Substrate comprising a nanometer-scale projection array
Abstract
A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.
- Inventors:
- Issue Date:
- Research Org.:
- The Board of Trustees of the Leland Stanford Junior University
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1080290
- Patent Number(s):
- 8318604
- Application Number:
- 12/948,025
- Assignee:
- The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
- DOE Contract Number:
- FG36-08GOI8004
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Cui, Yi, Zhu, Jia, Hsu, Ching-Mei, Connor, Stephen T, Yu, Zongfu, Fan, Shanhui, and Burkhard, George. Substrate comprising a nanometer-scale projection array. United States: N. p., 2012.
Web.
Cui, Yi, Zhu, Jia, Hsu, Ching-Mei, Connor, Stephen T, Yu, Zongfu, Fan, Shanhui, & Burkhard, George. Substrate comprising a nanometer-scale projection array. United States.
Cui, Yi, Zhu, Jia, Hsu, Ching-Mei, Connor, Stephen T, Yu, Zongfu, Fan, Shanhui, and Burkhard, George. Tue .
"Substrate comprising a nanometer-scale projection array". United States. https://www.osti.gov/servlets/purl/1080290.
@article{osti_1080290,
title = {Substrate comprising a nanometer-scale projection array},
author = {Cui, Yi and Zhu, Jia and Hsu, Ching-Mei and Connor, Stephen T and Yu, Zongfu and Fan, Shanhui and Burkhard, George},
abstractNote = {A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 27 00:00:00 EST 2012},
month = {Tue Nov 27 00:00:00 EST 2012}
}
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