Fabrication of solar cells with counter doping prevention

Dennis, Timothy D; Li, Bo; Cousins, Peter John

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Title: Fabrication of solar cells with counter doping prevention

Abstract

A solar cell fabrication process includes printing of dopant sources over a polysilicon layer over backside of a solar cell substrate. The dopant sources are cured to diffuse dopants from the dopant sources into the polysilicon layer to form diffusion regions, and to crosslink the dopant sources to make them resistant to a subsequently performed texturing process. To prevent counter doping, dopants from one of the dopant sources are prevented from outgassing and diffusing into the other dopant source. For example, phosphorus from an N-type dopant source is prevented from diffusing to a P-type dopant source comprising boron.

Inventors:: Dennis, Timothy D; Li, Bo; Cousins, Peter John

Issue Date:: Tue Feb 19 00:00:00 EST 2013

Research Org.:: SunPower Corporation (San Jose, CA)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1082914

Patent Number(s):: 8377738

Application Number:: 12/828,573

Assignee:: SunPower Corporation (San Jose, CA)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
H01L31/0745 - comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
H01L31/1804 - {comprising only elements of Group IV of the Periodic System}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
Y02E10/547 - Monocrystalline silicon PV cells

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02P - CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
Y02P70/50 - Manufacturing or production processes characterised by the final manufactured product

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DOE Contract Number:: FC36-07GO17043

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 14 SOLAR ENERGY

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                    Dennis, Timothy D, Li, Bo, and Cousins, Peter John. Fabrication of solar cells with counter doping prevention.  United States: N. p., 2013. 
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                    Dennis, Timothy D, Li, Bo, & Cousins, Peter John. Fabrication of solar cells with counter doping prevention.  United States.

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                    Dennis, Timothy D, Li, Bo, and Cousins, Peter John. Tue .  
        "Fabrication of solar cells with counter doping prevention".  United States.  https://www.osti.gov/servlets/purl/1082914.

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@article{osti_1082914,

  title        = {Fabrication of solar cells with counter doping prevention},

  author       = {Dennis, Timothy D and Li, Bo and Cousins, Peter John},

  abstractNote = {A solar cell fabrication process includes printing of dopant sources over a polysilicon layer over backside of a solar cell substrate. The dopant sources are cured to diffuse dopants from the dopant sources into the polysilicon layer to form diffusion regions, and to crosslink the dopant sources to make them resistant to a subsequently performed texturing process. To prevent counter doping, dopants from one of the dopant sources are prevented from outgassing and diffusing into the other dopant source. For example, phosphorus from an N-type dopant source is prevented from diffusing to a P-type dopant source comprising boron.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Feb 19 00:00:00 EST 2013},

  month        = {Tue Feb 19 00:00:00 EST 2013}

}

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Swanson, Richard M.; De Ceuster, Denis; Desai, Vikas
US Patent Application 11/210213; 20060196535
URL: https://image-ppubs.uspto.gov/dirsearch-public/print/downloadPdf/20060196535

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Title: Fabrication of solar cells with counter doping prevention

Abstract

Citation Formats

Preventing harmful polarization of solar cells patent, June 2009

Voltage controlled thyristor patent, November 1994

P/N junction device having porous emitter patent, November 1994

Inkjet printer with protector for a printhead capping facility patent, January 2008

Screen printed interdigitated back contact solar cell patent, October 1984

Generation Of Contact Masks For Inkjet Printing On Solar Cell Substrates patent-application, March 2010

Method of making a back contacted solar cell patent, November 1995

Halftone proofing with inkjet printers patent, November 2007

Fabrication of polycrystalline solar cells on low-cost substrates patent, June 1976

Aluminum alloy back junction solar cell and a process for fabrication thereof patent, July 2001

High infrared reflection coatings and associated technologies patent-application, April 2007

Faceted low absorptance solar cell patent, January 1984

Method of fabricating polysilicon emitters for solar cells patent, October 1991

Monolithic series-connected solar cells having improved cell isolation and method of making same patent, November 1992

Solar cell having an emitter provided with a surface texture and a process for the fabrication thereof patent, November 2000

Solar cell and method for fabricating the same patent, February 2003

Bilevel contact solar cells patent, October 1991

Method of fabricating a silicon solar cell patent, January 2002

Methods for Simultaneously Forming N-Type and P-Type Doped Regions Using Non-Contact Printing Processes patent-application, April 2010

Protective sheet for solar battery module, method of fabricating the same and solar battery module patent, August 2004

Method of forming backside point contact structures for silicon solar cells patent, April 2009

