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Title: Residual gas analysis device

Abstract

A system is provided for testing the hermeticity of a package, such as a microelectromechanical systems package containing a sealed gas volume, with a sampling device that has the capability to isolate the package and breach the gas seal connected to a pulse valve that can controllably transmit small volumes down to 2 nanoliters to a gas chamber for analysis using gas chromatography/mass spectroscopy diagnostics.

Inventors:
 [1]
  1. Peralta, NM
Issue Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1067280
Patent Number(s):
8230722
Application Number:
12/724,476
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01M - TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Thornberg, Steven M. Residual gas analysis device. United States: N. p., 2012. Web.
Thornberg, Steven M. Residual gas analysis device. United States.
Thornberg, Steven M. Tue . "Residual gas analysis device". United States. https://www.osti.gov/servlets/purl/1067280.
@article{osti_1067280,
title = {Residual gas analysis device},
author = {Thornberg, Steven M},
abstractNote = {A system is provided for testing the hermeticity of a package, such as a microelectromechanical systems package containing a sealed gas volume, with a sampling device that has the capability to isolate the package and breach the gas seal connected to a pulse valve that can controllably transmit small volumes down to 2 nanoliters to a gas chamber for analysis using gas chromatography/mass spectroscopy diagnostics.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {7}
}