Apparatus and method for laser deposition of durable coatings
Method and apparatus are disclosed for depositing durable coatings onto the surface of a substrate without heating the entire substrate to high temperatures by using lasers to heat the substrate and dissociate a deposition gas. The apparatus comprises a deposition chamber for enclosing the substrate upon which a coating is to be deposited, gas delivery means for directing a flow of deposition gas on the substrate, a first laser for heating the substrate, and a second laser for irradiating the deposition gas to dissociate the gas. The method includes placing a substrate within a vacuum deposition chamber and directing a flow of deposition gas on the substrate. Then the substrate is heated with a first laser while the deposition gas is irradiated with a second laser to dissociate the deposition gas. 1 fig.
- Issue Date:
- OSTI Identifier:
- 100996
- Assignee:
- Dept. of Energy, Washington, DC (United States) PTO; SCA: 360101; 360201; 360601; PA: EDB-95:129976; SN: 95001445732
- Patent Number(s):
- US 5,441,569/A/
- Application Number:
- PAN: 8-158,862
- Contract Number:
- AC02-76CH00016
- Resource Relation:
- Other Information: PBD: 15 Aug 1995
- Research Org:
- Associated Universities Inc
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; PROTECTIVE COATINGS; VACUUM COATING; EQUIPMENT; LASER RADIATION; DISSOCIATION; VACUUM SYSTEMS; GAS FLOW