Process for manufacturing photovoltaic cells patent-application, December 2005

Inkjet printer with two-stage capping mechanism patent, March 2008

Method for etching silicon oxynitride and inorganic antireflection coatings patent, January 2000

Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell patent, June 1997

Semiconductor device with selectively diffused regions patent, April 2003

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures patent, July 2007

Method of fabricating back surface point contact solar cells patent, May 1990

Front contact solar cell with formed emitter patent-application, August 2009

Printhead assembly with heat sink for drive circuitry patent, January 2008

Edge passivated silicon solar/photo cell and method of manufacture patent, December 2001

Back-contact photovoltaic cells patent-application, June 2006

Capping/purging system for inkjet printhead assembly patent, April 2008

Solar cell substrate with thin film polysilicon patent, February 2004

Printed dopant layers patent-application, February 2008

Use of doped silicon dioxide in the fabrication of solar cells patent, February 2006

Back side contact solar cell structures and fabrication processes patent-application, July 2007

Deposition of dopant impurities and pulsed energy drive-in patent, June 1999

Page-width inkjet printer with printhead-transfer roller arrangement patent, February 2008

A mirror-less design for micro-concentrator modules conference, January 2000

Wide scanning angle sensor patent, April 1978

Photovoltaic device patent, January 1985

Solar cell having an integral monolithically grown bypass diode patent, August 2001

Solar cell with reduced shading and method of producing the same patent, November 2000

Method of fabricating a silicon solar cell patent, August 2001

Multilayered wiring structure and method of manufacturing the same patent, August 2001

Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells patent, January 2005

Interconnected silicon film solar cell array patent, November 1993

Method of fabricating a silicon solar cell patent, May 2002

Backside Contact Solar Cell With Formed Polysilicon Doped Regions patent-application, June 2010

Process for fabricating solar cells and the product produced thereby patent, July 1981

Radiation resistant passivation of silicon solar cells patent, July 1991

Processing apparatus for an inkjet printer patent, December 2007

Back side contact solar cell with doped polysilicon regions patent, December 2008

Print engine for double-sided printing patent, October 2007

Spectrophotometer and optical system therefor patent, April 1996

Preventing harmful polarization of solar cells patent, August 2010

Metal contact structure for solar cell and method of manufacture patent-application, October 2004

Floating emitter solar cell patent, May 1987

Laminates Comprising Thermoplastic Polysiloxane-urea Copolymers patent-application, February 2010

Ophthalmic antireflection coatings with metal, dielectric, substrate, metal, dielectric in sequence patent, January 1978

Optoelectronic architecture having compound conducting substrate cross-reference to related application patent-application, July 2006

Deposition fabrication using inkjet technology patent, December 2007

Method of Forming an Electronic Device patent-application, July 2003

Photovoltaic module framing system with integral electrical raceways patent, October 2002

Solar cell with a back-surface field patent, August 2000

Photovoltaic device patent, November 1991

Self aligning method for forming a selective emitter and metallization in a solar cell patent, August 2002

Direct positive image photo-resist transfer of substrate design patent, March 2005

A flat-plate concentrator: micro-concentrator design overview conference, January 2000

Method of fabricating a silicon solar cell patent, July 2002

Semiconductor device with selectively diffused regions patent-application, July 2003

Solar cell module and method of manufacturing the same patent, February 1995

III-V solar cells and doping processes patent, June 1993

Inkjet printer having ink distribution to fixedly attached printhead ICS patent, December 2007

Buried-contact solar cells with self-doping contacts patent, February 2008

Use of doped silicon dioxide in the fabrication of solar cells patent, November 2006

Preventing harmful polarization of solar cells
patent, June 2009

Voltage controlled thyristor
patent, November 1994

P/N junction device having porous emitter
patent, November 1994

Inkjet printer with protector for a printhead capping facility
patent, January 2008

Screen printed interdigitated back contact solar cell
patent, October 1984

Generation Of Contact Masks For Inkjet Printing On Solar Cell Substrates
patent-application, March 2010

Method of making a back contacted solar cell
patent, November 1995

Halftone proofing with inkjet printers
patent, November 2007

Fabrication of polycrystalline solar cells on low-cost substrates
patent, June 1976

Aluminum alloy back junction solar cell and a process for fabrication thereof
patent, July 2001

High infrared reflection coatings and associated technologies
patent-application, April 2007

Faceted low absorptance solar cell
patent, January 1984

Method of fabricating polysilicon emitters for solar cells
patent, October 1991

Monolithic series-connected solar cells having improved cell isolation and method of making same
patent, November 1992

Solar cell having an emitter provided with a surface texture and a process for the fabrication thereof
patent, November 2000

