Cantilevered probe detector with piezoelectric element
Abstract
A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.
- Inventors:
- Issue Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1083267
- Patent Number(s):
- 8434160
- Application Number:
- 13/539,604
- Assignee:
- Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada (Reno, NV)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Adams, Jesse D, Sulchek, Todd A, and Feigin, Stuart C. Cantilevered probe detector with piezoelectric element. United States: N. p., 2013.
Web.
Adams, Jesse D, Sulchek, Todd A, & Feigin, Stuart C. Cantilevered probe detector with piezoelectric element. United States.
Adams, Jesse D, Sulchek, Todd A, and Feigin, Stuart C. Tue .
"Cantilevered probe detector with piezoelectric element". United States. https://www.osti.gov/servlets/purl/1083267.
@article{osti_1083267,
title = {Cantilevered probe detector with piezoelectric element},
author = {Adams, Jesse D and Sulchek, Todd A and Feigin, Stuart C},
abstractNote = {A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {4}
}
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Works referenced in this record:
Coated Piezoelectric Analyzers
patent, January 1965
- King, Jr., William H.
- US Patent Document 3164004
Integral Heater Piezoelectric Devices
patent, November 1969
- King, Jr., William H.
- US Patent Document 3478573
Apparatus gpt Sensing Air-Borne Particulate Matter
patent, February 1973
- Chuan, Raymond L.
- US Patent Document 3,715,911
Floating structure for effecting energy transformation from sea water
patent, January 1982
- Finsterwalder, Klemens; Aigner, Erich
- US Patent Document 4,312,288
Electronic nerve agent detector
patent, October 1985
- Kolesar, Jr., Edward S.
- US Patent Document 4,549,427
Gas monitoring device and method
patent, January 1987
- Minten, Karl L.; Krug, William P.
- US Patent Document 4,637,987
Integrated circuit sensor
patent, June 1987
- Muller, Richard S.; Howe, Roger T.
- US Patent Document 4,674,319
Scanning thermal profiler
patent, May 1988
- Wickramasinghe, Hermantha K.; Williams, Clayton C.
- US Patent Document 4,747,698
Atomic force microscope with optional replaceable fluid cell
patent, June 1990
- Hansma, Paul K.; Drake, Barney
- US Patent Document 4,935,634
Films of dithiolene complexes in gas-detecting microsensors
patent, February 1991
- Grate, Jay W.
- US Patent Document 4,992,244
Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe
patent, February 1993
- Miyazaki, Toshihiko; Nose, Hiroyasu; Yagi, Takayuki
- US Patent Document 5,187,367
Jumping probe microscope
patent, November 1993
- Elings, Virgil B.; Gurley, John A.
- US Patent Document 5,266,801
Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
patent, September 1994
- Semancik, Stephen; Cavicchi, Richard E.; Gaitan, Michael
- US Patent Document 5,345,213
Application of microsubstrates for materials processing
patent, October 1994
- Cavicchi, Richard E.; Semancik, Stephen; Suehle, John S.
- US Patent Document 5,356,756
Tapping atomic force microscope
patent, May 1995
- Elings, Virgil B.; Gurley, John A.
- US Patent Document 5,412,980
Microbar sensor
patent, August 1995
- Wachter, Eric A.; Thundat, Thomas G.
- US Patent Document 5,445,008
Smart sensor system and method using a surface acoustic wave vapor sensor array and pattern recognition for selective trace organic vapor detection
patent, November 1995
- Rose-Pehrsson, Susan; Di Lella, Daniel; Grate, Jay W.
- US Patent Document 5,469,369
Tapping atomic force microscope with phase or frequency detection
patent, May 1996
- Elings, Virgil B.; Gurley, John A.
- US Patent Document 5,519,212
Microcantilever sensor
patent, February 1998
- Thundat, Thomas G.; Wachter, Eric A.
- US Patent Document 5,719,324
Cantilever for scanning probe microscope including piezoelectric element and method of using the same
patent, April 1998
- Minne, Stephen C.; Quate, Calvin F.; Manalis, Scott
- US Patent Document 5,742,377
Scanning probe microscope for use in fluids
patent, May 1998
- Lindsay, Stuart; Jing, Tianwei
- US Patent Document 5,750,989
Magnetically-oscillated probe microscope for operation in liquids
patent, May 1998
- Han, Wenhai; Lindsay, Stuart; Harbaugh, Steven K.
- US Patent Document 5,753,814
Siloxanes with strong hydrogen bond donating functionalities
patent, May 1998
- Grate, Jay W.
- US Patent Document 5,756,631
Chemical and biological sensor using an ultra-sensitive force transducer
patent, September 1998
- Lee, Gil U.; Kidwell, David A.; Colton, Richard J.
- US Patent Document 5,807,758
Atomic force microscope for biological specimens
patent, February 1999
- Xu, Shaohua; Arnsdorf, Morton F.
