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Title: Apparatus and method for laser deposition of durable coatings

Abstract

Method and apparatus are disclosed for depositing durable coatings onto the surface of a substrate without heating the entire substrate to high temperatures by using lasers to heat the substrate and dissociate a deposition gas. The apparatus comprises a deposition chamber for enclosing the substrate upon which a coating is to be deposited, gas delivery means for directing a flow of deposition gas on the substrate, a first laser for heating the substrate, and a second laser for irradiating the deposition gas to dissociate the gas. The method includes placing a substrate within a vacuum deposition chamber and directing a flow of deposition gas on the substrate. Then the substrate is heated with a first laser while the deposition gas is irradiated with a second laser to dissociate the deposition gas. 1 fig.

Inventors:
; ;
Issue Date:
Research Org.:
Associated Universities Inc
OSTI Identifier:
100996
Patent Number(s):
5,441,569
Application Number:
PAN: 8-158,862
Assignee:
Dept. of Energy, Washington, DC (United States)
DOE Contract Number:  
AC02-76CH00016
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 15 Aug 1995
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; PROTECTIVE COATINGS; VACUUM COATING; EQUIPMENT; LASER RADIATION; DISSOCIATION; VACUUM SYSTEMS; GAS FLOW

Citation Formats

Veligdan, J T, Vanier, P, and Barletta, R E. Apparatus and method for laser deposition of durable coatings. United States: N. p., 1995. Web.
Veligdan, J T, Vanier, P, & Barletta, R E. Apparatus and method for laser deposition of durable coatings. United States.
Veligdan, J T, Vanier, P, and Barletta, R E. Tue . "Apparatus and method for laser deposition of durable coatings". United States.
@article{osti_100996,
title = {Apparatus and method for laser deposition of durable coatings},
author = {Veligdan, J T and Vanier, P and Barletta, R E},
abstractNote = {Method and apparatus are disclosed for depositing durable coatings onto the surface of a substrate without heating the entire substrate to high temperatures by using lasers to heat the substrate and dissociate a deposition gas. The apparatus comprises a deposition chamber for enclosing the substrate upon which a coating is to be deposited, gas delivery means for directing a flow of deposition gas on the substrate, a first laser for heating the substrate, and a second laser for irradiating the deposition gas to dissociate the gas. The method includes placing a substrate within a vacuum deposition chamber and directing a flow of deposition gas on the substrate. Then the substrate is heated with a first laser while the deposition gas is irradiated with a second laser to dissociate the deposition gas. 1 fig.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1995},
month = {8}
}