Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof
Abstract
Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.
- Inventors:
-
- Boulder, CO
- (Lakewood, CO)
- Evergreen, CO
- Golden, CO
- Holland, MI
- Hudsonville, MI
- Issue Date:
- Research Org.:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1013008
- Patent Number(s):
- 7754352
- Application Number:
- 11/738,344
- Assignee:
- Alliance for Sustainable Energy, LLC (Golden, CO)
- Patent Classifications (CPCs):
-
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
- DOE Contract Number:
- AC36-99GO10337
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, and Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States: N. p., 2010.
Web.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, & Anderson, John S. Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof. United States.
Perkins, John, Van Hest, Marinus Franciscus Antonius Maria, Ginley, David, Taylor, Matthew, Neuman, George A, Luten, Henry A, Forgette, Jeffrey A, and Anderson, John S. Tue .
"Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof". United States. https://www.osti.gov/servlets/purl/1013008.
@article{osti_1013008,
title = {Amorphous semiconducting and conducting transparent metal oxide thin films and production thereof},
author = {Perkins, John and Van Hest, Marinus Franciscus Antonius Maria and Ginley, David and Taylor, Matthew and Neuman, George A and Luten, Henry A and Forgette, Jeffrey A and Anderson, John S},
abstractNote = {Metal oxide thin films and production thereof are disclosed. An exemplary method of producing a metal oxide thin film may comprise introducing at least two metallic elements and oxygen into a process chamber to form a metal oxide. The method may also comprise depositing the metal oxide on a substrate in the process chamber. The method may also comprise simultaneously controlling a ratio of the at least two metallic elements and a stoichiometry of the oxygen during deposition. Exemplary amorphous metal oxide thin films produced according to the methods herein may exhibit highly transparent properties, highly conductive properties, and/or other opto-electronic properties.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2010},
month = {7}
}
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