- US Patent Document 5,874,668
Atomic force microscope for high speed imaging including integral actuator and sensor
patent, March 1999
- Minne, Stephen C.; Quate, Calvin F.; Manalis, Scott
- US Patent Document 5,883,705
Microcantilever detector for explosives
patent, June 1999
- Thundat, Thomas G.
- US Patent Document 5,918,263
Multiplexed active biologic array
patent, October 1999
- Kovacs, Gregory T.
- US Patent Document 5,965,452
High resolution three-dimensional doping profiler
patent, December 1999
- Thundat, Thomas G.; Warmack, Robert J.
- US Patent Document 6,005,400
Strongly hydrogen-bond acidic polymer and methods of making and using
patent, January 2000
- Grate, Jay W.; Kaganove, Steven N.
- US Patent Document 6,015,869
Micromechanical potentiometric sensors
patent, January 2000
- Thundat, Thomas G.
- US Patent Document 6,016,686
Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
patent, February 2000
- Tom, Glenn M.
- US Patent Document 6,029,500
Scanning stylus atomic force microscope with cantilever tracking and optical access
patent, March 2000
- Prater, Craig; Massie, James; Grigg, David
- US Patent Document 6,032,518
Method and apparatus for sensing the natural frequency of a cantilevered body
patent, March 2000
- Duncan, Michael G.
- US Patent Document 6,041,642
Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors
patent, April 2000
- Thundat, Thomas G.; Oden, Patrick Ian; Datskos, Panagiotis G.
- US Patent Document 6,050,722
Vibrating probe for a scanning probe microscope
patent, June 2000
- Minne, Stephen C.; Quate, Calvin F.; Manalis, Scott
- US Patent Document 6,075,585
Micromechanical calorimetric sensor
patent, August 2000
- Thundat, Thomas G.; Doktycz, Mitchel J.
- US Patent Document 6,096,559
Electromagnetic and nuclear radiation detector using micromechanical sensors
patent, September 2000
- Thundat, Thomas G.; Warmack, Robert J.; Wachter, Eric A.
- US Patent Document 6,118,124
Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
patent, December 2000
- Tom, Glenn M.
- US Patent Document 6,156,578
Capacitively readout multi-element sensor array with common-mode cancellation
patent, January 2001
- Britton, Jr., Charles L.; Warmack, Robert J.; Bryan, William L.
- US Patent Document 6,167,748
Systems and methods for characterization of materials and combinatorial libraries with mechanical oscillators
patent, February 2001
- McFarland, Eric; Matsiev, Leonid
- US Patent Document 6,182,499
Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
patent, February 2001
- Daniels, Robert Clark; Magonov, Serguei
- US Patent Document 6,185,992
Active probe for an atomic force microscope and method of use thereof
patent, February 2001
- Adderton, Dennis M.; Minne, Stephen C.
- US Patent Document 6,189,374
Uncoated microcantilevers as chemical sensors
patent, April 2001
- Thundat, Thomas G.
- US Patent Document 6,212,939
Method of identifying features in indexed data
patent, June 2001
- Jarman, Kristin; Daly, Don; Anderson, Kevin K.
- US Patent Document 6,253,162
Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
patent, July 2001
- Thundat, Thomas G.; Wachter, Eric A.; Davis, J. Kenneth
- US Patent Document 6,263,736
Viscosity measuring using microcantilevers
patent, August 2001
- Oden, Patrick Ian
- US Patent Document 6,269,685
Method and apparatus for DNA sequencing using a local sensitive force detector
patent, August 2001
- Allen, Michael J.
- US Patent Document 6,280,939
Micromechanical antibody sensor
patent, September 2001
- Thundat, Thomas G.; Jacobson, K. Bruce; Doktycz, Mitchel J.
- US Patent Document 6,289,717
Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same
patent, October 2001
- Tom, Glenn M.; King, Mackenzie
- US Patent Document 6,295,861
Micromechanical transient sensor for measuring viscosity and density of a fluid
patent, November 2001
- Thundat, Thomas G.; Oden, Patrick Ian; Warmack, Robert J.
- US Patent Document 6,311,549
Magnetically tunable resonance frequency beam utilizing a stress-sensitive film
patent, November 2001
- Davis, J. Kenneth; Thundat, Thomas G.; Wachter, Eric A.
- US Patent Document 6,311,557
Method using photo-induced and thermal bending of MEMS sensors
patent, November 2001
- Datskos, Panagiotis G.
- US Patent Document 6,312,959
Method and apparatus for characterizing materials by using a mechanical resonator
patent, January 2002
- Matsiev, Leonid; Bennett, James; McFarland, Eric
- US Patent Document 6,336,353
Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
patent, January 2002
- Thundat, Thomas G.; Wachter, Eric A.
- US Patent Document 6,336,366
Mass sensor and mass detection method
patent, May 2002
- Takeuchi, Yukihisa; Ohnishi, Takao; Kimura, Koji
- US Patent Document 6,386,053
Method and apparatus for characterizing materials by using a mechanical resonator
patent, May 2002
- Matsiev, Leonid; Bennett, James; McFarland, Eric
- US Patent Document 6,393,895
Systems and methods for characterization of materials and combinatorial libraries with mechanical oscillators
patent, June 2002
- McFarland, Eric; Matsiev, Leonid
- US Patent Document 6,401,519
Methods for characterizing, classifying, and identifying unknowns in samples
patent, June 2002
- Grate, Jay W.; Wise, Barry M.
