Precision shape modification of nanodevices with a low-energy electron beam
Abstract
Methods of shape modifying a nanodevice by contacting it with a low-energy focused electron beam are disclosed here. In one embodiment, a nanodevice may be permanently reformed to a different geometry through an application of a deforming force and a low-energy focused electron beam. With the addition of an assist gas, material may be removed from the nanodevice through application of the low-energy focused electron beam. The independent methods of shape modification and material removal may be used either individually or simultaneously. Precision cuts with accuracies as high as 10 nm may be achieved through the use of precision low-energy Scanning Electron Microscope scan beams. These methods may be used in an automated system to produce nanodevices of very precise dimensions. These methods may be used to produce nanodevices of carbon-based, silicon-based, or other compositions by varying the assist gas.
- Inventors:
-
- Kensington, CA
- Berkeley, CA
- Issue Date:
- Research Org.:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1014500
- Patent Number(s):
- 7674389
- Application Number:
- US Patent Application 11/260,021
- Assignee:
- The Regents of the University of California (Oakland, CA)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- AC02-05CH11231
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Zettl, Alex, Yuzvinsky, Thomas David, and Fennimore, Adam. Precision shape modification of nanodevices with a low-energy electron beam. United States: N. p., 2010.
Web.
Zettl, Alex, Yuzvinsky, Thomas David, & Fennimore, Adam. Precision shape modification of nanodevices with a low-energy electron beam. United States.
Zettl, Alex, Yuzvinsky, Thomas David, and Fennimore, Adam. Tue .
"Precision shape modification of nanodevices with a low-energy electron beam". United States. https://www.osti.gov/servlets/purl/1014500.
@article{osti_1014500,
title = {Precision shape modification of nanodevices with a low-energy electron beam},
author = {Zettl, Alex and Yuzvinsky, Thomas David and Fennimore, Adam},
abstractNote = {Methods of shape modifying a nanodevice by contacting it with a low-energy focused electron beam are disclosed here. In one embodiment, a nanodevice may be permanently reformed to a different geometry through an application of a deforming force and a low-energy focused electron beam. With the addition of an assist gas, material may be removed from the nanodevice through application of the low-energy focused electron beam. The independent methods of shape modification and material removal may be used either individually or simultaneously. Precision cuts with accuracies as high as 10 nm may be achieved through the use of precision low-energy Scanning Electron Microscope scan beams. These methods may be used in an automated system to produce nanodevices of very precise dimensions. These methods may be used to produce nanodevices of carbon-based, silicon-based, or other compositions by varying the assist gas.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {3}
}
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