Methods for the fabrication of thermally stable magnetic tunnel junctions
Abstract
Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO.sub.2 or a mixture of H.sub.2 and H.sub.2O.
- Inventors:
-
- Middleton, WI
- Madison, WI
- Hutchinson, MN
- Issue Date:
- Research Org.:
- Wisconsin Alumni Research Foundation (Madison, WI)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1013638
- Patent Number(s):
- 7579042
- Application Number:
- 10/902,281
- Assignee:
- Wisconsin Alumni Research Foundation (Madison, WI)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- FG02-99ER45777
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Chang, Y Austin, Yang, Jianhua J, and Ladwig, Peter F. Methods for the fabrication of thermally stable magnetic tunnel junctions. United States: N. p., 2009.
Web.
Chang, Y Austin, Yang, Jianhua J, & Ladwig, Peter F. Methods for the fabrication of thermally stable magnetic tunnel junctions. United States.
Chang, Y Austin, Yang, Jianhua J, and Ladwig, Peter F. Tue .
"Methods for the fabrication of thermally stable magnetic tunnel junctions". United States. https://www.osti.gov/servlets/purl/1013638.
@article{osti_1013638,
title = {Methods for the fabrication of thermally stable magnetic tunnel junctions},
author = {Chang, Y Austin and Yang, Jianhua J and Ladwig, Peter F},
abstractNote = {Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO.sub.2 or a mixture of H.sub.2 and H.sub.2O.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {8}
}
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