- US Patent Document 6,408,250
Electronic frequency measuring device and its use
patent, June 2002
- Battiston, Felice Mauro; Mueller, Dominik
- US Patent Document 6,411,075
Micro-machined calorimetric biosensors
patent, August 2002
- Doktycz, Mitchel J.; Britton, Jr., Charles L.; Smith, Stephen F.
- US Patent Document 6,436,346
Hyperbaric hydrothermal atomic force microscope
patent, August 2002
- Knauss, Kevin G.; Boro, Carl O.; Higgins, Steven R.
- US Patent Document 6,437,328
Use of spatiotemporal response behavior in sensor arrays to detect analytes in fluids
patent, September 2002
- Lewis, Nathan S.; Freund, Michael S.; Briglin, Shawn M.
- US Patent Document 6,455,319
High-precision integrated semiconductor peizoresistive detector devices and methods using the same
patent, October 2002
- Daraktchiev, Ivan S.; Stavrov, Vladimir Trifonov
- US Patent Document 6,457,360
Multiprobe and scanning probe microscope
patent, October 2002
- Shimizu, Nobuhiro; Takahashi, Hiroshi; Shirakawabe, Yoshiharu
- US Patent Document 6,469,293
Sensor array for rapid materials characterization
patent, November 2002
- Mansky, Paul; Bennett, James
- US Patent Document 6,477,479
Model for spectral and chromatographic data
patent, November 2002
- Jarman, Kristin; Willse, Alan R.; Wahl, Karen L.
- US Patent Document 6,487,523
Method and apparatus for characterizing materials by using a mechanical resonator
patent, December 2002
- Matsiev, Leonid; Bennett, James; McFarland, Eric
- US Patent Document 6,494,079
Microcantilever sensor
patent, February 2003
- Porter, Timothy L.; Eastman, Michael P.
- US Patent Document 6,523,392
Active probe for an atomic force microscope and method of use thereof
patent, March 2003
- Adderton, Dennis M.; Minne, Stephen C.
- US Patent Document 6,530,266
Sensor array for rapid materials characterization
patent, March 2003
- Mansky, Paul; Bennett, James
- US Patent Document 6,535,822
Sensor array-based system and method for rapid materials characterization
patent, March 2003
- Mansky, Paul; Bennett, James
- US Patent Document 6,535,824
Method and apparatus for self-calibration of capacitive sensors
patent, April 2003
- Warmack, Robert J.; Britton, Jr., Charles L.
- US Patent Document 6,545,495
Transducer for microfluid handling system
patent, June 2003
- de Charmoy Grey, Hasin Francois; Jensenius, Tove Maria; Thaysen, Jacob
- US Patent Document 6,575,020
Methods for characterizing, classifying, and identifying unknowns in samples
patent, August 2003
- Grate, Jay W.; Wise, Barry M.
- US Patent Document 6,606,567
High throughput mechanical property testing of materials libraries using a piezoelectric
patent, November 2003
- Hajduk, Damian; Carlson, Eric Daniel; Freitag, J. Christopher
- US Patent Document 6,650,102
Sensor apparatus with magnetically deflected cantilever
patent, December 2003
- Lange, Dirk; Hagleitner, Christoph; Brand, Oliver
- US Patent Document 6,668,627
Dynamic activation for an atomic force microscope and method of use thereof
patent, January 2004
- Adderton, Dennis M.; Minne, Stephen C.
- US Patent Document 6,672,144
High throughput microcantilever detector
patent, July 2004
- Thundat, Thomas G.; Ferrell, Thomas L.; Hansen, Karolyn Mueller
- US Patent Document 6,763,705
High sensitive micro-cantilever sensor and fabricating method thereof
patent, September 2004
- Kim, Tae Song; Kim, Hyung Joon; Kim, Yong-Bum
- US Patent Document 6,797,631
Active probe for an atomic force microscope and method of use thereof
patent, November 2004
- Adderton, Dennis M.; Minne, Stephen C.
- US Patent Document 6,810,720
Hydraulically amplified PZT mems actuator
patent, November 2004
- Miles, Robin R.
- US Patent Document 6,811,133
Cantilever having step-up structure and method for manufacturing the same
patent, November 2004
- Lee, Hee-joong
- US Patent Document 6,815,866
Hybrid microcantilever sensors
patent, November 2004
- Porter, Timothy L.; Eastman, Michael P.; Macomber, Clay
- US Patent Document 6,823,717
Embedded piezoelectric microcantilever sensors
patent, February 2005
- Porter, Timothy L.; Eastman, Michael P.
- US Patent Document 6,854,317
Sensor for detecting small concentrations of a target matter
patent, March 2005
- Chandra, Dipankar; Syllaios, Athanasios J.
