Optical method for the characterization of laterally-patterned samples in integrated circuits
Abstract
Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
- Inventors:
-
- Barrington, RI
- Issue Date:
- Research Org.:
- Brown University (Providence, RI)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1013617
- Patent Number(s):
- 7782471
- Application Number:
- 12/381,640
- Assignee:
- Brown University (Providence, RI)
- Patent Classifications (CPCs):
-
G - PHYSICS G01 - MEASURING G01B - MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS
G - PHYSICS G01 - MEASURING G01N - INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- DOE Contract Number:
- FG02-86ER45267
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Maris, Humphrey J. Optical method for the characterization of laterally-patterned samples in integrated circuits. United States: N. p., 2010.
Web.
Maris, Humphrey J. Optical method for the characterization of laterally-patterned samples in integrated circuits. United States.
Maris, Humphrey J. Tue .
"Optical method for the characterization of laterally-patterned samples in integrated circuits". United States. https://www.osti.gov/servlets/purl/1013617.
@article{osti_1013617,
title = {Optical method for the characterization of laterally-patterned samples in integrated circuits},
author = {Maris, Humphrey J},
abstractNote = {Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {8}
}
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