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Title: Surface characterization based on optical phase shifting interferometry

Abstract

Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.

Inventors:
 [1];  [2]
  1. (Pasadena, CA), Rosakis
  2. Altadena, CA
Issue Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1026669
Patent Number(s):
7990543
Application Number:
12/203,050
Assignee:
California Institute of Technology (Pasadena, CA)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
FG52-06NA26209
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Mello, Michael, and Ares, J. Surface characterization based on optical phase shifting interferometry. United States: N. p., 2011. Web.
Mello, Michael, & Ares, J. Surface characterization based on optical phase shifting interferometry. United States.
Mello, Michael, and Ares, J. Tue . "Surface characterization based on optical phase shifting interferometry". United States. https://www.osti.gov/servlets/purl/1026669.
@article{osti_1026669,
title = {Surface characterization based on optical phase shifting interferometry},
author = {Mello, Michael and Ares, J},
abstractNote = {Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {8}
}

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