- US Patent Document 6,866,819
Method and apparatus for characterizing materials by using a mechanical resonator
patent, June 2005
- Matsiev, Leonid; Bennett, James; McFarland, Eric
- US Patent Document 6,904,786
High throughput microbalance and methods of using same
patent, August 2005
- Carlson, Eric Daniel; Kolosov, Oleg; Matsiev, Leonid
- US Patent Document 6,928,877
Microscale sensor element and related device and method of use
patent, August 2005
- Bashir, Rashid; Peppas, Nicholas A.; Hilt, James
- US Patent Document 6,935,165
Micromechanical piezoelectric device
patent, October 2005
- Mlcak, Richard; Doppalapudi, Dharanipal; Tuller, Harry L.
- US Patent Document 6,953,977
Integrated biological and chemical sensors
patent, October 2005
- Hanson, William P.
- US Patent Document 6,955,787
Method and apparatus for characterizing materials by using a mechanical resonator
patent, October 2005
- Matsiev, Leonid; Bennett, James; McFarland, Eric
- US Patent Document 6,957,565
Liquid cell and passivated probe for atomic force microscopy and chemical sensing
patent, August 2007
- Adams, Jesse D.; Rogers, Benjamin S.; Sulchek, Todd A.
- US Patent Document 7,260,980
Dynamics bionems sensors and arrays of bionems sensor immersed in fluids
patent, May 2008
- Roukes, Michael L.; Fraser, Scott E.; Solomon, Jerry E.
- US Patent Document 7,375,321
Chemical sensor with oscillating cantilevered probe and mechanical stop
patent, April 2009
- Adams, Jesse D.; Rogers, Benjamin S.
- US Patent Document 7,521,257
Cantilever sensors and transducers
patent, July 2009
- Baller, Marko Klaus; Fritz, Juergen; Gerber, Christoph
- US Patent Document 7,560,070
Cantilevered probe detector with piezoelectric element
patent, April 2010
- Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.
- US Patent Document 7,694,346
Cantilevered probe detector with piezoelectric element
patent, July 2012
- Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.
- US Patent Document 8,220,067
CMOS monolithic mechatronic microsystem for surface imaging and force response studies
journal, April 2005
- Barrettino, D.; Hafizovic, S.; Volden, T.
- IEEE Journal of Solid-State Circuits, Vol. 40, Issue 4
Ultrahigh-density atomic force microscopy data storage with erase capability
journal, March 1999
- Binnig, G.; Despont, M.; Drechsler, U.
- Applied Physics Letters, Vol. 74, Issue 9
Surface micromachining for microelectromechanical systems
journal, January 1998
- Bustillo, J. M.; Howe, R. T.; Muller, R. S.
- Proceedings of the IEEE, Vol. 86, Issue 8
Piezoelectric cantilever array for multiprobe scanning force microscopy
conference, January 1996
- Itoh, T.; Ohashi, T.; Suga, T.
- Proceedings of Ninth International Workshop on Micro Electromechanical Systems
Parallel frequency readout of an array of mass-sensitive transducers for sensor applications
journal, June 2000
- Kim, B. H.; Maute, M.; Prins, F. E.
- Microelectronic Engineering, Vol. 53, Issue 1-4
On the modes and loss mechanisms of a high Q mechanical oscillator
journal, March 2001
- Liu, Xiao; Morse, S. F.; Vignola, J. F.
- Applied Physics Letters, Vol. 78, Issue 10
Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
journal, December 1995
- Minne, S. C.; Manalis, S. R.; Quate, C. F.
- Applied Physics Letters, Vol. 67, Issue 26
Temperature dependence of elastic, dielectric, and piezoelectric properties of “single crystalline’’ films of vinylidene fluoride trifluoroethylene copolymer
journal, March 1997
- Omote, Kenji; Ohigashi, Hiroji; Koga, Keiko
- Journal of Applied Physics, Vol. 81, Issue 6
Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions
journal, December 2002
- Savran, C. A.; Sparks, A. W.; Sihler, J.
- Journal of Microelectromechanical Systems, Vol. 11, Issue 6
Dual integrated actuators for extended range high speed atomic force microscopy
journal, September 1999
- Sulchek, T.; Minne, S. C.; Adams, J. D.
- Applied Physics Letters, Vol. 75, Issue 11
Characterization of application-specific probes for SPMs
conference, April 1997
- Tortonese, Marco; Kirk, Michael
- Photonics West '97, SPIE Proceedings
Temperature dependence of the piezoelectric response in lead zirconate titanate films
journal, February 2004
- Wolf, R. A.; Trolier-McKinstry, S.
- Journal of Applied Physics, Vol. 95, Issue 3
Quality factors in micron- and submicron-thick cantilevers
journal, March 2000
- Yasumura, K. Y.; Stowe, T. D.; Chow, E. M.
