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Title: Mesoscale hybrid calibration artifact

Abstract

A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.

Inventors:
 [1];  [1];  [2]
  1. Albuquerque, NM
  2. Waltham, MA
Issue Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1014662
Patent Number(s):
7788818
Application Number:
US Patent Application 11/866,177
Assignee:
Sandia Corporation (Albuquerque, NM)
Patent Classifications (CPCs):
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English

Citation Formats

Tran, Hy D, Claudet, Andre A, and Oliver, Andrew D. Mesoscale hybrid calibration artifact. United States: N. p., 2010. Web.
Tran, Hy D, Claudet, Andre A, & Oliver, Andrew D. Mesoscale hybrid calibration artifact. United States.
Tran, Hy D, Claudet, Andre A, and Oliver, Andrew D. Tue . "Mesoscale hybrid calibration artifact". United States. https://www.osti.gov/servlets/purl/1014662.
@article{osti_1014662,
title = {Mesoscale hybrid calibration artifact},
author = {Tran, Hy D and Claudet, Andre A and Oliver, Andrew D},
abstractNote = {A mesoscale calibration artifact, also called a hybrid artifact, suitable for hybrid dimensional measurement and the method for make the artifact. The hybrid artifact has structural characteristics that make it suitable for dimensional measurement in both vision-based systems and touch-probe-based systems. The hybrid artifact employs the intersection of bulk-micromachined planes to fabricate edges that are sharp to the nanometer level and intersecting planes with crystal-lattice-defined angles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {9}
}

Works referenced in this record:

Grid plate calibration at the National Bureau of Standards
journal, January 1988


Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring
journal, April 2005