Ablation of film stacks in solar cell fabrication processes
Abstract
A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.
- Inventors:
- Issue Date:
- Research Org.:
- SunPower Corporation, San Jose, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1083912
- Patent Number(s):
- 8409902
- Application Number:
- 13/486,095
- Assignee:
- SunPower Corporation (San Jose, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23K - SOLDERING OR UNSOLDERING
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FC36-07GO17043
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Harley, Gabriel, Kim, Taeseok, and Cousins, Peter John. Ablation of film stacks in solar cell fabrication processes. United States: N. p., 2013.
Web.
Harley, Gabriel, Kim, Taeseok, & Cousins, Peter John. Ablation of film stacks in solar cell fabrication processes. United States.
Harley, Gabriel, Kim, Taeseok, and Cousins, Peter John. Tue .
"Ablation of film stacks in solar cell fabrication processes". United States. https://www.osti.gov/servlets/purl/1083912.
@article{osti_1083912,
title = {Ablation of film stacks in solar cell fabrication processes},
author = {Harley, Gabriel and Kim, Taeseok and Cousins, Peter John},
abstractNote = {A dielectric film stack of a solar cell is ablated using a laser. The dielectric film stack includes a layer that is absorptive in a wavelength of operation of the laser source. The laser source, which fires laser pulses at a pulse repetition rate, is configured to ablate the film stack to expose an underlying layer of material. The laser source may be configured to fire a burst of two laser pulses or a single temporally asymmetric laser pulse within a single pulse repetition to achieve complete ablation in a single step.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 02 00:00:00 EDT 2013},
month = {Tue Apr 02 00:00:00 EDT 2013}
}
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Works referenced in this record:
Ablation of film stacks in solar cell fabrication processes
patent, July 2012
- Harley, Gabriel; Kim, Taeseok; Cousins, Peter John
- US Patent Document 8,211,731
Method for the Contact Separation of Electrically-Conducting Layers on the Back Contacts of Solar Cells and Corresponding Solar Cells
patent-application, February 2008
- Teppe, Andreas; Engelhart, Peter; Muller, Jorg
- US Patent Document 11/665318; 20080035198
Photovoltaic device
patent, April 1998
- Shindo, Masahiro; Kosaka, Daisuke; Hikawa, Tetsuo
- US Patent Document 5,738,731
Trench Process And Structure For Backside Contact Solar Cells With Polysilicon Doped Regions
patent-application, December 2009
- Smith, David D.
- US Patent Application 12/431684; 20090308457
Template for three-dimensional thin-film solar cell manufacturing and methods of use
patent, March 2012
- Moslehi, Mehrdad M.
- US Patent Document 8,129,822
Array of small contacts for solar cell fabrication
patent-application, December 2008
- Cousins, Peter John; Cudzinovic, Michael Joseph
- US Patent Application 11/807567; 20080299297
Solar cells and methods for manufacture thereof
patent, March 1982
- Stanbery, Billy J.
- US Patent Document 4,322,571
Laser Systems and Methods Using Triangular-Shaped Tailored Laser Pulses for Selected Target Classes
patent-application, November 2010
- Cho, Bong H.; Pugh, Brian L.; Hooper, Andrew
- US Patent Application 12/753659; 20100276405
Template for Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, July 2008
- Moslehi, Mehrdad
- US Patent Application 11/868488; 20080157283
Process of producing multicrystalline silicon substrate and solar cell
patent, February 2007
- Mizutani, Masaki; Ishihara, Shunichi; Nakagawa, Katsumi
- US Patent Document 7,175,706
Ion Implantation Fabrication Process for Thin-Film Crystalline Silicon Solar Cells
patent-application, December 2010
- Rana, Virendra V.; Kapur, Pawan; Moslehi, Mehrdad M.
- US Patent Application 12/774713; 20100304522
Template for Pyramidal Three-Dimensional Thin-Film Solar Cell Manufacturing and Methods of Use
patent-application, April 2009
- Moslehi, Mehrdad
- US Patent Application 11/868492; 20090107545
Semiconductor interconnection device with both n- and p-doped regions
patent, October 1998
- Lee, Soo-Cheol; Shin, Heon-Jong
- US Patent Document 5,821,590
Anti-Reflective Coating With High Optical Absorption Layer For Backside Contact Solar Cells
patent-application, June 2009
- Luan, Hsin-Chiao; De Ceuster, Denis
- US Patent Application 12/325878; 20090151784
Methods for forming mutiple-layer electrode structures for silicon photovoltaic cells
patent-application, September 2009
- Xu, Baomin; Littau, Karl A.; Fork, David K.
- US Patent Application 12/054034; 20090239331
Electroluminescent laminate with thick film dielectric
patent, July 1995
- Wu, Xingwei; Stiles, James Alexander Robert; Foo, Ken
- US Patent Document 5,432,015
Process and fabrication methods for emitter wrap through back contact solar cells
patent-application, March 2006
- Hacke, Peter; Gee, James M.
- US Patent Application 11/220927; 20060060238
Laser Processing for High-Efficiency Thin Crystalline Silicon Solar Cell Fabrication
patent-application, February 2012
- Moslehi, Mehrdad M.; Rana, Virendra V.; Liang, Jian-Jun
- US Patent Application 13/118295; 20120028399
Application Specific Solar Cell and Method for Manufacture Using Thin Film Photovoltaic Materials
patent-application, March 2010
- Farris, III, Chester A.; Brown, Albert S.
- US Patent Application 12/509136; 20100062560
Preventing harmful polarization of solar cells
patent-application, September 2006
- Swanson, Richard M.; De Ceuster, Denis; Desai, Vikas
- US Patent Application 11/210213; 20060196535
Methods of fabricating solar-cell structures and resulting solar-cell structures
patent-application, July 2009
- Dubin, Valery M.
- US Patent Application 12/011259; 20090188553