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Title: Method and system for treating an interior surface of a workpiece using a charged particle beam

A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.
Inventors:
 [1]
  1. (Georgetown, MA)
Issue Date:
OSTI Identifier:
1012601
Assignee:
TEL Epion Inc. (Billerica, MA) CHO
Patent Number(s):
7,566,888
Application Number:
11/752,774
Contract Number:
FG02-04ER83944
Research Org:
TEL Epion Inc. (Billerica, MA)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English