patent Number(s):
Application Number:
Georgia Tech Research Corporation (Atlanta, GA)
Patent Classifications (CPCs):
DOE Contract Number:  
Resource Type:
Country of Publication:
United States

Citation Formats

Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., and Hua, Yueming. Thermochemical nanolithography components, systems, and methods. United States: N. p., 2013. Web.
Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., & Hua, Yueming. Thermochemical nanolithography components, systems, and methods. United States.
Riedo, Elisa, Marder, Seth R., de Heer, Walt A., Szoskiewicz, Robert J., Kodali, Vamsi K., Jones, Simon C., Okada, Takashi, Wang, Debin, Curtis, Jennifer E., Henderson, Clifford L., and Hua, Yueming. Tue . "Thermochemical nanolithography components, systems, and methods". United States.
title = {Thermochemical nanolithography components, systems, and methods},
author = {Riedo, Elisa and Marder, Seth R. and de Heer, Walt A. and Szoskiewicz, Robert J. and Kodali, Vamsi K. and Jones, Simon C. and Okada, Takashi and Wang, Debin and Curtis, Jennifer E. and Henderson, Clifford L. and Hua, Yueming},
abstractNote = {Improved nanolithography components, systems, and methods are described herein. The systems and methods generally employ a resistively heated atomic force microscope tip to thermally induce a chemical change in a surface. In addition, certain polymeric compositions are also disclosed.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {6}

Works referenced in this record:

Order of Magnitude Effects of Thiazole Regioisomerism on the Near-IR Two-Photon Cross-Sections of Dipolar Chromophores
journal, March 2008

Nanometer-Scale Surface Modification Using the Scanning Probe Microscope:  Progress since 1991
journal, June 1997

Multicomponent Submicron Features of Biomolecules Created by Voltage Controlled Deposition from a Nanopipet
journal, July 2003

Atomic Force Microscopy Based Thermal Lithography of Poly( tert -butyl acrylate) Block Copolymer Films for Bioconjugation
journal, August 2008

Patterning proteins and cells using soft lithography
journal, December 1999

Are N , N -Dihydrodiazatetracene Derivatives Antiaromatic?
journal, June 2008

Patterning Polymeric Structures with 2 nm Resolution at 3 nm Half Pitch in Ambient Conditions
journal, July 2007

Measuring material softening with nanoscale spatial resolution using heated silicon probes
journal, February 2007

Bonding Trends and Dimensionality Crossover of Gold Nanoclusters on Metal-Supported MgO Thin Films
journal, July 2006

Immunological synapse arrays: Patterned protein surfaces that modulate immunological synapse structure formation in T cells
journal, April 2006

Metal-Ion Sensing Fluorophores with Large Two-Photon Absorption Cross Sections:  Aza-Crown Ether Substituted Donor−Acceptor−Donor Distyrylbenzenes
journal, August 2004

Activation of Integrin Function by Nanopatterned Adhesive Interfaces
journal, March 2004

A Strategy for the Chemical Synthesis of Nanostructures
journal, April 1995

A Perspective on Modeling Materials in Extreme Environments: Oxidation of Ultrahigh-Temperature Ceramics
journal, May 2006

Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
journal, May 1997

Nanopatterning proteins and peptides
journal, January 2006

Substrate-dependent electronic structure of an organic heterojunction
journal, April 2008

Surface- and tip-enhanced Raman scattering of DNA components
journal, January 2006

Tip-Enhanced Raman Spectroscopy of Benzenethiol Adsorbed on Au and Pt Single-Crystal Surfaces
journal, January 2005

A nondestructive technique for determining the spring constant of atomic force microscope cantilevers
journal, May 2001

Thin, Conformal, and Continuous SnO2 Coatings on Three-Dimensional Biosilica Templates through Hydroxy-Group Amplification and Layer-By-Layer Alkoxide Deposition
journal, July 2007

Molecular complexity and dynamics of cell-matrix adhesions
journal, October 2001

A nondestructive method for determining the spring constant of cantilevers for scanning force microscopy
journal, February 1993

Controllable method for the preparation of metalized probes for efficient scanning near-field optical Raman microscopy
journal, June 2005

Thermochemical Nanolithography of Multifunctional Nanotemplates for Assembling Nano-Objects
journal, December 2009

Applications of dip-pen nanolithography
journal, February 2007

Tip-Enhanced Raman Spectroscopy Can See More:  The Case of Cytochrome c
journal, March 2008