- Journal of Microelectromechanical Systems, Vol. 9, Issue 1
Micromachined inertial sensors
journal, January 1998
- Yazdi, N.; Ayazi, F.; Najafi, K.
- Proceedings of the IEEE, Vol. 86, Issue 8
Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
journal, January 2001
- Abedinov, N.; Grabiec, P.; Gotszalk, T.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 6
Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array
journal, October 2003
- Adams, J. D.; Parrott, G.; Bauer, C.
- Applied Physics Letters, Vol. 83, Issue 16
Application of fuzzy clustering and piezoelectric chemical sensor array for investigation on organic compounds
journal, October 1999
- Barkó, György; Abonyi, János; Hlavay, József
- Analytica Chimica Acta, Vol. 398, Issue 2-3
A femtojoule calorimeter using micromechanical sensors
journal, December 1994
- Barnes, J. R.; Stephenson, R. J.; Woodburn, C. N.
- Review of Scientific Instruments, Vol. 65, Issue 12
Biosensor based on force microscope technology
journal, March 1996
- Baselt, David R.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 2
A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout
journal, June 2001
- Battiston, F. M.; Ramseyer, J. -P; Lang, H. P.
- Sensors and Actuators B: Chemical, Vol. 77, Issue 1-2
Micromechanical thermogravimetry
journal, September 1998
- Berger, R.; Lang, H. P.; Gerber, Ch.
- Chemical Physics Letters, Vol. 294, Issue 4-5, p. 363-369
Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip”
journal, February 1997
- Berger, R.; Gerber, Ch.; Lang, H. P.
- Microelectronic Engineering, Vol. 35, Issue 1-4
Nanostructured silicon for studying fundamental aspects of nanomechanics
journal, August 2002
- Blick, R. H.; Erbe, A.; Pescini, L.
- Journal of Physics: Condensed Matter, Vol. 14, Issue 34
Multiple-input microcantilever sensors
journal, February 2000
- Britton, C. L.; Jones, R. L.; Oden, P. I.
- Ultramicroscopy, Vol. 82, Issue 1-4
Piezoelectric chemical sensors (IUPAC Technical Report)
journal, January 2004
- Buck, R. P.; Lindner, E.; Kutner, W.
- Pure and Applied Chemistry, Vol. 76, Issue 6
Suspended microchannel resonators for biomolecular detection
journal, September 2003
- Burg, T. P.; Manalis, S. R.
- Applied Physics Letters, Vol. 83, Issue 13
Detection and quantification of proteins using self-excited PZT-glass millimeter-sized cantilever
journal, October 2005
- Campbell, Gossett A.; Mutharasan, Raj
- Biosensors and Bioelectronics, Vol. 21, Issue 4
Resonance response of scanning force microscopy cantilevers
journal, August 1994
- Chen, G. Y.; Warmack, R. J.; Thundat, T.
- Review of Scientific Instruments, Vol. 65, Issue 8
Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995
- Chen, G. Y.; Thundat, T.; Wachter, E. A.
- Journal of Applied Physics, Vol. 77, Issue 8
Determination of adsorption-induced variation in the spring constant of a microcantilever
journal, March 2002
- Cherian, Suman; Thundat, Thomas
- Applied Physics Letters, Vol. 80, Issue 12
Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method
journal, July 1997
- Chu, Jiaru
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4
Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever
journal, September 1997
- Chu, Jiaru
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 5
Single-crystal aluminum nitride nanomechanical resonators
journal, September 2001
- Cleland, A. N.; Pophristic, M.; Ferguson, I.
- Applied Physics Letters, Vol. 79, Issue 13
Nanocantilever Signal Transduction by Electron Transfer
journal, July 2002
- Datskosa, P. G.; Thundata, T.
- Journal of Nanoscience and Nanotechnology, Vol. 2, Issue 3
Fabrication and characterization of nanoresonating devices for mass detection
journal, January 2000
- Davis, Z. J.; Abadal, G.; Kuhn, O.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2
Modeling and optimal design of piezoelectric cantilever microactuators
journal, January 1997
- DeVoe, D. L.; Pisano, A. P.
- Journal of Microelectromechanical Systems, Vol. 6, Issue 3
Enhanced functionality of cantilever based mass sensors using higher modes
journal, June 2005
- Dohn, Søren; Sandberg, Rasmus; Svendsen, Winnie
- Applied Physics Letters, Vol. 86, Issue 23
Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
journal, March 2004
- Ekinci, K. L.; Yang, Y. T.; Roukes, M. L.
- Journal of Applied Physics, Vol. 95, Issue 5
Nanoelectromechanical systems
journal, June 2005
- Ekinci, K. L.; Roukes, M. L.
- Review of Scientific Instruments, Vol. 76, Issue 6, Article No. 061101
Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor
journal, September 2004
- Fadel, Ludivine; Dufour, Isabelle; Lochon, Frédéric
- Sensors and Actuators B: Chemical, Vol. 102, Issue 1
Processing of novel SiC and group III-nitride based micro- and nanomechanical devices
journal, March 2005
- Foerster, Ch.; Cimalla, V.; Brueckner, K.
