Title: Method for fabricating a microelectromechanical resonator

Abstract

A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width L.sub.a=NG and an effective electrode width W.sub.e=MG where N and M are integers which minimize a frequency error f.sub.e=f.sub.d-f.sub.a between a desired resonant frequency f.sub.d and an actual resonant frequency f.sub.a. The method can also be used to calculate an overall width W.sub.o for the MEM resonator, and an effective electrode length L.sub.e which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for L.sub.a, W.sub.e, W.sub.o and L.sub.e. The method can also be applied to a number j of MEM resonators formed on a common substrate.

Inventors:

Wojciechowski, Kenneth E; Olsson, III, Roy H

Issue Date:

Tue Feb 05 00:00:00 EST 2013

Research Org.:

Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)

Sponsoring Org.:

USDOE

OSTI Identifier:

1083225

Patent Number(s):

8367305

Application Number:

12/884,237

Assignee:

Sandia Corporation (Albuquerque, NM)

Patent Classifications (CPCs):

H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

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H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03H - IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS

H03H2009/241 - {Bulk-mode MEMS resonators}
H03H9/02228 - {Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer}
H03H9/2405 - {of microelectro-mechanical resonators}
H03H9/462 - {Microelectro-mechanical filters}

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DOE Contract Number:  

AC04-94AL85000

Resource Type:

Patent

Country of Publication:

United States

Language:

English

Subject:

42 ENGINEERING