Micromachined cutting blade formed from {211}-oriented silicon
Abstract
A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).
- Inventors:
-
- Albuquerque, NM
- (Burbank, CA)
- Tijeras, NM
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1026664
- Patent Number(s):
- 7992309
- Application Number:
- 10/421,025
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
A - HUMAN NECESSITIES A61 - MEDICAL OR VETERINARY SCIENCE A61F - FILTERS IMPLANTABLE INTO BLOOD VESSELS
B - PERFORMING OPERATIONS B23 - MACHINE TOOLS B23P - OTHER WORKING OF METAL
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, and Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States: N. p., 2011.
Web.
Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, & Montague, Stephen. Micromachined cutting blade formed from {211}-oriented silicon. United States.
Fleming, James G, Fleming, legal representative, Carol, Sniegowski, Jeffry J, and Montague, Stephen. Tue .
"Micromachined cutting blade formed from {211}-oriented silicon". United States. https://www.osti.gov/servlets/purl/1026664.
@article{osti_1026664,
title = {Micromachined cutting blade formed from {211}-oriented silicon},
author = {Fleming, James G and Fleming, legal representative, Carol and Sniegowski, Jeffry J and Montague, Stephen},
abstractNote = {A cutting blade is disclosed fabricated of micromachined silicon. The cutting blade utilizes a monocrystalline silicon substrate having a {211} crystalline orientation to form one or more cutting edges that are defined by the intersection of {211} crystalline planes of silicon with {111} crystalline planes of silicon. This results in a cutting blade which has a shallow cutting-edge angle .theta. of 19.5.degree.. The micromachined cutting blade can be formed using an anisotropic wet etching process which substantially terminates etching upon reaching the {111} crystalline planes of silicon. This allows multiple blades to be batch fabricated on a common substrate and separated for packaging and use. The micromachined cutting blade, which can be mounted to a handle in tension and optionally coated for increased wear resistance and biocompatibility, has multiple applications including eye surgery (LASIK procedure).},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Aug 09 00:00:00 EDT 2011},
month = {Tue Aug 09 00:00:00 EDT 2011}
}