- physica status solidi (a), Vol. 202, Issue 4
Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution
journal, October 2005
- Fon, W. Chung; Schwab, Keith. C.; Worlock, John M.
- Nano Letters, Vol. 5, Issue 10
Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
journal, January 1996
- Fujii, Toru; Watanabe, Shunji
- Applied Physics Letters, Vol. 68, Issue 4
Hybrid Organic/Inorganic Copolymers with Strongly Hydrogen-Bond Acidic Properties for Acoustic Wave and Optical Sensors
journal, May 1997
- Grate, Jay W.; Kaganove, Steven N.; Patrash, Samuel J.
- Chemistry of Materials, Vol. 9, Issue 5
Hydrogen Bond Acidic Polymers for Surface Acoustic Wave Vapor Sensors and Arrays
journal, March 1999
- Grate, Jay W.; Patrash, Samuel J.; Kaganove, Steven N.
- Analytical Chemistry, Vol. 71, Issue 5
Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection
journal, September 2003
- Guan, Shenheng
- Analytical Chemistry, Vol. 75, Issue 17
Single virus particle mass detection using microresonators with nanoscale thickness
journal, March 2004
- Gupta, A.; Akin, D.; Bashir, R.
- Applied Physics Letters, Vol. 84, Issue 11
Design and Characterization of a Micromachined Piezoelectric Microphone
conference, November 2012
- Horowitz, Stephen; Nishida, Toshikazu; Cattafesta, Louis
- 11th AIAA/CEAS Aeroacoustics Conference
VHF, UHF and microwave frequency nanomechanical resonators
journal, January 2005
- Huang, X. M. H.; Feng, X. L.; Zorman, C. A.
- New Journal of Physics, Vol. 7
Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy
journal, April 1997
- Indermühle, P. -F.; Schürmann, G.; Racine, G. -A.
- Applied Physics Letters, Vol. 70, Issue 17
Development of a force sensor for atomic force microscopy using piezoelectric thin films
journal, October 1993
- Itoh, T.; Suga, T.
- Nanotechnology, Vol. 4, Issue 4
Force sensing microcantilever using sputtered zinc oxide thin film
journal, January 1994
- Itoh, T.; Suga, T.
- Applied Physics Letters, Vol. 64, Issue 1
Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O 3 microcantilever for dynamic scanning force microscopy
journal, September 1996
- Itoh, T.; Lee, C.; Suga, T.
- Applied Physics Letters, Vol. 69, Issue 14
Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
journal, June 1996
- Itoh, Toshihiro; Suga, Tadatomo
- Sensors and Actuators A: Physical, Vol. 54, Issue 1-3
Multicomponent analysis and prediction with a cantilever array based gas sensor
journal, August 2001
- Kim, B. H.; Prins, F. E.; Kern, D. P.
- Sensors and Actuators B: Chemical, Vol. 78, Issue 1-3
Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
journal, November 1998
- Kunt, Tekin A.; McAvoy, Thomas J.; Cavicchi, Richard E.
- Sensors and Actuators B: Chemical, Vol. 53, Issue 1-2
Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
journal, July 2002
- Lange, Dirk; Hagleitner, Christoph; Hierlemann, Andreas
- Analytical Chemistry, Vol. 74, Issue 13
Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology
journal, September 2002
- Lang, H. P.; Hegner, M.; Meyer, E.
- Nanotechnology, Vol. 13, Issue 5
CMOS resonant beam gas sensing system with on-chip self excitation
conference, January 2001
- Lange, D.; Hagleitner, C.; Brand, O.
- Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Cantilever transducers as a platform for chemical and biological sensors
journal, July 2004
- Lavrik, Nickolay V.; Sepaniak, Michael J.; Datskos, Panos G.
- Review of Scientific Instruments, Vol. 75, Issue 7
Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application
journal, December 2003
- Lee, Caroline Sunyong; Nam, Hyo-Jin; Kim, Young-Sik
- Applied Physics Letters, Vol. 83, Issue 23
Self-excited piezoelectric cantilever oscillators
journal, March 1996
- Lee, Seung S.; White, Richard M.
- Sensors and Actuators A: Physical, Vol. 52, Issue 1-3
Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
journal, May 1997
- Lee, Chengkuo; Itoh, Toshihiro; Maeda, Ryutaro
- Review of Scientific Instruments, Vol. 68, Issue 5
Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid
journal, July 1997
- Lee, Chengkuo
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4
Piezoelectric cantilever acoustic transducer
journal, September 1998
- Lee, Seung S.; White, Richard M.
- Journal of Micromechanics and Microengineering, Vol. 8, Issue 3
Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
journal, January 1999
- Lee, Chengkuo; Itoh, Toshihiro; Suga, Tadatomo
- Sensors and Actuators A: Physical, Vol. 72, Issue 2
Electromechanical Behavior of PZT-Brass Unimorphs
journal, July 1999
- Li, Xiaoping; Shih, Wan Y.; Aksay, Ilhan A.
