Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same
Abstract
An electronic component that includes a substrate and a phase-separated layer supported on the substrate and a method of forming the same are disclosed. The phase-separated layer includes a first phase comprising lanthanum manganate (LMO) and a second phase selected from a metal oxide (MO), metal nitride (MN), a metal (Me), and combinations thereof. The phase-separated material can be an epitaxial layer and an upper surface of the phase-separated layer can include interfaces between the first phase and the second phase. The phase-separated layer can be supported on a buffer layer comprising a composition selected from the group consisting of IBAD MgO, LMO/IBAD-MgO, homoepi-IBAD MgO and LMO/homoepi-MgO. The electronic component can also include an electronically active layer supported on the phase-separated layer. The electronically active layer can be a superconducting material, a ferroelectric material, a multiferroic material, a magnetic material, a photovoltaic material, an electrical storage material, and a semiconductor material.
- Inventors:
-
- Knoxville, TN
- Issue Date:
- Research Org.:
- UT-Battelle LLC/ORNL, Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1068840
- Patent Number(s):
- 8221909
- Application Number:
- 12/947,911
- Assignee:
- UT-Battelle, LLC (Oak Ridge, TN)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- AC05-00OR22725
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Aytug, Tolga, Paranthaman, Mariappan Parans, and Polat, Ozgur. Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same. United States: N. p., 2012.
Web.
Aytug, Tolga, Paranthaman, Mariappan Parans, & Polat, Ozgur. Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same. United States.
Aytug, Tolga, Paranthaman, Mariappan Parans, and Polat, Ozgur. Tue .
"Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same". United States. https://www.osti.gov/servlets/purl/1068840.
@article{osti_1068840,
title = {Phase-separated, epitaxial composite cap layers for electronic device applications and method of making the same},
author = {Aytug, Tolga and Paranthaman, Mariappan Parans and Polat, Ozgur},
abstractNote = {An electronic component that includes a substrate and a phase-separated layer supported on the substrate and a method of forming the same are disclosed. The phase-separated layer includes a first phase comprising lanthanum manganate (LMO) and a second phase selected from a metal oxide (MO), metal nitride (MN), a metal (Me), and combinations thereof. The phase-separated material can be an epitaxial layer and an upper surface of the phase-separated layer can include interfaces between the first phase and the second phase. The phase-separated layer can be supported on a buffer layer comprising a composition selected from the group consisting of IBAD MgO, LMO/IBAD-MgO, homoepi-IBAD MgO and LMO/homoepi-MgO. The electronic component can also include an electronically active layer supported on the phase-separated layer. The electronically active layer can be a superconducting material, a ferroelectric material, a multiferroic material, a magnetic material, a photovoltaic material, an electrical storage material, and a semiconductor material.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {7}
}
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