Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

de Jonge, Niels

Title: Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Abstract

A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.

Inventors:

de Jonge, Niels ^[1]

Oak Ridge, TN

Issue Date:: 2010-08-17

Research Org.:: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1013816

Patent Number(s):: 7777185

Application Number:: 11/860,760

Assignee:: UT-Battelle, LLC (Oak Ridge, TN)

Patent Classifications (CPCs):: H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/2803 - characterised by the imaging method
H01J2237/226 - Image reconstruction
H01J37/265 - {Controlling the tube
H01J2237/20235 - Z movement or adjustment
H01J2237/2802 - Transmission microscopes
H01J2237/262 - Non-scanning techniques
H01J37/26 - Electron or ion microscopes
H01J2237/20228 - Mechanical X-Y scanning
H01J2237/24455 - Transmitted particle detectors
H01J2237/21 - Focus adjustment
H01J2237/045 - Diaphragms
H01J37/263 - {Contrast, resolution or power of penetration}

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DOE Contract Number:: AC05-00OR22725

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Citation Formats


                    de Jonge, Niels. Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope.  United States: N. p., 2010. 
        Web.

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                    de Jonge, Niels. Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope.  United States.

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                    de Jonge, Niels. Tue .  
        "Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope".  United States.  https://www.osti.gov/servlets/purl/1013816.

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@article{osti_1013816,

  title        = {Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope},

  author       = {de Jonge, Niels},

  abstractNote = {A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2010},

  month        = {8}

}

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Works referenced in this record:

Three-dimensional imaging of individual hafnium atoms inside a semiconductor device
journal, July 2005

van Benthem, Klaus; Lupini, Andrew R.; Kim, Miyoung
Applied Physics Letters, Vol. 87, Issue 3
https://doi.org/10.1063/1.1991989

Memoir on inventing the confocal scanning microscope
journal, January 1988

Minsky, M.
Scanning, Vol. 10, Issue 4
https://doi.org/10.1002/sca.4950100403

Direct Sub-Angstrom Imaging of a Crystal Lattice
journal, September 2004

Nellist, P. D.
Science, Vol. 305, Issue 5691
https://doi.org/10.1126/science.1100965

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Title: Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Abstract

Citation Formats

Three-dimensional imaging of individual hafnium atoms inside a semiconductor device journal, July 2005

Memoir on inventing the confocal scanning microscope journal, January 1988

Direct Sub-Angstrom Imaging of a Crystal Lattice journal, September 2004

Three-dimensional imaging of individual hafnium atoms inside a semiconductor device
journal, July 2005

Memoir on inventing the confocal scanning microscope
journal, January 1988

Direct Sub-Angstrom Imaging of a Crystal Lattice
journal, September 2004