Analytical scanning evanescent microwave microscope and control stage

Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; Yang, Hai Tao; Lu, Yalin

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Title: Analytical scanning evanescent microwave microscope and control stage

Abstract

A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.

Inventors:: Xiang, Xiao-Dong; Gao, Chen; Duewer, Fred; Yang, Hai Tao; Lu, Yalin

Issue Date:: Tue Jan 22 00:00:00 EST 2013

Research Org.:: YMP (Yucca Mountain Project, Las Vegas, Nevada (United States))

Sponsoring Org.:: USDOE

OSTI Identifier:: 1082722

Patent Number(s):: 8358141

Application Number:: 12/465,022

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Classifications (CPCs):: G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS

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G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q60/22 - Probes, their manufacture, or their related instrumentation, e.g. holders

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DOE Contract Number:: AC03-76SF00098

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 47 OTHER INSTRUMENTATION

Citation Formats


                    Xiang, Xiao-Dong, Gao, Chen, Duewer, Fred, Yang, Hai Tao, and Lu, Yalin. Analytical scanning evanescent microwave microscope and control stage.  United States: N. p., 2013. 
        Web.

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                    Xiang, Xiao-Dong, Gao, Chen, Duewer, Fred, Yang, Hai Tao, & Lu, Yalin. Analytical scanning evanescent microwave microscope and control stage.  United States.

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                    Xiang, Xiao-Dong, Gao, Chen, Duewer, Fred, Yang, Hai Tao, and Lu, Yalin. Tue .  
        "Analytical scanning evanescent microwave microscope and control stage".  United States.  https://www.osti.gov/servlets/purl/1082722.

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@article{osti_1082722,

  title        = {Analytical scanning evanescent microwave microscope and control stage},

  author       = {Xiang, Xiao-Dong and Gao, Chen and Duewer, Fred and Yang, Hai Tao and Lu, Yalin},

  abstractNote = {A scanning evanescent microwave microscope (SEMM) that uses near-field evanescent electromagnetic waves to probe sample properties is disclosed. The SEMM is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The SEMM has the ability to map dielectric constant, loss tangent, conductivity, electrical impedance, and other electrical parameters of materials. Such properties are then used to provide distance control over a wide range, from to microns to nanometers, over dielectric and conductive samples for a scanned evanescent microwave probe, which enable quantitative non-contact and submicron spatial resolution topographic and electrical impedance profiling of dielectric, nonlinear dielectric and conductive materials. The invention also allows quantitative estimation of microwave impedance using signals obtained by the scanned evanescent microwave probe and quasistatic approximation modeling. The SEMM can be used to measure electrical properties of both dielectric and electrically conducting materials.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jan 22 00:00:00 EST 2013},

  month        = {Tue Jan 22 00:00:00 EST 2013}

}

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Similar Records

Title: Analytical scanning evanescent microwave microscope and control stage

Abstract

Citation Formats

Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis journal, December 1996

Apertureless near‐field optical microscope journal, September 1994

Microwave reflection resonator sensors patent, August 1994

Dielectric probe for permittivity and permeability measurements at low microwave frequencies conference, January 1992

Facts and artifacts in near-field optical microscopy journal, March 1997

Focusing probe for moisture measurement device patent, December 1982

Laser pumped atomic frequency standard with high frequency stability patent, September 1992

A Quasi-Static Analysis of Open-Ended Coaxial Lines (Short Paper) journal, October 1987

Apparatus for measuring physical properties of micro area patent, December 1996

Sub-wavelength patterning of the optical near-field journal, January 2004

A microwave scanning surface harmonic microscope using a re-entrant resonant cavity journal, August 1995

Method and apparatus for measuring the permittivity of materials patent, August 1993

Microwave Resonant Cavities for Sensing Moisture and Mass of Single Seeds and Kernels conference, January 1992

Apertureless near field optical microscope patent, August 1990

Scanning Probe Microscopy journal, January 1996

Method of and Apparatus for Particle Detection and Identification patent, November 1973

Heterodyne electrostatic force microscopy used as a new non-contact test technique for integrated circuits conference, January 1995

Passive Modulating Component patent, May 1975

Method and apparatus for measuring electrical conductivity patent, April 1976

Mass or weight determination of arbitrarily-shaped dielectric objects by microwave resonator measurements patent, September 1996

Use of time domain spectroscopy for measuring dielectric properties with a coaxial probe journal, October 1986

Microwave technique for single kernel, seed, nut, or fruit moisture content determination patent, August 1991

Optical probe employing an impedance matched sub-lambda transmission line patent, December 1992

Controlling and tuning strong optical field gradients at a local probe microscope tip apex journal, February 1997

Metallized tubule-based artificial dielectric patent, March 1992

Method and apparatus for measuring surface characteristics of material patent, January 1995

Scanning probe microscopy for 2-D semiconductor dopant profiling and device failure analysis
journal, December 1996

Apertureless near‐field optical microscope
journal, September 1994

Microwave reflection resonator sensors
patent, August 1994

Dielectric probe for permittivity and permeability measurements at low microwave frequencies
conference, January 1992

Facts and artifacts in near-field optical microscopy
journal, March 1997

Focusing probe for moisture measurement device
patent, December 1982

Laser pumped atomic frequency standard with high frequency stability
patent, September 1992

A Quasi-Static Analysis of Open-Ended Coaxial Lines (Short Paper)
journal, October 1987

Apparatus for measuring physical properties of micro area
patent, December 1996

Sub-wavelength patterning of the optical near-field
journal, January 2004

A microwave scanning surface harmonic microscope using a re-entrant resonant cavity
journal, August 1995

Method and apparatus for measuring the permittivity of materials
patent, August 1993

Microwave Resonant Cavities for Sensing Moisture and Mass of Single Seeds and Kernels
conference, January 1992

Apertureless near field optical microscope
patent, August 1990

Scanning Probe Microscopy
journal, January 1996

Method of and Apparatus for Particle Detection and Identification
patent, November 1973

Heterodyne electrostatic force microscopy used as a new non-contact test technique for integrated circuits
conference, January 1995

Passive Modulating Component
patent, May 1975

Method and apparatus for measuring electrical conductivity
patent, April 1976

Mass or weight determination of arbitrarily-shaped dielectric objects by microwave resonator measurements
patent, September 1996

Use of time domain spectroscopy for measuring dielectric properties with a coaxial probe
journal, October 1986

Microwave technique for single kernel, seed, nut, or fruit moisture content determination
patent, August 1991

Optical probe employing an impedance matched sub-lambda transmission line
patent, December 1992

Controlling and tuning strong optical field gradients at a local probe microscope tip apex
journal, February 1997

Metallized tubule-based artificial dielectric
patent, March 1992

Method and apparatus for measuring surface characteristics of material
patent, January 1995