- Journal of the American Ceramic Society, Vol. 82, Issue 7
Attogram detection using nanoelectromechanical oscillators
journal, April 2004
- Ilic, B.; Craighead, H. G.; Krylov, S.
- Journal of Applied Physics, Vol. 95, Issue 7
Self-oscillating tapping mode atomic force microscopy
journal, September 2003
- Manning, L.; Rogers, B.; Jones, M.
- Review of Scientific Instruments, Vol. 74, Issue 9
Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors
journal, May 2002
- Marie, Rodolphe; Jensenius, Henriette; Thaysen, Jacob
- Ultramicroscopy, Vol. 91, Issue 1-4
Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW Devices
journal, March 1987
- Martin, S. J.; Ricco, A. J.; Ginley, D. S.
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 34, Issue 2
Manipulation and controlled amplification of Brownian motion of microcantilever sensors
journal, March 2001
- Mehta, Adosh; Cherian, Suman; Hedden, David
- Applied Physics Letters, Vol. 78, Issue 11
Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
journal, March 1996
- Minne, S. C.; Manalis, S. R.; Atalar, A.
- Applied Physics Letters, Vol. 68, Issue 10
Lead zirconate titanate cantilever for noncontact atomic force microscopy
journal, February 1999
- Miyahara, Y.; Fujii, T.; Watanabe, S.
- Applied Surface Science, Vol. 140, Issue 3-4
Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation
journal, March 2002
- Miyahara, Y.; Deschler, M.; Fujii, T.
- Applied Surface Science, Vol. 188, Issue 3-4
Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers
journal, October 2003
- Muralidharan, G.; Wig, A.; Pinnaduwage, L. A.
- Ultramicroscopy, Vol. 97, Issue 1-4
Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure
journal, December 1998
- Oden, P. I.
- Sensors and Actuators B: Chemical, Vol. 53, Issue 3
A Behavioural Model of Resonant Cantilevers for Chemical Sensing
journal, August 2005
- Paci, D.; Kirstein, K. -U.; Vancura, C.
- Analog Integrated Circuits and Signal Processing, Vol. 44, Issue 2
Dynamics of self-driven microcantilevers
journal, April 2002
- Passian, A.; Muralidharan, G.; Kouchekian, S.
- Journal of Applied Physics, Vol. 91, Issue 7
Surface micromachined piezoelectric resonant beam filters
journal, July 2001
- Piekarski, Brett; DeVoe, Don; Dubey, Madan
- Sensors and Actuators A: Physical, Vol. 91, Issue 3
A microsensor for trinitrotoluene vapour
journal, October 2003
- Pinnaduwage, L. A.; Gehl, A.; Hedden, D. L.
- Nature, Vol. 425, Issue 6957
Sensitive detection of plastic explosives with self-assembled monolayer-coated microcantilevers
journal, August 2003
- Pinnaduwage, L. A.; Boiadjiev, V.; Hawk, J. E.
- Applied Physics Letters, Vol. 83, Issue 7
Adsorption of Trinitrotoluene on Uncoated Silicon Microcantilever Surfaces
journal, March 2004
- Pinnaduwage, L. A.; Yi, D.; Tian, F.
- Langmuir, Vol. 20, Issue 7
Detection of 2,4-dinitrotoluene using microcantilever sensors
journal, May 2004
- Pinnaduwage, L. A.; Thundat, T.; Hawk, J. E.
- Sensors and Actuators B: Chemical, Vol. 99, Issue 2-3
Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers
journal, August 2005
- Pinnaduwage, L. A.; Thundat, T.
- IEEE Sensors Journal, Vol. 5, Issue 4
Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
journal, August 1998
- Polla, Dennis L.; Francis, Lorraine F.
- Annual Review of Materials Science, Vol. 28, Issue 1
Integrated multisensor chip
journal, April 1986
- Polla, D. L.; Muller, R. S.; White, R. M.
- IEEE Electron Device Letters, Vol. 7, Issue 4
Sensor based on piezoresistive microcantilever technology
journal, January 2001
- Porter, T. L.; Eastman, M. P.; Pace, D. L.
- Sensors and Actuators A: Physical, Vol. 88, Issue 1
Dynamic range of nanotube- and nanowire-based electromechanical systems
journal, May 2005
- Postma, H. W. Ch.; Kozinsky, I.; Husain, A.
- Applied Physics Letters, Vol. 86, Issue 22
Demonstration of Thermomechanical Recording at 641 Gbit/in<tex>$^2$</tex>
journal, July 2004
- Pozidis, H.; Haberle, W.; Wiesmann, D.
- IEEE Transactions on Magnetics, Vol. 40, Issue 4
Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever
journal, November 2003
- Rogers, B.; Manning, L.; Jones, M.
- Review of Scientific Instruments, Vol. 74, Issue 11
Improving tapping mode atomic force microscopy with piezoelectric cantilevers
journal, August 2004
- Rogers, B.; Manning, L.; Sulchek, T.