Synthesis, Ionisation Potentials and Electron Affinities of Hexaazatrinaphthylene Derivatives
journal, April 2007

Nonlinear Viscoelastic Dynamics of Nanoconfined Wetting Liquids
journal, March 2008

Transition Structure at the S i ( 100 ) S i O 2 Interface
journal, May 2003

Patterning surfaces with functional polymers
journal, April 2008

Protein Nanoarrays Generated By Dip-Pen Nanolithography
journal, February 2002

Solid-State Thermolytic and Catalytic Reactions in Functionalized Regioregular Polythiophenes
journal, June 2000

Nanocontact Printing:  A Route to Sub-50-nm-Scale Chemical and Biological Patterning
journal, January 2003

Surface-chemical and -morphological gradients
journal, January 2008

Bio-nanopatterning of Surfaces
journal, August 2007

Elastic Property of Vertically Aligned Nanowires
journal, October 2005

Liquid Operation of Silicon Microcantilever Heaters
journal, November 2008

Controlled Growth of Peptide Nanoarrays on Si/SiO x Substrates
journal, September 2008

Limitations of Essential-State Models for the Description of Two-Photon Absorption Processes:  The Example of Bis(dioxaborine)-Substituted Chromophores
journal, January 2004

Ultrahigh-density atomic force microscopy data storage with erase capability
journal, March 1999

Generation of Solution and Surface Gradients Using Microfluidic Systems
journal, October 2000

Tip-Enhanced Raman Spectroscopy of Single RNA Strands: Towards a Novel Direct-Sequencing Method
journal, February 2008

Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters
journal, December 2006

N-type doping of an electron-transport material by controlled gas-phase incorporation of cobaltocene
journal, November 2006

Water-Enhanced Catalysis of CO Oxidation on Free and Supported Gold Nanoclusters
journal, September 2005

Determination of the spring constants of probes for force microscopy/spectroscopy
journal, September 1996

Linear ripples and traveling circular ripples produced on polymers by thermal AFM probes
journal, June 2009

Nanoscale Patterns of Oligonucleotides Formed by Electrohydrodynamic Jet Printing with Applications in Biosensing and Nanomaterials Assembly
journal, December 2008

Locally enhanced Raman spectroscopy with an atomic force microscope
journal, May 2000

Soft Lithography
journal, August 1998

The Evolution of Dip-Pen Nanolithography
journal, January 2004

NanoMechanics: Elasticity in Nano-Objects
book, January 2007

Scanning Probe Lithography Using Self-Assembled Monolayers
journal, November 2003

Scanning thermal lithography: Maskless, submicron thermochemical patterning of photoresist by ultracompliant probes
journal, January 2004

  • Basu, Amar S.; McNamara, Shamus; Gianchandani, Yogesh B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 22, Issue 6

Direct writing and characterization of poly(p-phenylene vinylene) nanostructures
journal, December 2009

Electronic Couplings in Organic Mixed-Valence Compounds:  The Contribution of Photoelectron Spectroscopy
journal, February 2004

Colorless Molecular Dopants for Low-Operating-Voltage Nematic Liquid Crystals
journal, March 2005

Calibration of atomic‐force microscope tips
journal, July 1993

Production of Nanostructures of DNA on Surfaces
journal, June 2002

Implementing the Theory of Sum Frequency Generation Vibrational Spectroscopy: A Tutorial Review
journal, May 2005

Electrostatic nanolithography in polymers using atomic force microscopy
journal, June 2003

Modeling and Simulation of the Interface Temperature Between a Heated Silicon Tip and a Substrate
journal, January 2008

Patterning of Chemical Gradients with Submicrometer Resolution Using Edge-Spreading Lithography
journal, June 2006

Patterning of functional antibodies and other proteins by photolithography of silane monolayers.
journal, October 1996

High-Resolution Near-Field Raman Microscopy of Single-Walled Carbon Nanotubes
journal, March 2003

Nano-chemistry and scanning probe nanolithographies
journal, January 2006

AFM Imaging of Immobilized Fibronectin:  Does the Surface Conjugation Scheme Affect the Protein Orientation/Conformation?
journal, August 2007

Native protein nanolithography that can write, read and erase
journal, March 2007

Delocalization in Platinum−Alkynyl Systems:  A Metal-Bridged Organic Mixed-Valence Compound
journal, September 2004

