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Title: Methods and devices for fabricating and assembling printable semiconductor elements

Abstract

The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.

Inventors:
 [1];  [1];  [2];  [3];  [4];  [1];  [5];  [4]
  1. Champaign, IL
  2. Durham, NC
  3. Daejeon, KR
  4. Urbana, IL
  5. Raleigh, NC
Issue Date:
Research Org.:
Univ. of Illinois at Urbana-Champaign, IL (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1019415
Patent Number(s):
7982296
Application Number:
US Patent Application 12/564,566
Assignee:
The Board of Trustees of the University of Illinois (Urbana, IL)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
DOE Contract Number:  
FG02-91ER45439
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States: N. p., 2011. Web.
Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, & Zhu, Zhengtao. Methods and devices for fabricating and assembling printable semiconductor elements. United States.
Nuzzo, Ralph G, Rogers, John A, Menard, Etienne, Lee, Keon Jae, Khang, Dahl-Young, Sun, Yugang, Meitl, Matthew, and Zhu, Zhengtao. Tue . "Methods and devices for fabricating and assembling printable semiconductor elements". United States. https://www.osti.gov/servlets/purl/1019415.
@article{osti_1019415,
title = {Methods and devices for fabricating and assembling printable semiconductor elements},
author = {Nuzzo, Ralph G and Rogers, John A and Menard, Etienne and Lee, Keon Jae and Khang, Dahl-Young and Sun, Yugang and Meitl, Matthew and Zhu, Zhengtao},
abstractNote = {The invention provides methods and devices for fabricating printable semiconductor elements and assembling printable semiconductor elements onto substrate surfaces. Methods, devices and device components of the present invention are capable of generating a wide range of flexible electronic and optoelectronic devices and arrays of devices on substrates comprising polymeric materials. The present invention also provides stretchable semiconductor structures and stretchable electronic devices capable of good performance in stretched configurations.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2011},
month = {7}
}

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Fully elastic interconnects on nanopatterned elastomeric substrates
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Guided molecular self-assembly: a review of recent efforts
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Dependence of Interface State Density on Silicon Thermal Oxidation Process Variables
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Shape-and-solder-directed self-assembly to package semiconductor device segments
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Inkjet Printing of Polymers: State of the Art and Future Developments
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Nanoscale Science and Technology: Building a Big Future from Small Things
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Stars and stripes. Nanoscale misfit dislocation patterns on surfaces
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Electronically Selective Chemical Functionalization of Carbon Nanotubes: Correlation between Raman Spectral and Electrical Responses
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Photonic crystal structure with square symmetry within each layer and a three-dimensional band gap
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Terraces and ledges on (001) spinel surfaces
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High-Performance Plastic Transistors Fabricated by Printing Techniques
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Cathodoluminescence Properties of Undoped and Zn-Doped AlxGa1-xN Grown by Metalorganic Vapor Phase Epitaxy
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Patterning Spherical Surfaces at the Two-Hundred-Nanometer Scale Using Soft Lithography
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A Stretchable Form of Single-Crystal Silicon for High-Performance Electronics on Rubber Substrates
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Block-by-Block Growth of Single-Crystalline Si/SiGe Superlattice Nanowires
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Colloidal Inks for Directed Assembly of 3-D Periodic Structures
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Solution Casting and Transfer Printing Single-Walled Carbon Nanotube Films
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Catalyst-Assisted Formation of Nanocantilever Arrays on ZnS Nanoribbons by Post-Annealing Treatment
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Solution–Liquid–Solid Growth of Soluble GaAs Nanowires
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High pressure–high temperature growth of diamond crystals using split sphere apparatus
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A study on formation of Al and Al2O3 on the porous paper by DC magnetron sputtering
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A Solution-Phase, Precursor Route to Polycrystalline SnO2 Nanowires That Can Be Used for Gas Sensing under Ambient Conditions
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Structures of indium oxide nanobelts
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Screen printed organic thin film transistors (OTFTs) on a flexible substrate
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Large Photoresponsivity in High-Mobility Single-Crystal Organic Field-Effect Phototransistors
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Morphology of nanostructured materials
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Low-temperature single-crystal Si TFTs fabricated on Si films processed via sequential lateral solidification
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Tailored Micropatterns through Weak Polyelectrolyte Stamping
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Block Copolymer Lithography: Periodic Arrays of 1011 Holes in 1 Square Centimeter
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Growth of Au-catalyzed ordered GaAs nanowire arrays by molecular-beam epitaxy
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Three-dimensional photonic crystals by holographic lithography using the umbrella configuration: Symmetries and complete photonic band gaps
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Vertical Etching of Silicon at very High Aspect Ratios
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Microheater-integrated single gas sensor array chip fabricated on flexible polyimide substrate
