skip to main content
DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Cantilevered probe detector with piezoelectric element

Abstract

A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

Inventors:
; ;
Issue Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1083266
Patent Number(s):
8,434,161
Application Number:
13/539,608
Assignee:
Board of Regents of the Nevada System of Higher Education, on behalf of the University of Nevada (Reno, NV)
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Adams, Jesse D, Sulchek, Todd A, and Feigin, Stuart C. Cantilevered probe detector with piezoelectric element. United States: N. p., 2013. Web.
Adams, Jesse D, Sulchek, Todd A, & Feigin, Stuart C. Cantilevered probe detector with piezoelectric element. United States.
Adams, Jesse D, Sulchek, Todd A, and Feigin, Stuart C. Tue . "Cantilevered probe detector with piezoelectric element". United States. https://www.osti.gov/servlets/purl/1083266.
@article{osti_1083266,
title = {Cantilevered probe detector with piezoelectric element},
author = {Adams, Jesse D and Sulchek, Todd A and Feigin, Stuart C},
abstractNote = {A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2013},
month = {4}
}

Patent:

Save / Share:

Works referenced in this record:


journal, April 2005

  • Barrettino, D.; Hafizovic, S.; Volden, T.
  • IEEE Journal of Solid-State Circuits, Vol. 40, Issue 4
  • DOI: 10.1109/JSSC.2004.842868

Ultrahigh-density atomic force microscopy data storage with erase capability
journal, March 1999

  • Binnig, G.; Despont, M.; Drechsler, U.
  • Applied Physics Letters, Vol. 74, Issue 9
  • DOI: 10.1063/1.123540

Surface micromachining for microelectromechanical systems
journal, January 1998

  • Bustillo, J. M.; Howe, R. T.; Muller, R. S.
  • Proceedings of the IEEE, Vol. 86, Issue 8
  • DOI: 10.1109/5.704260

Parallel frequency readout of an array of mass-sensitive transducers for sensor applications
journal, June 2000


On the modes and loss mechanisms of a high Q mechanical oscillator
journal, March 2001

  • Liu, Xiao; Morse, S. F.; Vignola, J. F.
  • Applied Physics Letters, Vol. 78, Issue 10
  • DOI: 10.1063/1.1350599

Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
journal, December 1995

  • Minne, S. C.; Manalis, S. R.; Quate, C. F.
  • Applied Physics Letters, Vol. 67, Issue 26
  • DOI: 10.1063/1.115317

Fabrication and characterization of a micromechanical sensor for differential detection of nanoscale motions
journal, December 2002

  • Savran, C. A.; Sparks, A. W.; Sihler, J.
  • Journal of Microelectromechanical Systems, Vol. 11, Issue 6
  • DOI: 10.1109/JMEMS.2002.805057

Dual integrated actuators for extended range high speed atomic force microscopy
journal, September 1999

  • Sulchek, T.; Minne, S. C.; Adams, J. D.
  • Applied Physics Letters, Vol. 75, Issue 11
  • DOI: 10.1063/1.124779

Temperature dependence of the piezoelectric response in lead zirconate titanate films
journal, February 2004

  • Wolf, R. A.; Trolier-McKinstry, S.
  • Journal of Applied Physics, Vol. 95, Issue 3
  • DOI: 10.1063/1.1636530

Quality factors in micron- and submicron-thick cantilevers
journal, March 2000

  • Yasumura, K. Y.; Stowe, T. D.; Chow, E. M.
  • Journal of Microelectromechanical Systems, Vol. 9, Issue 1
  • DOI: 10.1109/84.825786

Micromachined inertial sensors
journal, January 1998

  • Yazdi, N.; Ayazi, F.; Najafi, K.
  • Proceedings of the IEEE, Vol. 86, Issue 8
  • DOI: 10.1109/5.704269

Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection
journal, January 2001

  • Abedinov, N.; Grabiec, P.; Gotszalk, T.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 19, Issue 6
  • DOI: 10.1116/1.1412654

Nanowatt chemical vapor detection with a self-sensing, piezoelectric microcantilever array
journal, October 2003

  • Adams, J. D.; Parrott, G.; Bauer, C.
  • Applied Physics Letters, Vol. 83, Issue 16
  • DOI: 10.1063/1.1621733

Application of fuzzy clustering and piezoelectric chemical sensor array for investigation on organic compounds
journal, October 1999


A femtojoule calorimeter using micromechanical sensors
journal, December 1994

  • Barnes, J. R.; Stephenson, R. J.; Woodburn, C. N.
  • Review of Scientific Instruments, Vol. 65, Issue 12
  • DOI: 10.1063/1.1144509

