TY  - COMP
TI  - Kinetic Monte Carlo for semiconductor surface science v.1
AB  - SAND2020-14229 O This software builds on an open source Kinetic Monte Carlo library to evaluate the incorporation rate of semiconductor dopant atoms in an Atomic Precision Advanced Manufacturing (APAM) process. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525
AU  - Campbell, Quinn
DO  - https://doi.org/10.11578/dc.20220802.1
UR  - https://www.osti.gov/doecode/biblio/78088
CY  - United States
PY  - 2021
DA  - 2021-01-21
LA  - English
C1  - Research Org.: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
C2  - Sponsor Org.: USDOE
C4  - Contract Number: NA0003525
ER  -