Solar cell and method for fabricating the same
patent, February 2003

Bilevel contact solar cells
patent, October 1991

Method of fabricating a silicon solar cell
patent, January 2002

Methods for Simultaneously Forming N-Type and P-Type Doped Regions Using Non-Contact Printing Processes
patent-application, April 2010

Protective sheet for solar battery module, method of fabricating the same and solar battery module
patent, August 2004

Method of forming backside point contact structures for silicon solar cells
patent, April 2009

Process for manufacturing photovoltaic cells
patent-application, December 2005

Inkjet printer with two-stage capping mechanism
patent, March 2008

Method for etching silicon oxynitride and inorganic antireflection coatings
patent, January 2000

Structure and fabrication process for an aluminum alloy junction self-aligned back contact silicon solar cell
patent, June 1997

Semiconductor device with selectively diffused regions
patent, April 2003

Controlled nanowire growth in permanent, integrated nano-templates and methods of fabricating sensor and transducer structures
patent, July 2007

Method of fabricating back surface point contact solar cells
patent, May 1990

Front contact solar cell with formed emitter
patent-application, August 2009

Printhead assembly with heat sink for drive circuitry
patent, January 2008

Edge passivated silicon solar/photo cell and method of manufacture
patent, December 2001

Back-contact photovoltaic cells
patent-application, June 2006

Capping/purging system for inkjet printhead assembly
patent, April 2008

Solar cell substrate with thin film polysilicon
patent, February 2004

Printed dopant layers
patent-application, February 2008

Use of doped silicon dioxide in the fabrication of solar cells
patent, February 2006

Back side contact solar cell structures and fabrication processes
patent-application, July 2007

Deposition of dopant impurities and pulsed energy drive-in
patent, June 1999

Page-width inkjet printer with printhead-transfer roller arrangement
patent, February 2008

A mirror-less design for micro-concentrator modules
conference, January 2000

Wide scanning angle sensor
patent, April 1978

Photovoltaic device
patent, January 1985

Solar cell having an integral monolithically grown bypass diode
patent, August 2001

Solar cell with reduced shading and method of producing the same
patent, November 2000

Method of fabricating a silicon solar cell
patent, August 2001

Multilayered wiring structure and method of manufacturing the same
patent, August 2001

Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells
patent, January 2005

Interconnected silicon film solar cell array
patent, November 1993

Method of fabricating a silicon solar cell
patent, May 2002

Backside Contact Solar Cell With Formed Polysilicon Doped Regions
patent-application, June 2010

Process for fabricating solar cells and the product produced thereby
patent, July 1981

Radiation resistant passivation of silicon solar cells
patent, July 1991

Processing apparatus for an inkjet printer
patent, December 2007

Back side contact solar cell with doped polysilicon regions
patent, December 2008

Print engine for double-sided printing
patent, October 2007

Spectrophotometer and optical system therefor
patent, April 1996

Preventing harmful polarization of solar cells
patent, August 2010

Metal contact structure for solar cell and method of manufacture
patent-application, October 2004

Floating emitter solar cell
patent, May 1987

Laminates Comprising Thermoplastic Polysiloxane-urea Copolymers
patent-application, February 2010

Ophthalmic antireflection coatings with metal, dielectric, substrate, metal, dielectric in sequence
patent, January 1978

Optoelectronic architecture having compound conducting substrate cross-reference to related application
patent-application, July 2006

Deposition fabrication using inkjet technology
patent, December 2007

Method of Forming an Electronic Device
patent-application, July 2003

Photovoltaic module framing system with integral electrical raceways
patent, October 2002

Solar cell with a back-surface field
patent, August 2000

Photovoltaic device
patent, November 1991

Self aligning method for forming a selective emitter and metallization in a solar cell
patent, August 2002

Direct positive image photo-resist transfer of substrate design
patent, March 2005

A flat-plate concentrator: micro-concentrator design overview
conference, January 2000

Method of fabricating a silicon solar cell
patent, July 2002

Semiconductor device with selectively diffused regions
patent-application, July 2003

Solar cell module and method of manufacturing the same
patent, February 1995

III-V solar cells and doping processes
patent, June 1993

Inkjet printer having ink distribution to fixedly attached printhead ICS
patent, December 2007

Buried-contact solar cells with self-doping contacts
patent, February 2008

Use of doped silicon dioxide in the fabrication of solar cells
patent, November 2006

Solar Module Structures and Assembly Methods for Three-Dimensional Thin-Film Solar Cells
patent-application, December 2009

Metal contact scheme using selective silicon growth
patent, April 2001

Solar cell and method for manufacturing the same
patent, March 1998