Microelectromechanical pump utilizing porous silicon
Abstract
A microelectromechanical (MEM) pump is disclosed which includes a porous silicon region sandwiched between an inlet chamber and an outlet chamber. The porous silicon region is formed in a silicon substrate and contains a number of pores extending between the inlet and outlet chambers, with each pore having a cross-section dimension about equal to or smaller than a mean free path of a gas being pumped. A thermal gradient is provided along the length of each pore by a heat source which can be an electrical resistance heater or an integrated circuit (IC). A channel can be formed through the silicon substrate so that inlet and outlet ports can be formed on the same side of the substrate, or so that multiple MEM pumps can be connected in series to form a multi-stage MEM pump. The MEM pump has applications for use in gas-phase MEM chemical analysis systems, and can also be used for passive cooling of ICs.
- Inventors:
-
- Albuquerque, NM
- Norman, OK
- Issue Date:
- Research Org.:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1021902
- Patent Number(s):
- 7980828
- Application Number:
- 11/739,716
- Assignee:
- Sandia Corporation (Albuquerque, NM)
- Patent Classifications (CPCs):
-
F - MECHANICAL ENGINEERING F04 - POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS F04B - POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS
- DOE Contract Number:
- AC04-94AL85000
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Lantz, Jeffrey W, and Stalford, Harold L. Microelectromechanical pump utilizing porous silicon. United States: N. p., 2011.
Web.
Lantz, Jeffrey W, & Stalford, Harold L. Microelectromechanical pump utilizing porous silicon. United States.
Lantz, Jeffrey W, and Stalford, Harold L. Tue .
"Microelectromechanical pump utilizing porous silicon". United States. https://www.osti.gov/servlets/purl/1021902.
@article{osti_1021902,
title = {Microelectromechanical pump utilizing porous silicon},
author = {Lantz, Jeffrey W and Stalford, Harold L},
abstractNote = {A microelectromechanical (MEM) pump is disclosed which includes a porous silicon region sandwiched between an inlet chamber and an outlet chamber. The porous silicon region is formed in a silicon substrate and contains a number of pores extending between the inlet and outlet chambers, with each pore having a cross-section dimension about equal to or smaller than a mean free path of a gas being pumped. A thermal gradient is provided along the length of each pore by a heat source which can be an electrical resistance heater or an integrated circuit (IC). A channel can be formed through the silicon substrate so that inlet and outlet ports can be formed on the same side of the substrate, or so that multiple MEM pumps can be connected in series to form a multi-stage MEM pump. The MEM pump has applications for use in gas-phase MEM chemical analysis systems, and can also be used for passive cooling of ICs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {7}
}
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