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Title: Methods and devices for fabricating and assembling printable semiconductor elements

Abstract

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Inventors:
; ; ; ; ; ; ;
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1084062
Patent Number(s):
8440546
Application Number:
13/113,504
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Resource Relation:
Patent File Date: 2011 May 23
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY

Citation Formats

Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States: N. p., 2013. Web.
Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, & Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States.
Nuzzo, Ralph G., Rogers, John A., Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Tue . "Methods and devices for fabricating and assembling printable semiconductor elements". United States. https://www.osti.gov/servlets/purl/1084062.
@article{osti_1084062,
title = {Methods and devices for fabricating and assembling printable semiconductor elements},
author = {Nuzzo, Ralph G. and Rogers, John A. and Menard, Etienne and Lee, Keon Jae and Khang, Dahl-Young and Sun, Yugang and Meitl, Matthew and Zhu, Zhengtao},
abstractNote = {The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {5}
}

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Stretchable and elastic interconnects
patent-application, September 2004


Organic species that facilitate charge transfer to or from nanostructures
patent, September 2005


Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
journal, February 2005


Cooling system for a semiconductor device and method of fabricating same
patent, January 2007


Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
journal, December 2002


Improved Pattern Transfer in Soft Lithography Using Composite Stamps
journal, June 2002


III–V micromachined devices for microsystems
journal, September 1998


Compliant thin film patterns of stiff materials as platforms for stretchable electronics
journal, December 2005


Weave Patterned Organic Transistors on Fiber for E-Textiles
journal, February 2005


Silicon for thin-film transistors
journal, April 2003


Applications
book, January 1991


Stretchable gold conductors on elastomeric substrates
journal, April 2003


Semiconductor device and method of manufacturing the same
patent-application, May 2003


Pattern Transfer Printing by Kinetic Control of Adhesion to an Elastomeric Stamp
patent-application, August 2009


Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire
journal, April 2005


Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
patent-application, June 2004


The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors
journal, July 2005


Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
journal, May 2006


Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon
journal, May 2007


Nanopatterned Biopolymer Optical Device and Method of Manufacturing the Same
patent-application, May 2010


Controlled buckling of semiconductor nanoribbons for stretchable electronics
journal, December 2006


Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces
journal, October 2005


Flexible display designed for minimal mechanical strain
patent-application, June 2006


III-V compounds for solar cell applications
journal, June 1999


Templated Self-Assembly: Formation of Folded Structures by Relaxation of Pre-stressed, Planar Tapes
journal, March 2005


Image Sensor Capable of Judging Proximity to Subject
patent-application, August 2010


Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
journal, March 2003


On-chip natural assembly of silicon photonic bandgap crystals
journal, November 2001


Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
journal, October 2004


Biocompatible Scaffolds and Adipose-Delivered Stem Cells
patent-application, February 2008


Transparent flexible organic thin-film transistors that use printed single-walled carbon nanotube electrodes
journal, March 2006


Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
journal, October 1998


Nanowire Transistor Performance Limits and Applications
journal, November 2008


An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
journal, July 1992


Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
journal, June 2003


The influence of helium-neon laser irradiation on the viability of skin flaps in the rat
journal, January 2000


Ballistic carbon nanotube field-effect transistors
journal, August 2003


Detection and ablation of localized shunting defects in photovoltaics
patent-application, October 2007


Method for plasma deposition on apertured substrates
patent, April 1993


The Adhesion Between Polymers
journal, August 1991


Light active sheet and methods for making the same
patent-application, September 2005


Field-Effect Mobility of Organic Polymer Thin-Film Transistors
journal, October 2004


Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
journal, July 2000


Electrospinning of Nanofibers: Reinventing the Wheel?
journal, July 2004


Dissolvable films of silk fibroin for ultrathin conformal bio-integrated electronics
journal, April 2010


