Method to planarize three-dimensional structures to enable conformal electrodes
Abstract
Methods for fabricating three-dimensional PIN structures having conformal electrodes are provided, as well as the structures themselves. The structures include a first layer and an array of pillars with cavity regions between the pillars. A first end of each pillar is in contact with the first layer. A segment is formed on the second end of each pillar. The cavity regions are filled with a fill material, which may be a functional material such as a neutron sensitive material. The fill material covers each segment. A portion of the fill material is etched back to produce an exposed portion of the segment. A first electrode is deposited onto the fill material and each exposed segment, thereby forming a conductive layer that provides a common contact to each the exposed segment. A second electrode is deposited onto the first layer.
- Inventors:
- Issue Date:
- Research Org.:
- Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1080310
- Patent Number(s):
- 8314400
- Application Number:
- 13/014,879
- Assignee:
- Lawrence Livermore National Security, LLC (Livermore, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01T - MEASUREMENT OF NUCLEAR OR X-RADIATION
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- AC52-07NA27344
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Nikolic, Rebecca J, Conway, Adam M, Graff, Robert T, Reinhardt, Catherine, Voss, Lars F, and Shao, Qinghui. Method to planarize three-dimensional structures to enable conformal electrodes. United States: N. p., 2012.
Web.
Nikolic, Rebecca J, Conway, Adam M, Graff, Robert T, Reinhardt, Catherine, Voss, Lars F, & Shao, Qinghui. Method to planarize three-dimensional structures to enable conformal electrodes. United States.
Nikolic, Rebecca J, Conway, Adam M, Graff, Robert T, Reinhardt, Catherine, Voss, Lars F, and Shao, Qinghui. Tue .
"Method to planarize three-dimensional structures to enable conformal electrodes". United States. https://www.osti.gov/servlets/purl/1080310.
@article{osti_1080310,
title = {Method to planarize three-dimensional structures to enable conformal electrodes},
author = {Nikolic, Rebecca J and Conway, Adam M and Graff, Robert T and Reinhardt, Catherine and Voss, Lars F and Shao, Qinghui},
abstractNote = {Methods for fabricating three-dimensional PIN structures having conformal electrodes are provided, as well as the structures themselves. The structures include a first layer and an array of pillars with cavity regions between the pillars. A first end of each pillar is in contact with the first layer. A segment is formed on the second end of each pillar. The cavity regions are filled with a fill material, which may be a functional material such as a neutron sensitive material. The fill material covers each segment. A portion of the fill material is etched back to produce an exposed portion of the segment. A first electrode is deposited onto the fill material and each exposed segment, thereby forming a conductive layer that provides a common contact to each the exposed segment. A second electrode is deposited onto the first layer.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 20 00:00:00 EST 2012},
month = {Tue Nov 20 00:00:00 EST 2012}
}
Works referenced in this record:
Efficiencies of coated and perforated semiconductor neutron detectors
conference, October 2004
- Shultis, J.K.; McGregor, D.S.
- Nuclear Science Symposium Conference Record, 2004 IEEE
6:1 aspect ratio silicon pillar based thermal neutron detector filled with B10
journal, September 2008
- Nikolić, R. J.; Conway, A. M.; Reinhardt, C. E.
- Applied Physics Letters, Vol. 93, Issue 13, Article No. 133502