Method to determine thermal profiles of nanoscale circuitry
Abstract
A platform that can measure the thermal profiles of devices with nanoscale resolution has been developed. The system measures the local temperature by using an array of nanoscale thermometers. This process can be observed in real time using a high resolution imagining technique such as electron microscopy. The platform can operate at extremely high temperatures.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1083268
- Patent Number(s):
- 8433536
- Application Number:
- 12/526,714
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
G - PHYSICS G01 - MEASURING G01K - MEASURING TEMPERATURE
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Zettl, Alexander K, and Begtrup, Gavi E. Method to determine thermal profiles of nanoscale circuitry. United States: N. p., 2013.
Web.
Zettl, Alexander K, & Begtrup, Gavi E. Method to determine thermal profiles of nanoscale circuitry. United States.
Zettl, Alexander K, and Begtrup, Gavi E. Tue .
"Method to determine thermal profiles of nanoscale circuitry". United States. https://www.osti.gov/servlets/purl/1083268.
@article{osti_1083268,
title = {Method to determine thermal profiles of nanoscale circuitry},
author = {Zettl, Alexander K and Begtrup, Gavi E},
abstractNote = {A platform that can measure the thermal profiles of devices with nanoscale resolution has been developed. The system measures the local temperature by using an array of nanoscale thermometers. This process can be observed in real time using a high resolution imagining technique such as electron microscopy. The platform can operate at extremely high temperatures.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Apr 30 00:00:00 EDT 2013},
month = {Tue Apr 30 00:00:00 EDT 2013}
}
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