Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof
Abstract
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.
- Inventors:
-
- Boulder, CO
- (Lakewood, CO)
- Evergreen, CO
- Golden, CO
- Holland, MI
- Hudsonville, MI
- Issue Date:
- Research Org.:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1013008
- Patent Number(s):
- 7754352
- Application Number:
- 11/738,344
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- DOE Contract Number:
- AC36-99GO10337
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, and Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States: N. p., 2010.
Web.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, & Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, and Anderson, John S. Tue .
"Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof". United States. https://www.osti.gov/servlets/purl/1013008.
@article{osti_1013008,
title = {Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof},
author = {Perkins, John and Van Hest, Marinus Franciscus Antonius Maria and Ginley, David and Taylor, Matthew and Neuman, George A and Luten, Henry A and Forgette, Jeffrey A and Anderson, John S},
abstractNote = {Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {7}
}
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Effects of introduction of argon on structural and transparent conducting properties of ZnO–In2O3 thin films prepared by pulsed laser deposition
journal, August 2005
- Moriga, Toshihiro; Mikawa, Michio; Sakakibara, Yuji
- Thin Solid Films, Vol. 486, Issue 1-2
Studies on preparation and characterization of indium doped zinc oxide films by chemical spray deposition
journal, August 2005
- Joseph, Benny; Manoj, P. K.; Vaidyan, V. K.
- Bulletin of Materials Science, Vol. 28, Issue 5
Highly transparent and conductive ZnOIn2O3 thin films prepared by d.c. magnetron sputtering
journal, December 1996
- Minami, Tadatsugu; Kakumu, Toshikazu; Takeda, Yoshihiro
- Thin Solid Films, Vol. 290-291
Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering
journal, December 1995
- Minami, T.; Sonohara, H.; Kakumu, T.
- Thin Solid Films, Vol. 270, Issue 1-2
Systematic study and performance optimization of transparent conducting indium–zinc oxides thin films
journal, April 2001
- Naghavi, N.; Dupont, L.; Marcel, C.
- Electrochimica Acta, Vol. 46, Issue 13-14
Characterization of indium zinc oxide thin films prepared by pulsed laser deposition using a Zn3In2O6 target
journal, February 2000
- Naghavi, N.; Rougier, A.; Marcel, C.
- Thin Solid Films, Vol. 360, Issue 1-2
The electrical, optical and structural properties of In x Zn 1− x O y (0 x 1) thin films by combinatorial techniques
journal, December 2004
- Taylor, Matthew P.; Readey, Dennis W.; Teplin, Charles W.
- Measurement Science and Technology, Vol. 16, Issue 1
Preparation of transparent conducting Zn2In2O5 films by d.c. magnetron sputtering
journal, April 1998
- Minami, T.; Kakumu, T.; Takeda, Y.
- Thin Solid Films, Vol. 317, Issue 1-2