# Method for fabricating a microelectromechanical resonator

## Abstract

A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.

- Inventors:

- Issue Date:

- Research Org.:
- SNL (Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States))

- Sponsoring Org.:
- USDOE

- OSTI Identifier:
- 1083225

- Patent Number(s):
- 8,367,305

- Application Number:
- 12/884,237

- Assignee:
- Sandia Corporation (Albuquerque, NM) SNL

- DOE Contract Number:
- AC04-94AL85000

- Resource Type:
- Patent

- Country of Publication:
- United States

- Language:
- English

- Subject:
- 42 ENGINEERING

### Citation Formats

```
Wojciechowski, Kenneth E, and Olsson, III, Roy H.
```*Method for fabricating a microelectromechanical resonator*. United States: N. p., 2013.
Web.

```
Wojciechowski, Kenneth E, & Olsson, III, Roy H.
```*Method for fabricating a microelectromechanical resonator*. United States.

```
Wojciechowski, Kenneth E, and Olsson, III, Roy H. Tue .
"Method for fabricating a microelectromechanical resonator". United States. https://www.osti.gov/servlets/purl/1083225.
```

```
@article{osti_1083225,
```

title = {Method for fabricating a microelectromechanical resonator},

author = {Wojciechowski, Kenneth E and Olsson, III, Roy H},

abstractNote = {A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.},

doi = {},

journal = {},

number = ,

volume = ,

place = {United States},

year = {2013},

month = {2}

}

Works referenced in this record:

##
Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators

journal, April 2007

- Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
- Journal of Microelectromechanical Systems, Vol. 16, Issue 2, p. 319-328

##
One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing

journal, November 2007

- Piazza, Gianluca; Stephanou, Philip J.; Pisano, Albert P.
- Solid-State Electronics, Vol. 51, Issue 11-12, p. 1596-1608

##
Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors

conference, May 2007

- Olsson, Roy H.; Fleming, James G.; Wojciechowski, Kenneth E.
- 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum