Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same

Title: Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same

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Abstract

An electronic component that includes a substrate and a phase-separated layer supported on the substrate and a method of forming the same are disclosed. The phase-separated layer includes a first phase comprising lanthanum manganate (LMO) and a second phase selected from a metal oxide (MO), metal nitride (MN), a metal (Me), and combinations thereof. The phase-separated material can be an epitaxial layer and an upper surface of the phase-separated layer can include interfaces between the first phase and the second phase. The phase-separated layer can be supported on a buffer layer comprising a composition selected from the group consisting of IBAD MgO, LMO/IBAD-MgO, homoepi-IBAD MgO and LMO/homoepi-MgO. The electronic component can also include an electronically active layer supported on the phase-separated layer. The electronically active layer can be a superconducting material, a ferroelectric material, a multiferroic material, a magnetic material, a photovoltaic material, an electrical storage material, and a semiconductor material.

Inventors:

Aytug, Tolga ^[1]; Paranthaman, Mariappan Parans ^[1]; Polat, Ozgur ^[1]

Knoxville, TN

Issue Date:: 2012-07-17

Research Org.:: UT-Battelle, LLC (Oak Ridge, TN)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1068840

Patent Number(s):: 8,221,909

Application Number:: 12/947,911

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Aytug, Tolga, Paranthaman, Mariappan Parans, and Polat, Ozgur. Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same.  United States: N. p., 2012. 
        Web.

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                    Aytug, Tolga, Paranthaman, Mariappan Parans, & Polat, Ozgur. Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same.  United States.

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                    Aytug, Tolga, Paranthaman, Mariappan Parans, and Polat, Ozgur. Tue .  
        "Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same".  United States.  https://www.osti.gov/servlets/purl/1068840.

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@article{osti_1068840,

  title        = {Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same},

  author       = {Aytug, Tolga and Paranthaman, Mariappan Parans and Polat, Ozgur},

  abstractNote = {An electronic component that includes a substrate and a phase-separated layer supported on the substrate and a method of forming the same are disclosed. The phase-separated layer includes a first phase comprising lanthanum manganate (LMO) and a second phase selected from a metal oxide (MO), metal nitride (MN), a metal (Me), and combinations thereof. The phase-separated material can be an epitaxial layer and an upper surface of the phase-separated layer can include interfaces between the first phase and the second phase. The phase-separated layer can be supported on a buffer layer comprising a composition selected from the group consisting of IBAD MgO, LMO/IBAD-MgO, homoepi-IBAD MgO and LMO/homoepi-MgO. The electronic component can also include an electronically active layer supported on the phase-separated layer. The electronically active layer can be a superconducting material, a ferroelectric material, a multiferroic material, a magnetic material, a photovoltaic material, an electrical storage material, and a semiconductor material.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2012},

  month        = {7}

}

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