Method and system for treating an interior surface of a workpiece using a charged particle beam

Swenson, David Richard

Title: Method and system for treating an interior surface of a workpiece using a charged particle beam

Abstract

A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.

Inventors:: Swenson, David Richard

Issue Date:: 2007-05-23

Research Org.:: TEL Epion Inc., Billerica, MA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1012601

Patent Number(s):: 7566888

Application Number:: 11/752,774

Assignee:: TEL Epion Inc. (Billerica, MA)

Patent Classifications (CPCs):: C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
C23C16/513 - using plasma jets

H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01J - ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/3142 - Ion plating
H01J2237/3151 - Etching
H01J2237/31732 - Depositing thin layers on selected microareas
H01J2237/3174 - Etching microareas
H01J37/147 - Arrangements for directing or deflecting the discharge along a desired path
H01J37/305 - for casting, melting, evaporating or etching {

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DOE Contract Number:: FG02-04ER83944

Resource Type:: Patent

Resource Relation:: Patent File Date: 2007 May 23

Country of Publication:: United States

Language:: English

Citation Formats


                    Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam.  United States: N. p., 2007. 
        Web.

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                    Swenson, David Richard. Method and system for treating an interior surface of a workpiece using a charged particle beam.  United States.

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                    Swenson, David Richard. Wed .  
        "Method and system for treating an interior surface of a workpiece using a charged particle beam".  United States.  https://www.osti.gov/servlets/purl/1012601.

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@article{osti_1012601,

  title        = {Method and system for treating an interior surface of a workpiece using a charged particle beam},

  author       = {Swenson, David Richard},

  abstractNote = {A method and system of treating an interior surface on an internal cavity of a workpiece using a charged particle beam. A beam deflector surface of a beam deflector is placed within the internal cavity of the workpiece and is used to redirect the charged particle beam toward the interior surface to treat the interior surface.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {2007},

  month        = {5}

}

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Works referenced in this record:

Computer simulation of surface modification with ion beams
journal, December 2005

Insepov, Z.; Hassanein, A.; Swenson, D.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
https://doi.org/10.1016/j.nimb.2005.07.061

Study of gas cluster ion beam surface treatments for mitigating RF breakdown
journal, July 2006

Swenson, D. R.; Degenkolb, E.; Insepov, Z.
Physica C: Superconductivity, Vol. 441, Issue 1-2
https://doi.org/10.1016/j.physc.2006.03.039

Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown
journal, December 2005

Swenson, D. R.; Degenkolb, E.; Insepov, Z.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 241, Issue 1-4
https://doi.org/10.1016/j.nimb.2005.07.107

Computer simulation of surface modification with ion beams
journal, July 2006

Insepov, Z.; Hassanein, A.; Swenson, D.
Physica C: Superconductivity, Vol. 441, Issue 1-2
https://doi.org/10.1016/j.physc.2006.03.122

Measurement of averages of charge, energy and mass of large, multiply charged cluster ions colliding with atoms
journal, July 2004

Swenson, D. R.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 222, Issue 1-2
https://doi.org/10.1016/j.nimb.2004.01.225

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Title: Method and system for treating an interior surface of a workpiece using a charged particle beam

Abstract

Citation Formats

Computer simulation of surface modification with ion beams journal, December 2005

Study of gas cluster ion beam surface treatments for mitigating RF breakdown journal, July 2006

Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown journal, December 2005

Computer simulation of surface modification with ion beams journal, July 2006

Measurement of averages of charge, energy and mass of large, multiply charged cluster ions colliding with atoms journal, July 2004

Computer simulation of surface modification with ion beams
journal, December 2005

Study of gas cluster ion beam surface treatments for mitigating RF breakdown
journal, July 2006

Smoothing RF cavities with gas cluster ions to mitigate high voltage breakdown
journal, December 2005

Computer simulation of surface modification with ion beams
journal, July 2006

Measurement of averages of charge, energy and mass of large, multiply charged cluster ions colliding with atoms
journal, July 2004