Light redirecting films and film systems
patent-application, October 2008


Mold release layer transferring film and laminate film
patent, August 2007


Flexible Carbon-Nanofiber Connectors with Anisotropic Adhesion Properties
journal, January 2010


Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
journal, September 2004


An improved GaAs device model for the simulation of analog integrated circuit
journal, May 2003


Nanowire heterostructures for encoding information
patent-application, February 2004


Towards woven logic from organic electronic fibres
journal, April 2007


Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
journal, June 2002


Diazonium Salt Modification of Silk Polymer
patent-application, September 2009


Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films
journal, February 2006


Double-metal background driven displays
patent, July 2003


An elastomeric conductor based on polyaniline prepared by mechanical mixing
journal, September 1999


A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
journal, January 1998


Printing Patterns of Proteins
journal, April 1998


Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
journal, July 2003


Silicon Nanowires:  Preparation, Device Fabrication, and Transport Properties
journal, December 2000


Study of Mesa Undercuts Produced in GaAs with H3PO4-Based Etchants
journal, January 1989


Amorphous Si TFTs on plastically deformed spherical domes
journal, April 2002


Field-Effect Transistors Based on Single Semiconducting Oxide Nanobelts
journal, January 2003


Flexible Nanotube Electronics
journal, October 2003


Electro-optic displays, and methods for driving same
patent, September 2005


Printable semiconductor structures and related methods of making and assembling
patent, September 2010


Mesoscale organization of metal nanocrystals
journal, January 2002


Single-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
journal, July 2004


Novel Nanostructures of Functional Oxides Synthesized by Thermal Evaporation
journal, January 2003


Methods for patterning using liquid embossing
patent, August 2005


Methods and devices for fabricating and assembling printable semiconductor elements
patent, July 2011


Light therapy bandage with imbedded emitters
patent-application, October 2007


Invention of the integrated circuit
journal, July 1976


Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates
journal, November 2004


Single-Crystal Nanorings Formed by Epitaxial Self-Coiling of Polar Nanobelts
journal, February 2004


Method of fabricating micron-and submicron-scale elastomeric templates for surface patterning
patent-application, January 2003


Introduction to Organic Thin Film Transistors and Design of n-Channel Organic Semiconductors
journal, August 2004


Laser-lithography on non-planar surfaces
journal, January 2007


Thin-Film Transistors
book, February 2003


Carbon Structures with Three-Dimensional Periodicity at Optical Wavelengths
journal, October 1998


A Printable Form of Single-Crystalline Gallium Nitride for Flexible Optoelectronic Systems
journal, October 2005


Direct Observation of Vapor−Liquid−Solid Nanowire Growth
journal, April 2001


Imprint lithography utilizing room temperature embossing
patent, November 2004


Controlled Synthesis and Photoluminescence Properties of ZnS Nanowires and Nanoribbons
journal, March 2005


The Effectiveness of Silane Adhesion Promoters in the Performance of Polyurethane Adhesives
journal, July 1998


Functional Pixel Circuits for Elastic AMOLED Displays
journal, July 2005


Contact Electrification and Adhesion Between Dissimilar Materials
journal, April 1992


Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)
journal, June 2002


Finer features for functional microdevices
journal, August 2001


Methods fro Stepwise Deposition of Silk Fibroin Coatings
patent-application, August 2009


Highly Emissive Self-assembled Organic Nanoparticles having Dual Color Capacity for Targeted Immunofluorescence Labeling
journal, March 2008


Shaped Films of Ionotropic Hydrogels Fabricated Using Templates of Patterned Paper
journal, January 2009


Nanocomposites
patent-application, May 2004


Decal transfer lithography
patent-application, April 2006


Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species
journal, August 2001


Organic Nanodielectrics for Low Voltage Carbon Nanotube Thin Film Transistors and Complementary Logic Gates
journal, October 2005


Multiple-mode planar-waveguide sensor, fabrication materials and techniques
patent-application, April 2004


Rapid Prototyping of Microfluidic Systems in Poly(dimethylsiloxane)
journal, October 1998


