Large-scale fabrication of vertically aligned ZnO nanowire arrays
Abstract
In a method for growing a nanowire array, a photoresist layer is placed onto a nanowire growth layer configured for growing nanowires therefrom. The photoresist layer is exposed to a coherent light interference pattern that includes periodically alternately spaced dark bands and light bands along a first orientation. The photoresist layer exposed to the coherent light interference pattern along a second orientation, transverse to the first orientation. The photoresist layer developed so as to remove photoresist from areas corresponding to areas of intersection of the dark bands of the interference pattern along the first orientation and the dark bands of the interference pattern along the second orientation, thereby leaving an ordered array of holes passing through the photoresist layer. The photoresist layer and the nanowire growth layer are placed into a nanowire growth environment, thereby growing nanowires from the nanowire growth layer through the array of holes.
- Inventors:
- Issue Date:
- Research Org.:
- Georgia Institute of Technology, Atlanta, GA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1083221
- Patent Number(s):
- 8367462
- Application Number:
- 13/091,855
- Assignee:
- Georgia Tech Research Corporation (Atlanta, GA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG02-07ER46394
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Wang, Zhong L, Das, Suman, Xu, Sheng, Yuan, Dajun, Guo, Rui, Wei, Yaguang, and Wu, Wenzhuo. Large-scale fabrication of vertically aligned ZnO nanowire arrays. United States: N. p., 2013.
Web.
Wang, Zhong L, Das, Suman, Xu, Sheng, Yuan, Dajun, Guo, Rui, Wei, Yaguang, & Wu, Wenzhuo. Large-scale fabrication of vertically aligned ZnO nanowire arrays. United States.
Wang, Zhong L, Das, Suman, Xu, Sheng, Yuan, Dajun, Guo, Rui, Wei, Yaguang, and Wu, Wenzhuo. Tue .
"Large-scale fabrication of vertically aligned ZnO nanowire arrays". United States. https://www.osti.gov/servlets/purl/1083221.
@article{osti_1083221,
title = {Large-scale fabrication of vertically aligned ZnO nanowire arrays},
author = {Wang, Zhong L and Das, Suman and Xu, Sheng and Yuan, Dajun and Guo, Rui and Wei, Yaguang and Wu, Wenzhuo},
abstractNote = {In a method for growing a nanowire array, a photoresist layer is placed onto a nanowire growth layer configured for growing nanowires therefrom. The photoresist layer is exposed to a coherent light interference pattern that includes periodically alternately spaced dark bands and light bands along a first orientation. The photoresist layer exposed to the coherent light interference pattern along a second orientation, transverse to the first orientation. The photoresist layer developed so as to remove photoresist from areas corresponding to areas of intersection of the dark bands of the interference pattern along the first orientation and the dark bands of the interference pattern along the second orientation, thereby leaving an ordered array of holes passing through the photoresist layer. The photoresist layer and the nanowire growth layer are placed into a nanowire growth environment, thereby growing nanowires from the nanowire growth layer through the array of holes.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 05 00:00:00 EST 2013},
month = {Tue Feb 05 00:00:00 EST 2013}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Semiconductor sensors
patent, March 1977
- Gatos, Harry C.; Lagowski, Jacek
- US Patent Document 4,011,745
Nanoscale piezoelectric generation system using carbon nanotube
patent, May 2003
- Herman, Frederick J.
- US Patent Document 6,559,550
Bimorphic polymeric photomechanical actuator
patent, February 2006
- Sarkisov, Sergey; Curley, Michael J.; Adamovsky, Grigory
- US Patent Document 6,999,221
Nanoscale junction arrays and methods for making same
patent, May 2007
- Wang, Zhong L.; Gao, Pu
- US Patent Document 7,220,310
Large scale patterned growth of aligned one-dimensional nanostructures
patent, April 2008
- Wang, Zhong L.; Summers, Christopher J.; Wang, Xudong
- US Patent Document 7,351,607
Probe tips and method of making same
patent, August 2008
- Wang, Zhong L.; Hughes, William L.; Buchine, Brent A.
- US Patent Document 7,408,366
Nanostructures, systems, and methods including nanolasers for enhanced Raman spectroscopy
patent, September 2008
- Wang, Shih-Yuan
- US Patent Document 7,426,025
Hybrid solar nanogenerator cells
patent, April 2010
- Wang, Zhong L.; Wang, Xudong
- US Patent Document 7,705,523
Muscle-driven nanogenerators
patent, March 2011
- Wang, Zhong L.; Yang, Rusen
- US Patent Document 7,898,156
Method of making a probe tip
patent, July 2011
- Wang, Zhong L.; Hughes, William L.; Buchine, Brent A.
- US Patent Document 7,975,363
Flexible nanogenerators
patent, July 2011
- Wang, Zhong L.; Wang, Xudong; Qin, Yong
- US Patent Document 7,982,370
Methods of manufacturing a lithography template
patent-application, November 2003
- Voisin, Ronald D.
- US Patent Application 10/136188; 20030205657
Nanoarchitectures of semiconducting and piezoelectric zinc oxide
journal, February 2005
- Gao, Pu Xian; Wang, Zhong L.
- Journal of Applied Physics, Vol. 97, Issue 4
Large-Size Liftable Inverted-Nanobowl Sheets as Reusable Masks for Nanolithiography
journal, September 2005
- Wang, Xudong; Lao, Changshi; Graugnard, Elton
- Nano Letters, Vol. 5, Issue 9
Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays
journal, April 2006
- Wang, Z. L.
- Science, Vol. 312, Issue 5771
Formation of double-side teethed nanocombs of ZnO and self-catalysis of Zn-terminated polar surface
journal, January 2006
- Lao, Chang Shi; Gao, Pu Xian; Yang, Ru Sen
- Chemical Physics Letters, Vol. 417, Issue 4-6, p. 358-362
Works referencing / citing this record:
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462
Large-scale fabrication of vertically aligned ZnO nanowire arrays
patent, February 2013
- Wang, Zhong L.; Das, Suman; Xu, Sheng
- US Patent Document 8,367,462