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Patterning of diamond microstructures on Si substrate by bulk and surface micromachining
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Ink-Jet Printing of Binders for Ceramic Components
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Atomic Force Microscopy of Atomic-Scale Ledges and Etch Pits Formed During Dissolution of Quartz
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Nanotubes of the disulfides of groups 4 and 5 metals
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Thin-film GaAs epitaxial lift-off solar cells for space applications
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An Elastically Stretchable TFT Circuit
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Bendable single crystal silicon thin film transistors formed by printing on plastic substrates
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Hall Effect in the Accumulation Layers on the Surface of Organic Semiconductors
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CMOL FPGA: a reconfigurable architecture for hybrid digital circuits with two-terminal nanodevices
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Colloidal nanocrystal heterostructures with linear and branched topology
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Synthetic Control of the Diameter and Length of Single Crystal Semiconductor Nanowires
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Electric-field assisted assembly and alignment of metallic nanowires
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Electrical imaging of neuronal activity by multi-transistor-array (MTA) recording at 7.8 μm resolution
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Stretchable Interconnects for Elastic Electronic Surfaces
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Nonequilibrium processes for generating silicon nanostructures in single-crystalline silicon
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Nanotechnology: High-speed integrated nanowire circuits
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Free-standing Single Crystal Silicon Nanoribbons
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Toward Paperlike Displays
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Soft, conformable electrical contacts for organic semiconductors: High-resolution plastic circuits by lamination
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Micromachining of three-dimensional GaAs membrane structures using high-energy nitrogen implantation
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Growth of Millimeter-Long and Horizontally Aligned Single-Walled Carbon Nanotubes on Flat Substrates
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Buckled and Wavy Ribbons of GaAs for High-Performance Electronics on Elastomeric Substrates
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Lateral growth of single wall carbon nanotubes on various substrates by means of an “all-laser” synthesis approach
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Inkjet Printing of Functional Materials
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High-mobility polymer gate dielectric pentacene thin film transistors
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Controlled Growth of Large-Area, Uniform, Vertically Aligned Arrays of α-Fe2O3 Nanobelts and Nanowires
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Photon confinement in high-efficiency, thin-film III–V solar cells obtained by epitaxial lift-off
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Structures of quartz (100)- and (101)-water interfaces determined by x-ray reflectivity and atomic force microscopy of natural growth surfaces
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Holographic photonic crystals with diamond symmetry
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Application of carbon nanotubes to field emission displays
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Vectorial Growth of Metallic and Semiconducting Single-Wall Carbon Nanotubes
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Analog and digital circuits using organic thin-film transistors on polyester substrates
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3-D ICs: a novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
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High-κ dielectrics for advanced carbon-nanotube transistors and logic gates
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One-dimensional hole gas in germanium/silicon nanowire heterostructures
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A Novel Low-Cost, High-Efficiency Micromachined Silicon Solar Cell
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Functionalized silicon membranes for selective bio-organism capture
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Extraordinary Mobility in Semiconducting Carbon Nanotubes
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Collapse of stamps for soft lithography due to interfacial adhesion
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Printed plastic electronics and paperlike displays
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Stretchable and Foldable Silicon Integrated Circuits
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Room-Temperature Ultraviolet Nanowire Nanolasers
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Low-Temperature Growth and Photoluminescence Property of ZnS Nanoribbons
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Spherical deformation of compliant substrates with semiconductor device islands
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Photonic Band Gap Architectures for Holographic Lithography
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Nature of electrical contacts in a metal–molecule–semiconductor system
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Printed thin-film transistors and complementary logic gates that use polymer-coated single-walled carbon nanotube networks
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Influence of hydrogen treatment and annealing processes upon the Schottky barrier height of Au/n-GaAs and Ti/n-GaAs diodes
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Preparation of thin-film transistors with chemical bath deposited CdSe and CdS thin films
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An Efficient Two-Photon-Generated Photoacid Applied to Positive-Tone 3D Microfabrication
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Effects of Mechanical Strain on TFTs on Spherical Domes