Deformable organic devices
patent-application, October 2005


High-Efficiency Multijunction Solar Cells
journal, March 2007


Electronic materials: Buckling down for flexible electronics
journal, December 2006


Universal description of channel conductivity for nanotube and nanowire transistors
journal, August 2003


Patterned Luminescence of Organic Light-Emitting Diodes by Hot Microcontact Printing (HμCP) of Self-Assembled Monolayers
journal, November 2000


In vivo degradation of three-dimensional silk fibroin scaffolds
journal, August 2008


Optical Systems Fabricated by Printing-based Assembly
patent-application, November 2010


Apparatus relating to block configurations and fluidic self-assembly processes
patent, December 2003


Elastically relaxed free-standing strained-silicon nanomembranes
journal, April 2006


The rise of graphene
journal, March 2007


Amorphous silicon technology for large area digital X-ray and optical imaging
journal, April 2002


Erratum: “Silicon electronics on silk as a path to bioresorbable, implantable devices” [Appl. Phys. Lett. 95, 133701 (2009)]
journal, December 2009


Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
journal, August 2004


Preparation of Metallic Films on Elastomeric Stamps and Their Application for Contact Processing and Contact Printing
journal, February 2003


Photobiomodulation on the Angiogenesis of Skin Wounds in Rats Using Different Light Sources
journal, April 2007


Increased fibroblast proliferation induced by light emitting diode and low power laser irradiation
journal, May 2003


InGaAs metal-semiconductor-metal photodetectors for long wavelength optical communications
journal, March 1991


Fluidic self-assembly for the integration of GaAs light-emitting diodes on Si substrates
journal, June 1994


Steps and the structure of the (0001) α-alumina surface
journal, January 1997


PhotoPoint Photodynamic Therapy Promotes Stabilization of Atherosclerotic Plaques and Inhibits Plaque Progression
journal, September 2008


Contact bonding, including direct-bonding in a historical and recent context of materials science and technology, physics and chemistry
journal, April 2002


Mechanics of rollable and foldable film-on-foil electronics
journal, February 1999


Unconventional Methods for Fabricating and Patterning Nanostructures
journal, May 1999


Magnetic trapping and self-assembly of multicomponent nanowires
journal, May 2002


Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates
journal, April 2005


Molecule-Mimetic Chemistry and Mesoscale Self-Assembly
journal, December 2000


GaN: Processing, defects, and devices
journal, July 1999


Reworkable high density interconnect structure incorporating a release layer
patent, July 1995


Compliant substrate technology: Integration of mismatched materials for opto-electronic applications
journal, January 2000


High-Performance Semiconducting Polythiophenes for Organic Thin-Film Transistors
journal, March 2004


High-Mobility Poly-Si Thin Film Transistors Fabricated on Stainless-Steel Foils by Low-Temperature Processes Using Sputter-Depositions
journal, May 2000


Template Synthesis of Electronically Conductive Polymer Nanostructures
journal, February 1995


Free standing single-crystal silicon microstructures
journal, March 1995


Computerized three-dimensional cardiac mapping with interactive visual displays
patent, November 1997


Carbon Nanotube Inter- and Intramolecular Logic Gates
journal, September 2001


Conversion of Some Siloxane Polymers to Silicon Oxide by UV/Ozone Photochemical Processes
journal, June 2000


Macroelectronics
journal, June 2006


Disposing method for semiconductor elements
patent, April 2004


Organic single-crystal field-effect transistors
journal, May 2004


Apparatuses and methods for flexible displays
patent, February 2005


Lateral growth of aligned mutilwalled carbon nanotubes under electric field
journal, May 2003


Correlation of buffer strain relaxation modes with transport properties of two‐dimensional electron gases
journal, December 1996


Protective diamond-like carbon coatings for future optical storage disks
journal, March 2005


