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Title: Conformal coating of highly structured surfaces

Abstract

Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.

Inventors:
; ; ;
Issue Date:
Research Org.:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1082450
Patent Number(s):
8329502
Application Number:
12/904,959
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Classifications (CPCs):
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. Conformal coating of highly structured surfaces. United States: N. p., 2012. Web.
Ginley, David S., Perkins, John, Berry, Joseph, & Gennett, Thomas. Conformal coating of highly structured surfaces. United States.
Ginley, David S., Perkins, John, Berry, Joseph, and Gennett, Thomas. Tue . "Conformal coating of highly structured surfaces". United States. https://www.osti.gov/servlets/purl/1082450.
@article{osti_1082450,
title = {Conformal coating of highly structured surfaces},
author = {Ginley, David S. and Perkins, John and Berry, Joseph and Gennett, Thomas},
abstractNote = {Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {12}
}

Works referenced in this record:

Humidity-resistant high-conductivity amorphous-InZnO transparent conductors
conference, June 2009