Charge-free method of forming nanostructures on a substrate
Abstract
A charge-free method of forming a nanostructure at low temperatures on a substrate. A substrate that is reactive with one of atomic oxygen and nitrogen is provided. A flux of neutral atoms of least one of oxygen and nitrogen is generated within a laser-sustained-discharge plasma source and a collimated beam of energetic neutral atoms and molecules is directed from the plasma source onto a surface of the substrate to form the nanostructure. The energetic neutral atoms and molecules in the beam have an average kinetic energy in a range from about 1 eV to about 5 eV.
- Inventors:
-
- Los Alamos, NM
- Issue Date:
- Research Org.:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1012820
- Patent Number(s):
- 7759229
- Application Number:
- 11/603,516
- Assignee:
- Los Alamos National Security, LLC (Los Alamos, NM)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B29 - WORKING OF PLASTICS B29C - SHAPING OR JOINING OF PLASTICS
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- AC52-06NA25396
- Resource Type:
- Patent
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Hoffbauer,, Mark, Akhadov, and Elshan,. Charge-free method of forming nanostructures on a substrate. United States: N. p., 2010.
Web.
Hoffbauer,, Mark, Akhadov, & Elshan,. Charge-free method of forming nanostructures on a substrate. United States.
Hoffbauer,, Mark, Akhadov, and Elshan,. Tue .
"Charge-free method of forming nanostructures on a substrate". United States. https://www.osti.gov/servlets/purl/1012820.
@article{osti_1012820,
title = {Charge-free method of forming nanostructures on a substrate},
author = {Hoffbauer, and Mark, Akhadov and Elshan,},
abstractNote = {A charge-free method of forming a nanostructure at low temperatures on a substrate. A substrate that is reactive with one of atomic oxygen and nitrogen is provided. A flux of neutral atoms of least one of oxygen and nitrogen is generated within a laser-sustained-discharge plasma source and a collimated beam of energetic neutral atoms and molecules is directed from the plasma source onto a surface of the substrate to form the nanostructure. The energetic neutral atoms and molecules in the beam have an average kinetic energy in a range from about 1 eV to about 5 eV.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Jul 20 00:00:00 EDT 2010},
month = {Tue Jul 20 00:00:00 EDT 2010}
}
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