Single-crystalline gallium nitride nanobelts
journal, July 2002


Stretchable, Porous, and Conductive Energy Textiles
journal, February 2010


Direct mask-free patterning of molecular organic semiconductors using organic vapor jet printing
journal, October 2004


Method for forming inorganic coatings
patent, June 2010


Integrated wireless neural interface based on the Utah electrode array
journal, December 2008


Luminescence Photophysics in Semiconductor Nanocrystals
journal, November 1998


Fullerenes as precursors for diamond film growth without hydrogen or oxygen additions
journal, March 1994


Semiconductor nanotube formation by a two-step template process
journal, October 1996


Highly conductive paper for energy-storage devices
journal, December 2009


Nanodevices, microdevices and sensors on in-vivo structures and method for the same
patent-application, February 2003


High-resolution transfer printing on GaAs surfaces using alkane dithiol monolayers
journal, September 2002

  • Loo, Yueh-Lin; Hsu, Julia W. P.; Willett, Robert L.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 6, p. 2853-2856
  • https://doi.org/10.1116/1.1523405

Systems and methods for transporting particles
patent-application, May 2006


Temperature coefficient of the surface resistivity of two-dimensional island gold films
journal, September 2000


Mechanical properties of silicones for MEMS
journal, April 2008


High Resolution Electrohydrodynamic Jet Printing for Manufacturing Systems
patent-application, August 2011


A Rubberlike Stretchable Active Matrix Using Elastic Conductors
journal, September 2008


Stretchable Electronics: Materials Strategies and Devices
journal, December 2008


Methods and devices for fabricating three-dimensional nanoscale structures
patent, April 2010


Curvilinear Electronics Formed Using Silicon Membrane Circuits and Elastomeric Transfer Elements
journal, October 2009


Method for Forming Inorganic Coatings
patent-application, August 2010


Silk biomaterials and methods of use thereof
patent-application, November 2005


Nanotube Molecular Wires as Chemical Sensors
journal, January 2000


Heat-transfer-stamp process for thermal imprint lithography
patent, September 2005


Diamond heat spreading and cooling technique for integrated circuits
patent, November 2006


Architectonic Quantum Dot Solids
journal, January 1999


Organic smart pixels and complementary inverter circuits formed on plastic substrates by casting and rubber stamping
journal, March 2000


Modification of silk fibroin using diazonium coupling chemistry and the effects on hMSC proliferation and differentiation
journal, July 2008


The formation of controlled-porosity membranes from anodically oxidized aluminium
journal, January 1989


High electron mobility transistor based on a GaN‐AlxGa 1−xN heterojunction
journal, August 1993


Electro-optical response of a single-crystal diamond ultraviolet photoconductor in transverse configuration
journal, May 2005


A hemispherical electronic eye camera based on compressible silicon optoelectronics
journal, August 2008


Characterization of a Time Multiplexed Inductively Coupled Plasma Etcher
journal, January 1999


Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems
journal, March 2007


Pattern transfer printing by kinetic control of adhesion to an elastomeric stamp
patent, May 2011


Disposable pulse oximeter sensor
patent, November 1995


Methods and Devices for Fabricating and Assembling Printable Semiconductor Elements
patent-application, September 2011


Self-Catalysis and Phase Transformation in the Formation of CdSe Nanosaws
journal, October 2004


Thermal oxide of polycrystalline silicon on steel foil as a thin-film transistor gate dielectric
journal, June 2001


Multiwalled carbon nanotube AFM probes for surface characterization of micro/nanostructures
journal, November 2004


Conformable, flexible, large-area networks of pressure and thermal sensors with organic transistor active matrixes
journal, August 2005


From Si Source Gas Directly to Positioned, Electrically Contacted Si Nanowires: The Self-Assembling “Grow-in-Place” Approach
journal, November 2004


Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates
journal, July 2008


Selecting the signals for a brain–machine interface
journal, December 2004


Colloidal Two-Dimensional Systems: CdSe Quantum Shells and Wells
journal, October 2003