Biosensor based on force microscope technology
journal, March 1996

  • Baselt, David R.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 14, Issue 2
  • DOI: 10.1116/1.588714

A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout
journal, June 2001


Micromechanical thermogravimetry
journal, September 1998


Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip”
journal, February 1997


Nanostructured silicon for studying fundamental aspects of nanomechanics
journal, August 2002


Multiple-input microcantilever sensors
journal, February 2000


Piezoelectric chemical sensors (IUPAC Technical Report)
journal, January 2004


Suspended microchannel resonators for biomolecular detection
journal, September 2003

  • Burg, T. P.; Manalis, S. R.
  • Applied Physics Letters, Vol. 83, Issue 13
  • DOI: 10.1063/1.1611625

Detection and quantification of proteins using self-excited PZT-glass millimeter-sized cantilever
journal, October 2005


Resonance response of scanning force microscopy cantilevers
journal, August 1994

  • Chen, G. Y.; Warmack, R. J.; Thundat, T.
  • Review of Scientific Instruments, Vol. 65, Issue 8
  • DOI: 10.1063/1.1144647

Adsorption‐induced surface stress and its effects on resonance frequency of microcantilevers
journal, April 1995

  • Chen, G. Y.; Thundat, T.; Wachter, E. A.
  • Journal of Applied Physics, Vol. 77, Issue 8
  • DOI: 10.1063/1.359562

Determination of adsorption-induced variation in the spring constant of a microcantilever
journal, March 2002

  • Cherian, Suman; Thundat, Thomas
  • Applied Physics Letters, Vol. 80, Issue 12
  • DOI: 10.1063/1.1463720

Novel high vacuum scanning force microscope using a piezoelectric cantilever and the phase detection method
journal, July 1997

  • Chu, Jiaru
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4
  • DOI: 10.1116/1.589398

Frequency modulation detection high vacuum scanning force microscope with a self-oscillating piezoelectric cantilever
journal, September 1997

  • Chu, Jiaru
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 5
  • DOI: 10.1116/1.589565

Single-crystal aluminum nitride nanomechanical resonators
journal, September 2001

  • Cleland, A. N.; Pophristic, M.; Ferguson, I.
  • Applied Physics Letters, Vol. 79, Issue 13
  • DOI: 10.1063/1.1396633

Nanocantilever Signal Transduction by Electron Transfer
journal, July 2002

  • Datskosa, P. G.; Thundata, T.
  • Journal of Nanoscience and Nanotechnology, Vol. 2, Issue 3
  • DOI: 10.1166/jnn.2002.091

Fabrication and characterization of nanoresonating devices for mass detection
journal, January 2000

  • Davis, Z. J.; Abadal, G.; Kuhn, O.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 18, Issue 2
  • DOI: 10.1116/1.591247

Modeling and optimal design of piezoelectric cantilever microactuators
journal, January 1997

  • DeVoe, D. L.; Pisano, A. P.
  • Journal of Microelectromechanical Systems, Vol. 6, Issue 3
  • DOI: 10.1109/84.623116

Enhanced functionality of cantilever based mass sensors using higher modes
journal, June 2005

  • Dohn, Søren; Sandberg, Rasmus; Svendsen, Winnie
  • Applied Physics Letters, Vol. 86, Issue 23
  • DOI: 10.1063/1.1948521

Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems
journal, March 2004

  • Ekinci, K. L.; Yang, Y. T.; Roukes, M. L.
  • Journal of Applied Physics, Vol. 95, Issue 5
  • DOI: 10.1063/1.1642738

Nanoelectromechanical systems
journal, June 2005

  • Ekinci, K. L.; Roukes, M. L.
  • Review of Scientific Instruments, Vol. 76, Issue 6, Article No. 061101
  • DOI: 10.1063/1.1927327

Signal-to-noise ratio of resonant microcantilever type chemical sensors as a function of resonant frequency and quality factor
journal, September 2004

  • Fadel, Ludivine; Dufour, Isabelle; Lochon, Frédéric
  • Sensors and Actuators B: Chemical, Vol. 102, Issue 1
  • DOI: 10.1016/j.snb.2003.10.016

Processing of novel SiC and group III-nitride based micro- and nanomechanical devices
journal, March 2005

  • Foerster, Ch.; Cimalla, V.; Brueckner, K.
  • physica status solidi (a), Vol. 202, Issue 4
  • DOI: 10.1002/pssa.200460471

