Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology
Abstract
The revolution in nanoscale science and technology requires instrumentation for observation and metrology - we must be able to see and measure what we build. Because nano-devices operate on the level of a few molecules, or even a few atoms, accurate atomic-scale imaging is called for. High-resolution aberration-corrected electron microscopes (both TEM and STEM) can provide valuable measurements at the sub-Angstrom level. Over the next decade, extension of TEM and STEM resolutions to half-Angstrom levels by next-generation aberration-corrected electron microscopes will advance the capabilities of these essential tools for atomic-scale structural characterization. Because improvements in resolution allow for separation of atom columns in many more projection directions, these microscopes will provide much improved three-dimensional characterization of the shape and internal structure of nanodevices and catalyst nanoparticles (perhaps even true 3-D imaging), and hence provide essential feedback in the nano-theory/construction/measurement loop.
- Authors:
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Director. Office of Science. Basic Energy Sciences. DE-AC03-76SF00098; Office of Energy Efficiency and Renewable Energy. Office of FreedomCAR and Vehicle Technology. DE-AC05-00OR22725 (US)
- OSTI Identifier:
- 821768
- Report Number(s):
- LBNL-54332
R&D Project: 503836; TRN: US200411%%716
- DOE Contract Number:
- AC03-76SF00098
- Resource Type:
- Conference
- Resource Relation:
- Conference: National Nanotechnology Initiative Workshop on Instrumentation and Metrology for Nanotechnology, Gaithersburg, MD (US), 01/27/2004--01/29/2004; Other Information: PBD: 18 Jan 2004
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 29 ENERGY PLANNING, POLICY AND ECONOMY; 36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION; ATOMS; CATALYSTS; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; FEEDBACK; MICROSCOPES; RESOLUTION; SHAPE; NANOMETROLOGY NANOCHARACTERIZATION NANODEVICE NANOCATALYST FREEDOMCAR
Citation Formats
O'Keefe, Michael A, and Allard, Lawrence F. Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology. United States: N. p., 2004.
Web.
O'Keefe, Michael A, & Allard, Lawrence F. Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology. United States.
O'Keefe, Michael A, and Allard, Lawrence F. 2004.
"Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology". United States. https://www.osti.gov/servlets/purl/821768.
@article{osti_821768,
title = {Sub-Angstrom electron microscopy for sub-Angstrom nano-metrology},
author = {O'Keefe, Michael A and Allard, Lawrence F},
abstractNote = {The revolution in nanoscale science and technology requires instrumentation for observation and metrology - we must be able to see and measure what we build. Because nano-devices operate on the level of a few molecules, or even a few atoms, accurate atomic-scale imaging is called for. High-resolution aberration-corrected electron microscopes (both TEM and STEM) can provide valuable measurements at the sub-Angstrom level. Over the next decade, extension of TEM and STEM resolutions to half-Angstrom levels by next-generation aberration-corrected electron microscopes will advance the capabilities of these essential tools for atomic-scale structural characterization. Because improvements in resolution allow for separation of atom columns in many more projection directions, these microscopes will provide much improved three-dimensional characterization of the shape and internal structure of nanodevices and catalyst nanoparticles (perhaps even true 3-D imaging), and hence provide essential feedback in the nano-theory/construction/measurement loop.},
doi = {},
url = {https://www.osti.gov/biblio/821768},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Sun Jan 18 00:00:00 EST 2004},
month = {Sun Jan 18 00:00:00 EST 2004}
}