Method for generating small and ultra small apertures, slits, nozzles and orifices
Abstract
A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.
- Inventors:
-
- Hinsdale, IL
- Issue Date:
- Research Org.:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1042631
- Patent Number(s):
- 8182870
- Application Number:
- 12/128,696
- Assignee:
- The United States of America as represented by the United States Department of Energy (Washington, DC)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC02-06CH11357
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Khounsary, Ali M. Method for generating small and ultra small apertures, slits, nozzles and orifices. United States: N. p., 2012.
Web.
Khounsary, Ali M. Method for generating small and ultra small apertures, slits, nozzles and orifices. United States.
Khounsary, Ali M. Tue .
"Method for generating small and ultra small apertures, slits, nozzles and orifices". United States. https://www.osti.gov/servlets/purl/1042631.
@article{osti_1042631,
title = {Method for generating small and ultra small apertures, slits, nozzles and orifices},
author = {Khounsary, Ali M},
abstractNote = {A method and device for one or more small apertures, slits, nozzles and orifices, preferably having a high aspect ratio. In one embodiment, one or more alternating layers of sacrificial layers and blocking layers are deposited onto a substrate. Each sacrificial layer is made of a material which preferably allows a radiation to substantially pass through. Each blocking layer is made of a material which substantially blocks the radiation.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {5}
}
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Short focal length Kirkpatrick-Baez mirrors for a hard x-ray nanoprobe
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- Liu, Wenjun; Ice, Gene E.; Tischler, Jonathan Z.
- Review of Scientific Instruments, Vol. 76, Issue 11