Nanoscale, Phonon-Coupled Calorimetry with Sub-Attojoule/Kelvin Resolution
journal, October 2005

  • Fon, W. Chung; Schwab, Keith. C.; Worlock, John M.
  • Nano Letters, Vol. 5, Issue 10
  • DOI: 10.1021/nl051345o

Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern
journal, January 1996

  • Fujii, Toru; Watanabe, Shunji
  • Applied Physics Letters, Vol. 68, Issue 4
  • DOI: 10.1063/1.116415

Hybrid Organic/Inorganic Copolymers with Strongly Hydrogen-Bond Acidic Properties for Acoustic Wave and Optical Sensors
journal, May 1997

  • Grate, Jay W.; Kaganove, Steven N.; Patrash, Samuel J.
  • Chemistry of Materials, Vol. 9, Issue 5
  • DOI: 10.1021/cm960590t

Hydrogen Bond Acidic Polymers for Surface Acoustic Wave Vapor Sensors and Arrays
journal, March 1999

  • Grate, Jay W.; Patrash, Samuel J.; Kaganove, Steven N.
  • Analytical Chemistry, Vol. 71, Issue 5
  • DOI: 10.1021/ac9810011

Frequency Encoding of Resonant Mass Sensors for Chemical Vapor Detection
journal, September 2003


Single virus particle mass detection using microresonators with nanoscale thickness
journal, March 2004

  • Gupta, A.; Akin, D.; Bashir, R.
  • Applied Physics Letters, Vol. 84, Issue 11
  • DOI: 10.1063/1.1667011

VHF, UHF and microwave frequency nanomechanical resonators
journal, January 2005


Self-sharpening tip integrated on micro cantilevers with self-exciting piezoelectric sensor for parallel atomic force microscopy
journal, April 1997

  • Indermühle, P. -F.; Schürmann, G.; Racine, G. -A.
  • Applied Physics Letters, Vol. 70, Issue 17
  • DOI: 10.1063/1.118817

Development of a force sensor for atomic force microscopy using piezoelectric thin films
journal, October 1993


Force sensing microcantilever using sputtered zinc oxide thin film
journal, January 1994

  • Itoh, T.; Suga, T.
  • Applied Physics Letters, Vol. 64, Issue 1
  • DOI: 10.1063/1.110913

Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy
journal, June 1996


Multicomponent analysis and prediction with a cantilever array based gas sensor
journal, August 2001


Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors
journal, November 1998

  • Kunt, Tekin A.; McAvoy, Thomas J.; Cavicchi, Richard E.
  • Sensors and Actuators B: Chemical, Vol. 53, Issue 1-2
  • DOI: 10.1016/S0925-4005(98)00244-5

Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip:  Mass-Sensitive Detection of Volatile Organic Compounds
journal, July 2002

  • Lange, Dirk; Hagleitner, Christoph; Hierlemann, Andreas
  • Analytical Chemistry, Vol. 74, Issue 13
  • DOI: 10.1021/ac011269j

Nanomechanics from atomic resolution to molecular recognition based on atomic force microscopy technology
journal, September 2002


Cantilever transducers as a platform for chemical and biological sensors
journal, July 2004

  • Lavrik, Nickolay V.; Sepaniak, Michael J.; Datskos, Panos G.
  • Review of Scientific Instruments, Vol. 75, Issue 7
  • DOI: 10.1063/1.1763252

Microcantilevers integrated with heaters and piezoelectric detectors for nano data-storage application
journal, December 2003

  • Lee, Caroline Sunyong; Nam, Hyo-Jin; Kim, Young-Sik
  • Applied Physics Letters, Vol. 83, Issue 23
  • DOI: 10.1063/1.1633009

Self-excited piezoelectric cantilever oscillators
journal, March 1996


Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
journal, May 1997

  • Lee, Chengkuo; Itoh, Toshihiro; Maeda, Ryutaro
  • Review of Scientific Instruments, Vol. 68, Issue 5
  • DOI: 10.1063/1.1148102

Development of a piezoelectric self-excitation and self-detection mechanism in PZT microcantilevers for dynamic scanning force microscopy in liquid
journal, July 1997

  • Lee, Chengkuo
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 4
  • DOI: 10.1116/1.589400

Piezoelectric cantilever acoustic transducer
journal, September 1998

  • Lee, Seung S.; White, Richard M.
  • Journal of Micromechanics and Microengineering, Vol. 8, Issue 3
  • DOI: 10.1088/0960-1317/8/3/009

Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
journal, January 1999


Electromechanical Behavior of PZT-Brass Unimorphs
journal, July 1999


Attogram detection using nanoelectromechanical oscillators
journal, April 2004

  • Ilic, B.; Craighead, H. G.; Krylov, S.
  • Journal of Applied Physics, Vol. 95, Issue 7
  • DOI: 10.1063/1.1650542

Self-oscillating tapping mode atomic force microscopy
journal, September 2003

  • Manning, L.; Rogers, B.; Jones, M.
  • Review of Scientific Instruments, Vol. 74, Issue 9
  • DOI: 10.1063/1.1602935

Adsorption kinetics and mechanical properties of thiol-modified DNA-oligos on gold investigated by microcantilever sensors
journal, May 2002


Isothermal Measurements and Thermal Desorption of Organic Vapors Using SAW Devices
journal, March 1987

  • Martin, S. J.; Ricco, A. J.; Ginley, D. S.
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 34, Issue 2
  • DOI: 10.1109/T-UFFC.1987.26925

Manipulation and controlled amplification of Brownian motion of microcantilever sensors
journal, March 2001

  • Mehta, Adosh; Cherian, Suman; Hedden, David
  • Applied Physics Letters, Vol. 78, Issue 11
  • DOI: 10.1063/1.1355001

Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor
journal, March 1996

  • Minne, S. C.; Manalis, S. R.; Atalar, A.
  • Applied Physics Letters, Vol. 68, Issue 10
  • DOI: 10.1063/1.116102

Lead zirconate titanate cantilever for noncontact atomic force microscopy
journal, February 1999


Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation
journal, March 2002


Adsorption–desorption characteristics of explosive vapors investigated with microcantilevers
journal, October 2003


Gravimetric sensing of metallic deposits using an end-loaded microfabricated beam structure
journal, December 1998


A Behavioural Model of Resonant Cantilevers for Chemical Sensing
journal, August 2005

  • Paci, D.; Kirstein, K. -U.; Vancura, C.
  • Analog Integrated Circuits and Signal Processing, Vol. 44, Issue 2
  • DOI: 10.1007/s10470-005-2592-z

Dynamics of self-driven microcantilevers
journal, April 2002

  • Passian, A.; Muralidharan, G.; Kouchekian, S.
  • Journal of Applied Physics, Vol. 91, Issue 7
  • DOI: 10.1063/1.1452771

Surface micromachined piezoelectric resonant beam filters
journal, July 2001


A microsensor for trinitrotoluene vapour
journal, October 2003

  • Pinnaduwage, L. A.; Gehl, A.; Hedden, D. L.
  • Nature, Vol. 425, Issue 6957
  • DOI: 10.1038/425474a

Sensitive detection of plastic explosives with self-assembled monolayer-coated microcantilevers
journal, August 2003

  • Pinnaduwage, L. A.; Boiadjiev, V.; Hawk, J. E.
  • Applied Physics Letters, Vol. 83, Issue 7
  • DOI: 10.1063/1.1602156

Adsorption of Trinitrotoluene on Uncoated Silicon Microcantilever Surfaces
journal, March 2004

  • Pinnaduwage, L. A.; Yi, D.; Tian, F.
  • Langmuir, Vol. 20, Issue 7
  • DOI: 10.1021/la035658f

Detection of 2,4-dinitrotoluene using microcantilever sensors
journal, May 2004

  • Pinnaduwage, L. A.; Thundat, T.; Hawk, J. E.
  • Sensors and Actuators B: Chemical, Vol. 99, Issue 2-3
  • DOI: 10.1016/j.snb.2003.11.011

Moore's law in homeland defense: an integrated sensor platform based on silicon microcantilevers
journal, August 2005


Processing and Characterization of Piezoelectric Materials and Integration into Microelectromechanical Systems
journal, August 1998


Integrated multisensor chip
journal, April 1986

  • Polla, D. L.; Muller, R. S.; White, R. M.
  • IEEE Electron Device Letters, Vol. 7, Issue 4
  • DOI: 10.1109/EDL.1986.26363

Sensor based on piezoresistive microcantilever technology
journal, January 2001


Dynamic range of nanotube- and nanowire-based electromechanical systems
journal, May 2005

  • Postma, H. W. Ch.; Kozinsky, I.; Husain, A.
  • Applied Physics Letters, Vol. 86, Issue 22
  • DOI: 10.1063/1.1929098

Demonstration of Thermomechanical Recording at 641 Gbit/in<tex>$^2$</tex>
journal, July 2004


Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever
journal, November 2003

  • Rogers, B.; Manning, L.; Jones, M.
  • Review of Scientific Instruments, Vol. 74, Issue 11
  • DOI: 10.1063/1.1614876

Improving tapping mode atomic force microscopy with piezoelectric cantilevers
journal, August 2004


Temperature and pressure dependence of resonance in multi-layer microcantilevers
journal, June 2005

  • Sandberg, R.; Svendsen, W.; Mølhave, K.
  • Journal of Micromechanics and Microengineering, Vol. 15, Issue 8
  • DOI: 10.1088/0960-1317/15/8/011

Microhotplate platforms for chemical sensor research
journal, June 2001


Enhanced mass sensing using torsional and lateral resonances in microcantilevers
journal, June 2004

  • Sharos, L. B.; Raman, A.; Crittenden, S.
  • Applied Physics Letters, Vol. 84, Issue 23
  • DOI: 10.1063/1.1759379

Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe
journal, December 2002


Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers
journal, January 2001

  • Shih, Wan Y.; Li, Xiaoping; Gu, Huiming
  • Journal of Applied Physics, Vol. 89, Issue 2
  • DOI: 10.1063/1.1287606

Microcantilever resonance-based DNA detection with nanoparticle probes
journal, May 2003

  • Su, Ming; Li, Shuyou; Dravid, Vinayak P.
  • Applied Physics Letters, Vol. 82, Issue 20
  • DOI: 10.1063/1.1576915

Development of low temperature ultrahigh vacuum noncontact atomic force microscope with PZT cantilever
journal, April 2000


Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
journal, March 1993

  • Suehle, J. S.; Cavicchi, R. E.; Gaitan, M.
  • IEEE Electron Device Letters, Vol. 14, Issue 3
  • DOI: 10.1109/55.215130

Chemical sensors and biosensors in liquid environment based on microcantilevers with amplified quality factor
journal, January 2001


Multichannel Quartz Crystal Microbalance
journal, September 1999

  • Tatsuma, Tetsu; Watanabe, Yoshihito; Oyama, Noboru
  • Analytical Chemistry, Vol. 71, Issue 17
  • DOI: 10.1021/ac9904260

Thermal and ambient‐induced deflections of scanning force microscope cantilevers
journal, May 1994

  • Thundat, T.; Warmack, R. J.; Chen, G. Y.
  • Applied Physics Letters, Vol. 64, Issue 21
  • DOI: 10.1063/1.111407

Detection of mercury vapor using resonating microcantilevers
journal, March 1995

  • Thundat, T.; Wachter, E. A.; Sharp, S. L.
  • Applied Physics Letters, Vol. 66, Issue 13
  • DOI: 10.1063/1.113896

Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
journal, August 2005


Theoretical analysis of the sensor effect of cantilever piezoelectric benders
journal, February 1999

  • Wang, Qing-Ming; Du, Xiao-hong; Xu, Baomin
  • Journal of Applied Physics, Vol. 85, Issue 3
  • DOI: 10.1063/1.369314

Micro‐fabricated piezoelectric cantilever for atomic force microscopy
journal, November 1996

  • Watanabe, Shunji; Fujii, Toru
  • Review of Scientific Instruments, Vol. 67, Issue 11
  • DOI: 10.1063/1.1147290

Frequency shifts of cantilevers vibrating in various media
journal, November 1996

  • Weigert, Stefan; Dreier, Markus; Hegner, Martin
  • Applied Physics Letters, Vol. 69, Issue 19
  • DOI: 10.1063/1.117334

Mechanical behavior of ultrathin microcantilever
journal, May 2000


In situ cell detection using piezoelectric lead zirconate titanate-stainless steel cantilevers
journal, January 2003

  • Yi, Jeong W.; Shih, Wan Y.; Mutharasan, R.
  • Journal of Applied Physics, Vol. 93, Issue 1
  • DOI: 10.1063/1.1524022

Effect of length, width, and mode on the mass detection sensitivity of piezoelectric unimorph cantilevers
journal, February 2002

  • Yi, Jeong Woo; Shih, Wan Y.; Shih, Wei-Heng
  • Journal of Applied Physics, Vol. 91, Issue 3
  • DOI: 10.1063/1.1427403

Tuning forks as micromechanical mass sensitive sensors for bio- or liquid detection
journal, August 2003


Frequency-tuning for control of parametrically resonant mass sensors
journal, July 2005

  • Zhang, Wenhua; Turner, Kimberly L.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 23, Issue 4
  • DOI: 10.1116/1.1924717

Self-excited piezoelectric microcantilever for gas detection
journal, August 2003