Phonon-enhanced crystal growth and lattice healing
Abstract
A system for modifying dislocation distributions in semiconductor materials is provided. The system includes one or more vibrational sources for producing at least one excitation of vibrational mode having phonon frequencies so as to enhance dislocation motion through a crystal lattice.
- Inventors:
- Issue Date:
- Research Org.:
- Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1083902
- Patent Number(s):
- 8450704
- Application Number:
- 12/959,795
- Assignee:
- Massachusetts Institute of Technology (Cambridge, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C30 - CRYSTAL GROWTH C30B - SINGLE-CRYSTAL-GROWTH
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG36-09GO19001
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Buonassisi, Anthony, Bertoni, Mariana, and Newman, Bonna. Phonon-enhanced crystal growth and lattice healing. United States: N. p., 2013.
Web.
Buonassisi, Anthony, Bertoni, Mariana, & Newman, Bonna. Phonon-enhanced crystal growth and lattice healing. United States.
Buonassisi, Anthony, Bertoni, Mariana, and Newman, Bonna. Tue .
"Phonon-enhanced crystal growth and lattice healing". United States. https://www.osti.gov/servlets/purl/1083902.
@article{osti_1083902,
title = {Phonon-enhanced crystal growth and lattice healing},
author = {Buonassisi, Anthony and Bertoni, Mariana and Newman, Bonna},
abstractNote = {A system for modifying dislocation distributions in semiconductor materials is provided. The system includes one or more vibrational sources for producing at least one excitation of vibrational mode having phonon frequencies so as to enhance dislocation motion through a crystal lattice.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 28 00:00:00 EDT 2013},
month = {Tue May 28 00:00:00 EDT 2013}
}
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