Polymer-assisted deposition of films
Abstract
A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.
- Inventors:
-
- Los Alamos, NM
- Chandler, AZ
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1036116
- Patent Number(s):
- 8124176
- Application Number:
- 11/804,472
- Assignee:
- Los Alamos National Security, LLC (Los Alamos, NM)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC52-06NA25396
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Polymer-assisted deposition of films. United States: N. p., 2012.
Web.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, & Lin, Yuan. Polymer-assisted deposition of films. United States.
McCleskey, Thomas M, Burrell, Anthony K, Jia, Quanxi, and Lin, Yuan. Tue .
"Polymer-assisted deposition of films". United States. https://www.osti.gov/servlets/purl/1036116.
@article{osti_1036116,
title = {Polymer-assisted deposition of films},
author = {McCleskey, Thomas M and Burrell, Anthony K and Jia, Quanxi and Lin, Yuan},
abstractNote = {A polymer assisted deposition process for deposition of metal nitride films and the like is presented. The process includes solutions of one or more metal precursor and soluble polymers having binding properties for the one or more metal precursor. After a coating operation, the resultant coating is heated at high temperatures under a suitable atmosphere to yield metal nitride films and the like. Such films can be conformal on a variety of substrates including non-planar substrates. In some instances, the films can be epitaxial in structure and can be of optical quality. The process can be organic solvent-free.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2012},
month = {2}
}
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