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Title: Apparatus and method for laser deposition of durable coatings

Method and apparatus are disclosed for depositing durable coatings onto the surface of a substrate without heating the entire substrate to high temperatures by using lasers to heat the substrate and dissociate a deposition gas. The apparatus comprises a deposition chamber for enclosing the substrate upon which a coating is to be deposited, gas delivery means for directing a flow of deposition gas on the substrate, a first laser for heating the substrate, and a second laser for irradiating the deposition gas to dissociate the gas. The method includes placing a substrate within a vacuum deposition chamber and directing a flow of deposition gas on the substrate. Then the substrate is heated with a first laser while the deposition gas is irradiated with a second laser to dissociate the deposition gas. 1 fig.
Inventors:
; ;
Issue Date:
OSTI Identifier:
100996
Assignee:
Dept. of Energy, Washington, DC (United States) PTO; SCA: 360101; 360201; 360601; PA: EDB-95:129976; SN: 95001445732
Patent Number(s):
US 5,441,569/A/
Application Number:
PAN: 8-158,862
Contract Number:
AC02-76CH00016
Resource Relation:
Other Information: PBD: 15 Aug 1995
Research Org:
Associated Universities Inc
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; PROTECTIVE COATINGS; VACUUM COATING; EQUIPMENT; LASER RADIATION; DISSOCIATION; VACUUM SYSTEMS; GAS FLOW

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