Organic electronics on paper
journal, April 2004


Magnetic self-assembly of three-dimensional surfaces from planar sheets
journal, March 2005


Finite deformation mechanics in buckled thin films on compliant supports
journal, September 2007


Stability of low-temperature amorphous silicon thin film transistors formed on glass and transparent plastic substrates
journal, April 2000

  • Yang, C.-S.; Smith, L. L.; Arthur, C. B.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2, p. 683-689
  • https://doi.org/10.1116/1.591259

The Chemistry and Physics of Semiconductor Nanowires
journal, February 2005


A MEMS fabricated flexible electrode array for recording surface field potentials
journal, May 2006


Stretchable semiconductor elements and stretchable electrical circuits
patent-application, February 2006


Aligned Arrays of Single-Walled Carbon Nanotubes Generated from Random Networks by Orientationally Selective Laser Ablation
journal, December 2004


Spin on dopants for high-performance single-crystal silicon transistors on flexible plastic substrates
journal, March 2005


Method for fabricating self-assembling microstructures
patent, August 1996


Microporous materials: Electrochemically grown photonic crystals
journal, December 1999


Gallium Oxide Nanoribbons and Nanosheets
journal, February 2002


Design of High-Performance Regioregular Polythiophenes for Organic Thin-Film Transistors
journal, August 2005


Surface mount and flip chip technology for total integrated circuit isolation
patent, May 1998


Chip level hermetic and biocompatible electronics package using SOI wafers
patent-application, August 2004


Chemical Etching Characteristics of (001)GaAs
journal, January 1983


Ordering of microwrinkle patterns by compressive strain
journal, April 2004


Challenging Cognitive and Moral Imperialism
journal, December 2004


Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics
journal, July 2002


Displays combining active and non-active inks
patent, October 2002


High-frequency ultrasound array element using thermoelastic expansion in an elastomeric film
journal, July 2001


Single crystal silicon arrayed devices with optical shield between transistor and substrate
patent, November 2001


Detection, Stimulation, and Inhibition of Neuronal Signals with High-Density Nanowire Transistor Arrays
journal, August 2006


Implantable microelectronic device and method of manufacture
patent, May 2010


Chemistry and Physics in One Dimension: Synthesis and Properties of Nanowires and Nanotubes
journal, February 1999


Characterization of Pd–GaAs Schottky diodes prepared by the electroless plating technique
journal, May 2003


Low-Temperature Materials and Thin Film Transistors for Flexible Electronics
journal, August 2005


Optical systems fabricated by printing-based assembly
patent, July 2011


Creating micro- and nanostructures on tubular and spherical surfaces
journal, December 2007

  • Lima, O.; Tan, L.; Goel, A.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6, p. 2412-2418
  • https://doi.org/10.1116/1.2804428

Mixed Mode Cracking in Layered Materials
book, January 1991


Biocompatible Silk Printed Optical Waveguides
journal, June 2009


Growth and properties of nanocrystalline diamond films
journal, October 2006


High-performance organic thin-film transistors with metal oxide/metal bilayer electrode
journal, November 2005


Inference of hand movements from local field potentials in monkey motor cortex
journal, November 2003


High-performance electronics using dense, perfectly aligned arrays of single-walled carbon nanotubes
journal, March 2007


Nano- and Micropatterning of Optically Transparent, Mechanically Robust, Biocompatible Silk Fibroin Films
journal, August 2008


Wafer-level in-registry microstamping
journal, March 1999


Looking at Rubber Adhesion
journal, March 1979


Surface plasmon polariton band gap structures
patent-application, February 2002


Stretchable semiconductor elements and stretchable electrical circuits
patent, July 2009


Single Etch Patterning of Stacked Silver and Molybdenum Alloy Layers on Glass Using Microcontact Wave Printing
journal, August 2005