Nucleation Time of Nanoscale Water Bridges
journal, September 2005

Nanoscopic friction as a probe of local phase transitions
journal, July 2005

Probe-based lithography utilizing thermomechanically activated polymers
patent, November 2008

High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography
journal, April 2007

A Nonvolatile Organic Memory Device Using ITO Surfaces Modified by Ag-Nanodots
journal, April 2008

The “Millipede”—More than thousand tips for future AFM storage
journal, May 2000

Chemically Nanopatterned Surfaces Using Polyelectrolytes and Ultraviolet-Cured Hard Molds
journal, June 2005

Chemical functionalization nanolithography
patent, December 2004

Biologically Active Protein Nanoarrays Generated Using Parallel Dip-Pen Nanolithography
journal, May 2006

Phosphonic Acid Modification of Indium−Tin Oxide Electrodes: Combined XPS/UPS/Contact Angle Studies
journal, April 2008

Nanografting De Novo Proteins onto Gold Surfaces
journal, September 2005

Writing and Reading Methodology for Biochips with Sub-100-nm Chemical Patterns Based on Near-Field Scanning Optical Microscopy
journal, January 2008

Fabrication and Imaging of Nanometer-Sized Protein Patterns
journal, November 1999

Local wettability modification by thermochemical nanolithography with write-read-overwrite capability
journal, December 2007

Biofunctionalized nanoarrays of inorganic structures prepared by dip-pen nanolithography
journal, September 2003

Trends in Electron-Vibration and Electronic Interactions in Bis(dimethylamino) Mixed-Valence Systems: A Joint Experimental and Theoretical Investigation
journal, April 2008

Nanoscale chemical analysis by tip-enhanced Raman spectroscopy
journal, February 2000

Controlling the shape, orientation, and linkage of carbon nanotube features with nano affinity templates
journal, February 2006

Highly efficient green phosphorescent organic light-emitting diodes with simplified device geometry
journal, June 2008

A comprehensive study of short channel effects in organic field-effect transistors
journal, February 2006

Floating Tip Nanolithography
journal, July 2008

Volume of a Nanoscale Water Bridge
journal, December 2005

Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography
journal, August 2004

Isolation and Crystal Structures of Two Singlet Bis(Triarylamine) Dications with Nonquinoidal Geometries
journal, February 2006

Reaction of the Oxygen Molecule at the S i ( 100 ) S i O 2 Interface During Silicon Oxidation
journal, August 2004

Aromatic Amines:  A Comparison of Electron-Donor Strengths
journal, September 2005

Nanofabrication by scanning probe microscope lithography: A review
journal, January 2005

  • Tseng, Ampere A.; Notargiacomo, Andrea; Chen, T. P.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 3

Thermomechanical Formation of Nanoscale Polymer Indents With a Heated Silicon Tip
journal, January 2007

Gradient Chemical Micropatterns:  A Reference Substrate for Surface Nanometrology
journal, July 2005

Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates
journal, August 2008

Tetrastyrylarene Derivatives: Comparison of One- and Two-Photon Spectroscopic Properties with Distyrylarene Analogues
journal, April 2008

New AFM Developments to Study Elasticity and Adhesion at the Nanoscale
book, January 2007

An anionic organic mixed-valence system with a remarkably well-resolved vibrational structure in its intervalence band
journal, December 2002

Fluorenyl-substituted silole molecules: geometric, electronic, optical, and device properties
journal, January 2008

Preparation and characterization of chemical gradient surfaces and their application for the study of cellular interaction phenomena
journal, January 1997

Two-Photon Absorption in Quadrupolar Bis(acceptor)-Terminated Chromophores with Electron-Rich Bis(heterocycle)vinylene Bridges
journal, January 2007

Polymer Pen Lithography
journal, September 2008

Thermal conduction from microcantilever heaters in partial vacuum
journal, January 2007

High electron mobility in nickel bis(dithiolene) complexes
journal, January 2007

"Dip-Pen" Nanolithography
journal, January 1999

Systematic Study on Experimental Conditions for Large-Scale Growth of Aligned ZnO Nanwires on Nitrides
journal, May 2005

Nanoscale deposition of solid inks via thermal dip pen nanolithography
journal, August 2004

Structured and viscous water in subnanometer gaps
journal, March 2007

Alignment and Assembly of Adsorbed Collagen Molecules Induced by Anisotropic Chemical Nanopatterns
journal, October 2005

Calibration of rectangular atomic force microscope cantilevers
journal, October 1999