Lithographically defined microporous carbon structures
Abstract
A lithographic method is used to fabricate porous carbon structures that can provide electrochemical electrodes having high surface area with uniform and controllable dimensions, providing enormous flexibility to tailor the electrodes toward specific applications. Metal nanoparticles deposited on the surface of the porous carbon electrodes exhibit ultra small dimensions with uniform size distribution. The resulting electrodes are rugged, electrically conductive and show excellent electrochemical behavior.
- Inventors:
- Issue Date:
- Research Org.:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1082898
- Patent Number(s):
- 8349547
- Application Number:
- 12/874,971
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01M - PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., and Wheeler, David R. Lithographically defined microporous carbon structures. United States: N. p., 2013.
Web.
Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., & Wheeler, David R. Lithographically defined microporous carbon structures. United States.
Burckel, David Bruce, Washburn, Cody M., Polsky, Ronen, Brozik, Susan M., and Wheeler, David R. Tue .
"Lithographically defined microporous carbon structures". United States. https://www.osti.gov/servlets/purl/1082898.
@article{osti_1082898,
title = {Lithographically defined microporous carbon structures},
author = {Burckel, David Bruce and Washburn, Cody M. and Polsky, Ronen and Brozik, Susan M. and Wheeler, David R.},
abstractNote = {A lithographic method is used to fabricate porous carbon structures that can provide electrochemical electrodes having high surface area with uniform and controllable dimensions, providing enormous flexibility to tailor the electrodes toward specific applications. Metal nanoparticles deposited on the surface of the porous carbon electrodes exhibit ultra small dimensions with uniform size distribution. The resulting electrodes are rugged, electrically conductive and show excellent electrochemical behavior.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jan 08 00:00:00 EST 2013},
month = {Tue Jan 08 00:00:00 EST 2013}
}
Works referenced in this record:
Photoresist-Derived Carbon for Microelectromechanical Systems and Electrochemical Applications
journal, January 2000
- Ranganathan, Srikanth; McCreery, Richard; Majji, Sree Mouli
- Journal of The Electrochemical Society, Vol. 147, Issue 1
Novel Nanoparticle Patterning Process
patent-application, December 2007
- Tutt, Lee W.; Feller, Therese M.
- US Patent Application 11/421894; 20070281249
Fabrication of 3D photonic crystals with two-beam holographic technique
conference, September 2004
- Liu, Ying; Liu, Shou; Zhang, Xiangsu
- Photonics Europe, SPIE Proceedings
Fabrication and Evaluation of Nanoelectrode Ensembles
journal, July 1995
- Menon, Vinod P.; Martin, Charles R.
- Analytical Chemistry, Vol. 67, Issue 13
Characterization of Carbon/Nitroazobenzene/Titanium Molecular Electronic Junctions with Photoelectron and Raman Spectroscopy
journal, January 2004
- Nowak, Aletha M.; McCreery, Richard L.
- Analytical Chemistry, Vol. 76, Issue 4
Structural and electrochemical features of 3D nanoporous platinum electrodes
journal, February 2010
- Park, Sejin; Song, Youn Joo; Han, Ji-Hyung
- Electrochimica Acta, Vol. 55, Issue 6
Functionalization of Porous Carbon Materials with Designed Pore Architecture
journal, January 2009
- Stein, Andreas; Wang, Zhiyong; Fierke, Melissa A.
- Advanced Materials, Vol. 21, Issue 3, p. 265-293
Pyrolysis of Negative Photoresists to Fabricate Carbon Structures for Microelectromechanical Systems and Electrochemical Applications
journal, January 2002
- Singh, Amit; Jayaram, Jaishankar; Madou, Marc
- Journal of The Electrochemical Society, Vol. 149, Issue 3
Fabrication of nanoporous palladium by dealloying and its thermal coarsening
journal, June 2009
- Hakamada, Masataka; Mabuchi, Mamoru
- Journal of Alloys and Compounds, Vol. 479, Issue 1-2
Fabrication of 3D Gold Nanoelectrode Ensembles by Chemical Etching
journal, August 2005
- Krishnamoorthy, Kothandam; Zoski, Cynthia G.
- Analytical Chemistry, Vol. 77, Issue 15
Recent Progress in the Synthesis of Porous Carbon Materials
journal, August 2006
- Lee, J.; Kim, J.; Hyeon, T.
- Advanced Materials, Vol. 18, Issue 16, p. 2073-2094
Fabrication of palladium coated nanoporous gold film electrode via underpotential deposition and spontaneous metal replacement: A low palladium loading electrode with electrocatalytic activity
journal, December 2009
- Kiani, Abolfazl; Fard, Effat Nekooiy
- Electrochimica Acta, Vol. 54, Issue 28
Lithographically defined carbon growth templates for ELOG of GaN
journal, June 2008
- Burckel, D. B.; Fan, Hongyou; Thaler, G.