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High-performance poly-Si TFTs on plastic substrates using a nano-structured separation layer approach
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Catalytic Amplification of the Soft Lithographic Patterning of Si. Nonelectrochemical Orthogonal Fabrication of Photoluminescent Porous Si Pixel Arrays
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Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics
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Electrically Induced Optical Emission from a Carbon Nanotube FET
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Stability of molded polydimethylsiloxane microstructures
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Adhesion at the Solid-Elastomer Interface: Influence of the Interfacial Chains
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Conducting elastomer surface texturing: a path to electrode spotting
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Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field
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Logic Circuits with Carbon Nanotube Transistors
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Photolithographic Route to the Fabrication of Micro/Nanowires of III-V Semiconductors
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Effect of diamondlike carbon coating and surface topography on the performance of metal evaporated magnetic tapes
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Sharp exciton emission from single InAs quantum dots in GaAs nanowires
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A review of 3-D packaging technology
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The path to ubiquitous and low-cost organic electronic appliances on plastic
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Ge/Si nanowire heterostructures as high-performance field-effect transistors
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Fabrication of a Cylindrical Display by Patterned Assembly
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Effect of mismatch strain on band gap in III‐V semiconductors
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Current–Voltage Characteristics of Long-Channel Nanobundle Thin-Film Transistors: A “Bottom-Up” Perspective
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Colloidosomes: Selectively Permeable Capsules Composed of Colloidal Particles
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Control of Si Nanowire Growth by Oxygen
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Large-Scale Hierarchical Organization of Nanowire Arrays for Integrated Nanosystems
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Band Structure, Phonon Scattering, and the Performance Limit of Single-Walled Carbon Nanotube Transistors
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Performance enhancement of InGaN light-emitting diodes by laser lift-off and transfer from sapphire to copper substrate
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Amorphous silicon detector and thin film transistor technology for large-area imaging of X-rays
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Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits
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Materials and noncoplanar mesh designs for integrated circuits with linear elastic responses to extreme mechanical deformations
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Complementary metal-oxide-semiconductor thin-film transistor circuits from a high-temperature polycrystalline silicon process on steel foil substrates
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Spatially Selective Guided Growth of High-Coverage Arrays and Random Networks of Single-Walled Carbon Nanotubes and Their Integration into Electronic Devices
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Oxide-Assisted Growth of Semiconducting Nanowires
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High-mobility ultrathin semiconducting films prepared by spin coating
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Diamond semiconductor technology for RF device applications
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Ink-Jet Printing, Self-Assembled Polyelectrolytes, and Electroless Plating: Low Cost Fabrication of Circuits on a Flexible Substrate at Room Temperature
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Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure
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Improved Pattern Transfer in Soft Lithography Using Composite Stamps
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III–V micromachined devices for microsystems
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Polymer-on-Polymer Stamping: Universal Approaches to Chemically Patterned Surfaces
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Compliant thin film patterns of stiff materials as platforms for stretchable electronics
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High-mobility carbon-nanotube thin-film transistors on a polymeric substrate
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Weave Patterned Organic Transistors on Fiber for E-Textiles
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Surface-induced structure formation of polymer blends on patterned substrates
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Silicon for thin-film transistors
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Organic-Inorganic Hybrid Materials as Semiconducting Channels in Thin-Film Field-Effect Transistors
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Stretchable gold conductors on elastomeric substrates
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Nanoribbon Waveguides for Subwavelength Photonics Integration
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Template-Free Directional Growth of Single-Walled Carbon Nanotubes on a- and r-Plane Sapphire
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The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors
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Long and Oriented Single-Walled Carbon Nanotubes Grown by Ethanol Chemical Vapor Deposition
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Mechanically flexible thin-film transistors that use ultrathin ribbons of silicon derived from bulk wafers
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Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon
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Electronic skin: architecture and components
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Large area, high resolution, dry printing of conducting polymers for organic electronics
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Controlled buckling of semiconductor nanoribbons for stretchable electronics
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Masterless Soft Lithography:  Patterning UV/Ozone−Induced Adhesion on Poly(dimethylsiloxane) Surfaces
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Polarization Dependence of the Optical Absorption of Single-Walled Carbon Nanotubes
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III-V compounds for solar cell applications
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Templated Self-Assembly: Formation of Folded Structures by Relaxation of Pre-stressed, Planar Tapes
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Organic and polymer transistors for electronics
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Fabrication of three-dimensional polymer photonic crystal structures using single diffraction element interference lithography
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On-chip natural assembly of silicon photonic bandgap crystals
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Fabricating Semiconductor Nano/Microwires and Transfer Printing Ordered Arrays of Them onto Plastic Substrates
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Field emission from carbon nanotubes for displays
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Integration of Organic FETs With Organic Photodiodes for a Large Area, Flexible, and Lightweight Sheet Image Scanners
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Mesoscopic self‐assembly of gold islands on diblock‐copolymer films
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Transparent flexible organic thin-film transistors that use printed single-walled carbon nanotube electrodes
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Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
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Patterning Self-Assembled Monolayers: Applications in Materials Science
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Nanowire Transistor Performance Limits and Applications
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An experimental study of the source/drain parasitic resistance effects in amorphous silicon thin film transistors
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Oxidation Resistant Germanium Nanowires: Bulk Synthesis, Long Chain Alkanethiol Functionalization, and Langmuir−Blodgett Assembly
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Photonic Band Gaps Based on Tetragonal Lattices of Slanted Pores
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Ballistic carbon nanotube field-effect transistors
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Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon
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The Adhesion Between Polymers
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Field-Effect Mobility of Organic Polymer Thin-Film Transistors
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Lattice-Oriented Growth of Single-Walled Carbon Nanotubes
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Electrospinning of Nanofibers: Reinventing the Wheel?
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Ordering of Spontaneously Formed Buckles on Planar Surfaces
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Patterning organic–inorganic thin-film transistors using microcontact printed templates
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Transfer printing by kinetic control of adhesion to an elastomeric stamp
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Small-Angle Neutron Scattering from Surfactant-Assisted Aqueous Dispersions of Carbon Nanotubes
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Nanowire Arrays Defined by Nanoimprint Lithography
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Thermal conductivity of PET/(LDPE/AI) composites determined by MDSC
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Large Area Submicrometer Contact Printing Using a Contact Aligner
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The mechanics of electronic materials
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An improved GaAs device model for the simulation of analog integrated circuit
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Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters
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Simple Route to Large-Scale Ordered Arrays of Liquid-Deposited Carbon Nanotubes
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An analytical back-gate bias effect model for ultrathin SOI CMOS devices
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Large-scale complementary integrated circuits based on organic transistors
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Chemical Etching of InGaAsP/InP DH Wafer
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Micromachining on (111)-oriented silicon
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Towards woven logic from organic electronic fibres
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Cheap and cheerful circuits
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InGaN nanorings and nanodots by selective area epitaxy
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Creating Periodic Three-Dimensional Structures by Multibeam Interference of Visible Laser
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Extending the 3ω-method to the MHz range for thermal conductivity measurements of diamond thin films
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Nanostructured advanced materials. Perspectives and directions
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Plastic Electronics and Their Packaging Technologies
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An elastomeric conductor based on polyaniline prepared by mechanical mixing
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Macroelectronics: Perspectives on Technology and Applications
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A Laser Ablation Method for the Synthesis of Crystalline Semiconductor Nanowires
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Printing Patterns of Proteins
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High Frequency Properties of Electro-Textiles for Wearable Antenna Applications
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Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
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