DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Lithographically defined microporous carbon structures

Abstract

A lithographic method is used to fabricate porous carbon structures that can provide electrochemical electrodes having high surface area with uniform and controllable dimensions, providing enormous flexibility to tailor the electrodes toward specific applications. Metal nanoparticles deposited on the surface of the porous carbon electrodes exhibit ultra small dimensions with uniform size distribution. The resulting electrodes are rugged, electrically conductive and show excellent electrochemical behavior.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1082898
Patent Number(s):
8349547
Application Number:
12/874,971
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01M - PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., and Wheeler, David R. Lithographically defined microporous carbon structures. United States: N. p., 2013. Web.
Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., & Wheeler, David R. Lithographically defined microporous carbon structures. United States.
Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., and Wheeler, David R. Tue . "Lithographically defined microporous carbon structures". United States. https://www.osti.gov/servlets/purl/1082898.
@article{osti_1082898,
title = {Lithographically defined microporous carbon structures},
author = {Burckel, David Bruce and Washburn, Cody M. and Polsky, Ronen and Brozik, Susan M. and Wheeler, David R.},
abstractNote = {A lithographic method is used to fabricate porous carbon structures that can provide electrochemical electrodes having high surface area with uniform and controllable dimensions, providing enormous flexibility to tailor the electrodes toward specific applications. Metal nanoparticles deposited on the surface of the porous carbon electrodes exhibit ultra small dimensions with uniform size distribution. The resulting electrodes are rugged, electrically conductive and show excellent electrochemical behavior.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 08 00:00:00 EST 2013},
month = {Tue Jan 08 00:00:00 EST 2013}
}

Works referenced in this record:

Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications
journal, January 2000


Novel Nanoparticle Patterning Process
patent-application, December 2007


Fabrication of 3D photonic crystals with two-beam holographic technique
conference, September 2004


Fabrication and Evaluation of Nanoelectrode Ensembles
journal, July 1995


Structural and electrochemical features of 3D nanoporous platinum electrodes
journal, February 2010


Functionalization of Porous Carbon Materials with Designed Pore Architecture
journal, January 2009


Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications
journal, January 2002


Fabrication of nanoporous palladium by dealloying and its thermal coarsening
journal, June 2009


Fabrication of 3D Gold Nanoelectrode Ensembles by Chemical Etching
journal, August 2005


Recent Progress in the Synthesis of Porous Carbon Materials
journal, August 2006


Lithographically defined carbon growth templates for ELOG of GaN
journal, June 2008


Advanced Carbon Electrode Materials for Molecular Electrochemistry
journal, July 2008


Ordered Integrated Arrays of Pd and Pt Nanotubules on Al with Controllable Dimensions and Tailored Morphologies
journal, January 2008


Synthesis of Tetrahexahedral Platinum Nanocrystals with High-Index Facets and High Electro-Oxidation Activity
journal, May 2007


Template-directed porous electrodes in electroanalysis
journal, September 2009


C-MEMS for the Manufacture of 3D Microbatteries
journal, January 2004


Photomask, the manufacturing Method, a Patterning Method, and a Semiconductor Device Manufacturing Method
patent-application, July 2002


Facile Synthesis of Pd−Cd Nanostructures with High Capacity for Hydrogen Storage
journal, May 2009


Mesoporous Carbon Materials: Synthesis and Modification
journal, May 2008


Fabrication of two- and three-dimensional model catalyst systems with monodispersed platinum nanoparticles as active metal building blocks
journal, June 2006


Optical and Interferometric Lithography - Nanotechnology Enablers
journal, October 2005


Lithographically Defined Porous Carbon Electrodes
journal, December 2009


Electrocatalytic Determination of Colloidal Gold Particles Using a Carbon Paste Electrode Pretreated in Cyanide Media
journal, December 2000


Electroanalytical Performance of Carbon Films with Near-Atomic Flatness
journal, March 2001


Electrochemical Reduction of Oxygen on Gold Nanoparticle-Electrodeposited Glassy Carbon Electrodes
journal, January 2003


Surface studies of carbon films from pyrolyzed photoresist
journal, September 2001


Effects of gold nanoparticle and electrode surface properties on electrocatalytic silver deposition for electrochemical DNA hybridization detection
journal, January 2005


Large area energy beam intensity profiler
patent, September 1999