Method and system for treating an interior surface of a workpiece using a charged particle beam
Abstract
A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.
- Inventors:
- Issue Date:
- Research Org.:
- TEL Epion Inc., Billerica, MA (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1012601
- Patent Number(s):
- 7566888
- Application Number:
- 11/752,774
- Assignee:
- TEL Epion Inc. (Billerica, MA)
- Patent Classifications (CPCs):
-
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- DOE Contract Number:
- FG02-04ER83944
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2007 May 23
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States: N. p., 2007.
Web.
Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam. United States.
Swenson, David Richard. Wed .
"Method and system for treating an interior surface of a workpiece using a charged particle beam". United States. https://www.osti.gov/servlets/purl/1012601.
@article{osti_1012601,
title = {Method and system for treating an interior surface of a workpiece using a charged particle beam},
author = {Swenson, David Richard},
abstractNote = {A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2007},
month = {5}
}
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Works referenced in this record:
Computer simulation of surface modification with ion beams
journal, December 2005
- Insepov, Z.; Hassanein, A.; Swenson, D.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
Study of gas cluster ion beam surface treatments for mitigating RF breakdown
journal, July 2006
- Swenson, D. R.; Degenkolb, E.; Insepov, Z.
- Physica C: Superconductivity, Vol. 441, Issue 1-2
Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown
journal, December 2005
- Swenson, D. R.; Degenkolb, E.; Insepov, Z.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
Computer simulation of surface modification with ion beams
journal, July 2006
- Insepov, Z.; Hassanein, A.; Swenson, D.
- Physica C: Superconductivity, Vol. 441, Issue 1-2
Measurement of averages of charge, energy and mass of large, multiply charged cluster ions colliding with atoms
journal, July 2004
- Swenson, D. R.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 222, Issue 1-2