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Title: Method and system for treating an interior surface of a workpiece using a charged particle beam

Abstract

A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.

Inventors:
Issue Date:
Research Org.:
TEL Epion Inc., Billerica, MA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1012601
Patent Number(s):
7566888
Application Number:
11/752,774
Assignee:
TEL Epion Inc. (Billerica, MA)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
DOE Contract Number:  
FG02-04ER83944
Resource Type:
Patent
Resource Relation:
Patent File Date: 2007 May 23
Country of Publication:
United States
Language:
English

Citation Formats

Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States: N. p., 2007. Web.
Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States.
Swenson, David Richard. Wed . "Method and system for treating an interior surface of a workpiece using a charged particle beam". United States. https://www.osti.gov/servlets/purl/1012601.
@article{osti_1012601,
title = {Method and system for treating an interior surface of a workpiece using a charged particle beam},
author = {Swenson, David Richard},
abstractNote = {A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {5}
}

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Works referenced in this record:

Computer simulation of surface modification with ion beams
journal, December 2005

  • Insepov, Z.; Hassanein, A.; Swenson, D.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
  • https://doi.org/10.1016/j.nimb.2005.07.061

Study of gas cluster ion beam surface treatments for mitigating RF breakdown
journal, July 2006


Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown
journal, December 2005

  • Swenson, D. R.; Degenkolb, E.; Insepov, Z.
  • Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
  • https://doi.org/10.1016/j.nimb.2005.07.107

Computer simulation of surface modification with ion beams
journal, July 2006


Measurement of averages of charge, energy and mass of large, multiply charged cluster ions colliding with atoms
journal, July 2004