- Journal of Crystal Growth, Vol. 310, Issue 12
Advanced Carbon Electrode Materials for Molecular Electrochemistry
journal, July 2008
- McCreery, Richard L.
- Chemical Reviews, Vol. 108, Issue 7, p. 2646-2687
Ordered Integrated Arrays of Pd and Pt Nanotubules on Al with Controllable Dimensions and Tailored Morphologies
journal, January 2008
- Chu, S. Z.; Kawamura, H.; Mori, M.
- Journal of The Electrochemical Society, Vol. 155, Issue 5
Synthesis of Tetrahexahedral Platinum Nanocrystals with High-Index Facets and High Electro-Oxidation Activity
journal, May 2007
- Tian, N.; Zhou, Z. -Y.; Sun, S. -G.
- Science, Vol. 316, Issue 5825, p. 732-735
Template-directed porous electrodes in electroanalysis
journal, September 2009
- Walcarius, Alain
- Analytical and Bioanalytical Chemistry, Vol. 396, Issue 1
C-MEMS for the Manufacture of 3D Microbatteries
journal, January 2004
- Wang, Chunlei; Taherabadi, Lili; Jia, Guangyao
- Electrochemical and Solid-State Letters, Vol. 7, Issue 11
Photomask, the manufacturing Method, a Patterning Method, and a Semiconductor Device Manufacturing Method
patent-application, July 2002
- Hattori, Takas hi; Gotoh, Yasuko; Satoh, Hidetoshi
- US Patent Application 10/072880; 20020094483
Facile Synthesis of Pd−Cd Nanostructures with High Capacity for Hydrogen Storage
journal, May 2009
- Adams, Brian D.; Wu, Guosheng; Nigro, Samantha
- Journal of the American Chemical Society, Vol. 131, Issue 20
Mesoporous Carbon Materials: Synthesis and Modification
journal, May 2008
- Liang, Chengdu; Li, Zuojiang; Dai, Sheng
- Angewandte Chemie International Edition, Vol. 47, Issue 20, p. 3696-3717
Fabrication of two- and three-dimensional model catalyst systems with monodispersed platinum nanoparticles as active metal building blocks
journal, June 2006
- Niesz, Krisztian; Koebel, Matthias M.; Somorjai, Gabor A.
- Inorganica Chimica Acta, Vol. 359, Issue 9
Optical and Interferometric Lithography - Nanotechnology Enablers
journal, October 2005
- Brueck, S. R. J.
- Proceedings of the IEEE, Vol. 93, Issue 10
Lithographically Defined Porous Carbon Electrodes
journal, December 2009
- Burckel, D. Bruce; Washburn, Cody M.; Raub, Alex K.
- Small, Vol. 5, Issue 24, p. 2792-2796
Electrocatalytic Determination of Colloidal Gold Particles Using a Carbon Paste Electrode Pretreated in Cyanide Media
journal, December 2000
- Hernández-Santos, David; Begoña González-García, María; Costa-García, Agustín
- Electroanalysis, Vol. 12, Issue 18, p. 1461-1466
Electroanalytical Performance of Carbon Films with Near-Atomic Flatness
journal, March 2001
- Ranganathan, Srikanth; McCreery, Richard L.
- Analytical Chemistry, Vol. 73, Issue 5
Nucleation and growth mechanism of electroformation of polypyrrole on a heat-treated gold/highly oriented pyrolytic graphite
journal, May 2001
- Hwang, Bing Joe; Santhanam, Raman; Lin, Yi Liang
- Electrochimica Acta, Vol. 46, Issue 18
Electrochemical Reduction of Oxygen on Gold Nanoparticle-Electrodeposited Glassy Carbon Electrodes
journal, January 2003
- El-Deab, Mohamed S.; Okajima, Takeyoshi; Ohsaka, Takeo
- Journal of The Electrochemical Society, Vol. 150, Issue 7
Surface studies of carbon films from pyrolyzed photoresist
journal, September 2001
- Kostecki, R.; Schnyder, B.; Alliata, D.
- Thin Solid Films, Vol. 396, Issue 1-2
Effects of gold nanoparticle and electrode surface properties on electrocatalytic silver deposition for electrochemical DNA hybridization detection
journal, January 2005
- LeeCurrent address: Department of C., Thomas Ming-Hung; Cai, Hong; Hsing, I-Ming
- The Analyst, Vol. 130, Issue 3
Large area energy beam intensity profiler
patent, September 1999
- Ghosh, Amalkumar P.
- US Patent Document 5,959,725
