Surface characterization based on optical phase shifting interferometry
Abstract
Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.
- Inventors:
-
- (Pasadena, CA), Rosakis
- Altadena, CA
- Issue Date:
- Research Org.:
- California Institute of Technology (CalTech), Pasadena, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1026669
- Patent Number(s):
- 7990543
- Application Number:
- 12/203,050
- Assignee:
- California Institute of Technology (Pasadena, CA)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
- DOE Contract Number:
- FG52-06NA26209
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Mello, Michael, and Ares, J. Surface characterization based on optical phase shifting interferometry. United States: N. p., 2011.
Web.
Mello, Michael, & Ares, J. Surface characterization based on optical phase shifting interferometry. United States.
Mello, Michael, and Ares, J. Tue .
"Surface characterization based on optical phase shifting interferometry". United States. https://www.osti.gov/servlets/purl/1026669.
@article{osti_1026669,
title = {Surface characterization based on optical phase shifting interferometry},
author = {Mello, Michael and Ares, J},
abstractNote = {Apparatus, techniques and systems for implementing an optical interferometer to measure surfaces, including mapping of instantaneous curvature or in-plane and out-of-plane displacement field gradients of a sample surface based on obtaining and processing four optical interferograms from a common optical reflected beam from the sample surface that are relatively separated in phase by .pi./2.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {8}
}
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