Title: Nanocomposite films

Abstract

A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.

Inventors:

Mitlin, David ^[1]; Ophus, Colin ^[1]; Evoy, Stephane ^[1]; Radmilovic, Velimir ^[2]; Mohammadi, Reza ^[1]; Westra, Ken ^[1]; Nelson-Fitzpatrick, Nathaniel ^[1]; Lee, Zonghoon ^[3]

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+ Show Inventor Affiliations

1. Edmonton, CA
2. Piedmont, CA
3. Albany, CA

Issue Date:

2010-07-20

Research Org.:

The Governors of the University of Alberta (Edmonton, Alberta, CA); The University of California (Oakland, CA)

Sponsoring Org.:

USDOE

OSTI Identifier:

1012825

Patent Number(s):

7758708

Application Number:

11/831,434

Assignee:

The Governors of the University of Alberta (Edmonton, Alberta, CA) The University of California (Oakland, CA)

Patent Classifications (CPCs):

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

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B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81B - MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES

B81B2203/0118 - Cantilevers

B - PERFORMING OPERATIONS B81 - MICROSTRUCTURAL TECHNOLOGY B81C - PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS

B81C1/00666 - {Treatments for controlling internal stress or strain in MEMS structures}
B81C1/00674 - {Treatments for improving wear resistance}

B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

B82Y30/00 - Nanotechnology for materials or surface science, e.g. nanocomposites

C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

C23C14/025 - {Metallic sublayers}
C23C14/165 - {by cathodic sputtering}

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10S977/732 - Nanocantilever
Y10S977/81 - Of specified metal or metal alloy composition

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10T - TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T428/12431 - Foil or filament smaller than 6 mils

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DOE Contract Number:  

AC03-76SF00098

Resource Type:

Patent

Country of Publication:

United States

Language:

English