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Title: Ultra-high density diffraction grating

Abstract

A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Inventors:
; ; ; ;
Issue Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1082356
Patent Number(s):
8,331,027
Application Number:
12/510,900
Assignee:
The Regents of the University of California (Oakland, CA)
DOE Contract Number:  
AC02-05CH11231
Resource Type:
Patent
Resource Relation:
Patent File Date: 2009 Jul 28
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Ultra-high density diffraction grating. United States: N. p., 2012. Web.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., & Gullikson, Eric M. Ultra-high density diffraction grating. United States.
Padmore, Howard A., Voronov, Dmytro L., Cambie, Rossana, Yashchuk, Valeriy V., and Gullikson, Eric M. Tue . "Ultra-high density diffraction grating". United States. https://www.osti.gov/servlets/purl/1082356.
@article{osti_1082356,
title = {Ultra-high density diffraction grating},
author = {Padmore, Howard A. and Voronov, Dmytro L. and Cambie, Rossana and Yashchuk, Valeriy V. and Gullikson, Eric M.},
abstractNote = {A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {12}
}

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Works referenced in this record:

Replication as an alternative approach for large segmented telescopes
conference, July 2004

  • Ulmer, Melville P.; Graham, Michael E.; Vanyman, Semyon
  • Second Backaskog Workshop on Extremely Large Telescopes, SPIE Proceedings
  • DOI: 10.1117/12.566322

Multilayer‐coated echelle gratings for soft x rays and extreme ultraviolet
journal, February 1995

  • Underwood, J. H.; Malek, C. Khan; Gullikson, E. M.
  • Review of Scientific Instruments, Vol. 66, Issue 2
  • DOI: 10.1063/1.1145754

High-throughput replica optics
journal, January 1988


Picosecond and femtosecond Fourier pulse shape synthesis
journal, January 1987


Optical properties of sliced multilayer gratings
journal, September 2002


Production and performance of multilayer-coated conical x-ray mirrors
journal, January 2003

  • Ulmer, Melville P.; Altkorn, Robert; Graham, Michael E.
  • Applied Optics, Vol. 42, Issue 34
  • DOI: 10.1364/AO.42.006945

5000 groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range
conference, August 2009

  • Voronov, Dmitriy L.; Anderson, Erik H.; Cambie, Rossana
  • SPIE Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.826921

Development of an ultrahigh-resolution diffraction grating for soft x-rays
conference, September 2007

  • Voronov, Dmitriy L.; Cambie, Rossana; Feshchenko, Ruslan M.
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.732658

Elastic memory composite technology for thin, lightweight, space- and ground-based deployable mirrors
conference, December 2003

  • Arzberger, Steven C.; Munshi, Naseem A.; Lake, Mark S.
  • Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
  • DOI: 10.1117/12.507157

High throughput and resolution compact spectrograph for the 124–250 Å range based on MoSi2-Si sliced multilayer grating
journal, June 1994


Fabrication and characterization of a new high density Sc/Si multilayer sliced grating
conference, August 2008

  • Voronov, Dmitriy L.; Cambie, Rossana; Gullikson, Eric M.
  • Optical Engineering + Applications, SPIE Proceedings
  • DOI: 10.1117/12.795377

Status and limitations of multilayer X-ray interference structures
journal, April 1996


Super-smooth x-ray reflection grating fabrication
journal, November 1997

  • Franke, A. E.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
  • DOI: 10.1116/1.589759

Grazing incidence replica optics for astronomical and laboratory applications
journal, January 1988

  • Hudec, Rene; Valnicek, Boris; Aschenbach, Bernd
  • Applied Optics, Vol. 27, Issue 8
  • DOI: 10.1364/AO.27.001453

Fabrication of sawtooth diffraction gratings using nanoimprint lithography
journal, January 2003

  • Chang, Chih-Hao; Heilmann, R. K.; Fleming, R. C.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
  • DOI: 10.1116/1.1627814