  • Burdinski, Dirk; Brans, Harold J. A.; Decre, Michel M. J.
  • Journal of the American Chemical Society, Vol. 127, Issue 31, p. 10786-10787
  • https://doi.org/10.1021/ja0523791

Aluminum metallization—Advantages and limitations for integrated circuit applications
journal, January 1969


Catheter Technique for Recording His Bundle Activity in Man
journal, January 1969


Direct synthesis and characterization of CdS nanobelts
journal, July 2006


High-mobility thin-film transistors based on aligned carbon nanotubes
journal, July 2003


Bonded intermediate substrate and method of making same
patent-application, November 2006


Printing meets lithography: Soft approaches to high-resolution patterning
journal, September 2001


Preparation of Ceramic Inks for Solid Freeforming Using a Continuous Jet Printer
journal, November 1999


Curved CCD detector devices and arrays for multispectral astrophysical applications and terrestrial stereo panoramic cameras
conference, September 2004


Molecular control over Au/GaAs diodes
journal, March 2000


Thermal transport and grain boundary conductance in ultrananocrystalline diamond thin films
journal, June 2006


Electronic paper: Flexible active-matrix electronic ink display
journal, May 2003


Method of selective removal of SiGe alloys
patent, May 2005


Polarized Raman Spectroscopy on Isolated Single-Wall Carbon Nanotubes
journal, December 2000


High-Performance Flexible Hybrid Field-Effect Transistors Based on Cellulose Fiber Paper
journal, September 2008


Diamond-structured photonic crystals
journal, September 2004


Ambipolar Pentacene Field-Effect Transistors and Inverters
journal, February 2000


Fabrication of Three-Dimensional Macroporous Membranes with Assemblies of Microspheres as Templates
journal, June 1998


Active matrix substrate, method of manufacturing the same, and display device
patent, May 2007


Flexible membrane pressure sensor
journal, April 2005


p-Channel, n-Channel Thin Film Transistors and p−n Diodes Based on Single Wall Carbon Nanotube Networks
journal, October 2004


RFID Tag and RF Structures on a Paper Substrate Using Inkjet-Printing Technology
journal, December 2007


Stamp for a lithographic process
patent, October 1998


Cooling system for a semiconductor device and method of fabricating same
patent, April 2006


Structural and Mechanical Properties of Woven Fabrics Employing Peirce's Model
journal, October 2003


Lateral polysilicon p+–p–n+ and p+–n–n+ diodes
journal, April 2003


Microelectrodes, Microelectronics, and Implantable Neural Microsystems
journal, July 2008


Concentrated aqueous silk fibroin solution and use thereof
patent, December 2009


Printable semiconductor structures and related methods of making and assembling
patent, October 2011


Implantable electrode array
patent-application, February 2007


Structural forms of single crystal semiconductor nanoribbons for high-performance stretchable electronics
journal, January 2007


Organic Transistors: Two-Dimensional Transport and Improved Electrical Characteristics
journal, April 1995


Organic light-emitting diodes formed by soft contact lamination
journal, January 2004


Over 30% efficient InGaP/GaAs tandem solar cells
journal, January 1997


Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
journal, July 2005


Directional assembly of carbon nanotube strings
patent, May 2005


Gallium Arsenide Transistors: Realization Through a Molecularly Designed Insulator
journal, March 1994


Active matrix substrate, method of manufacturing the same, and display device
patent, April 2005


A large-area, flexible pressure sensor matrix with organic field-effect transistors for artificial skin applications
journal, June 2004


Growth, branching, and kinking of molecular-beam epitaxial <110> GaAs nanowires
journal, October 2003


From Micro- to Nanofabrication with Soft Materials
journal, November 2000


Semiconductor Wires and Ribbons for High‐ Performance Flexible Electronics
journal, July 2008


High-Current Nanotube Transistors
journal, May 2004


Strained semiconductor by full wafer bonding
patent-application, January 2005