%0Computer Program
%TKinetic Monte Carlo for semiconductor surface science v.1
%XSAND2020-14229 O This software builds on an open source Kinetic Monte Carlo library to evaluate the incorporation rate of semiconductor dopant atoms in an Atomic Precision Advanced Manufacturing (APAM) process. Sandia National Laboratories is a multimission laboratory managed and operated by National Technology & Engineering Solutions of Sandia, LLC, a wholly owned subsidiary of Honeywell International Inc., for the U.S. Department of Energy’s National Nuclear Security Administration under contract DE-NA0003525
%ACampbell, Quinn
%Rhttps://doi.org/10.11578/dc.20220802.1
%Uhttps://www.osti.gov/doecode/biblio/78088
%CUnited States
%D2021
%GEnglish
%2USDOE
%1NA0003525
2021-01-21