- Ultramicroscopy, Vol. 100, Issue 3-4
Temperature and pressure dependence of resonance in multi-layer microcantilevers
journal, June 2005
- Sandberg, R.; Svendsen, W.; Mølhave, K.
- Journal of Micromechanics and Microengineering, Vol. 15, Issue 8
Microhotplate platforms for chemical sensor research
journal, June 2001
- Semancik, S.; Cavicchi, R. E.; Wheeler, M. C.
- Sensors and Actuators B: Chemical, Vol. 77, Issue 1-2
Enhanced mass sensing using torsional and lateral resonances in microcantilevers
journal, June 2004
- Sharos, L. B.; Raman, A.; Crittenden, S.
- Applied Physics Letters, Vol. 84, Issue 23
Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe
journal, December 2002
- Shibata, Takayuki; Unno, Kazuya; Makino, Eiji
- Sensors and Actuators A: Physical, Vol. 102, Issue 1-2
Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers
journal, January 2001
- Shih, Wan Y.; Li, Xiaoping; Gu, Huiming
- Journal of Applied Physics, Vol. 89, Issue 2
Microcantilever resonance-based DNA detection with nanoparticle probes
journal, May 2003
- Su, Ming; Li, Shuyou; Dravid, Vinayak P.
- Applied Physics Letters, Vol. 82, Issue 20
Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever
journal, April 2000
- Suehira, N.; Tomiyoshi, Y.; Sugiyama, K.
- Applied Surface Science, Vol. 157, Issue 4
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
journal, March 1993
- Suehle, J. S.; Cavicchi, R. E.; Gaitan, M.
- IEEE Electron Device Letters, Vol. 14, Issue 3
Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor
journal, January 2001
- Tamayo, J.; Humphris, A. D. L.; Malloy, A. M.
- Ultramicroscopy, Vol. 86, Issue 1-2
Multichannel Quartz Crystal Microbalance
journal, September 1999
- Tatsuma, Tetsu; Watanabe, Yoshihito; Oyama, Noboru
- Analytical Chemistry, Vol. 71, Issue 17
Thermal and ambient‐induced deflections of scanning force microscope cantilevers
journal, May 1994
- Thundat, T.; Warmack, R. J.; Chen, G. Y.
- Applied Physics Letters, Vol. 64, Issue 21
Detection of mercury vapor using resonating microcantilevers
journal, March 1995
- Thundat, T.; Wachter, E. A.; Sharp, S. L.
- Applied Physics Letters, Vol. 66, Issue 13
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
journal, August 2005
- Voiculescu, I.; Zaghloul, M. E.; McGill, R. A.
- IEEE Sensors Journal, Vol. 5, Issue 4
Theoretical analysis of the sensor effect of cantilever piezoelectric benders
journal, February 1999
- Wang, Qing-Ming; Du, Xiao-hong; Xu, Baomin
- Journal of Applied Physics, Vol. 85, Issue 3
Frequency shifts of cantilevers vibrating in various media
journal, November 1996
- Weigert, Stefan; Dreier, Markus; Hegner, Martin
- Applied Physics Letters, Vol. 69, Issue 19
Mechanical behavior of ultrathin microcantilever
journal, May 2000
- Yang, Jinling; Ono, Takahito; Esashi, Masayoshi
- Sensors and Actuators A: Physical, Vol. 82, Issue 1-3
In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers
journal, January 2003
- Yi, Jeong W.; Shih, Wan Y.; Mutharasan, R.
- Journal of Applied Physics, Vol. 93, Issue 1
Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers
journal, February 2002
- Yi, Jeong Woo; Shih, Wan Y.; Shih, Wei-Heng
- Journal of Applied Physics, Vol. 91, Issue 3
Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection
journal, August 2003
- Zhang, J.; O’Shea, S.
- Sensors and Actuators B: Chemical, Vol. 94, Issue 1
Frequency-tuning for control of parametrically resonant mass sensors
journal, July 2005
- Zhang, Wenhua; Turner, Kimberly L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 23, Issue 4
Self-excited piezoelectric microcantilever for gas detection
journal, August 2003
- Zhou, Jia; Li, Po; Zhang, Song
- Microelectronic Engineering, Vol. 69, Issue 1
CMOS single-chip multisensor gas detection system
conference, January 2002
- Hagleitner, C.; Lange, D.; Kerness, N.
- Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)
Taking atomic force microscope advances to the university classroom
conference, January 2001
- Adams, J. D.; Priyadarshan, G.; Mabogunje, A.
- 2001 IEEE Aerospace Conference Proceedings (Cat. No.01TH8542)
Piezoresistive Signal Down Mixing for Parallel Detection of Si-Based Microcantilevers Resonant Frequencies
conference, January 2005
- Mathieu, F.; Saya, D.; Nicu, L.
- IEEE Sensors, 2005.
Self-sensing tapping mode atomic force microscopy
journal, May 2005
- Adams, J. D.; Manning, L.; Rogers, B.
- Sensors and Actuators A: Physical, Vol. 121, Issue 1