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Title: High resolution PFPE-based molding High resolution PFPE-based molding High resolution PFPE-based molding techniques for nanofabrication of high pattern density sub-20 nm features: A fundamental materials approach

Abstract

ABSTRACT. Described herein is the development and investigation of PFPE-based elastomers for high resolution replica molding applications. The modulus of the elastomeric materials was increased through synthetic and additive approaches while maintaining relatively low surface energies (<25 mN/m). Using practically relevant large area master templates, we show that the resolution of the molds is strongly dependant upon the elastomeric mold modulus. A composite mold approach was used to form flexible molds out of stiff, high modulus materials that allow for replication of sub-20 nm post structures. Sub-100 nm line grating master templates, formed using e-beam lithography, were used to determine the experimental stability of the molding materials. It was observed that as the feature spacing decreased, high modulus composite molds were able to effectively replicate the nano-grating structures without cracking or tear-out defects that typically occur with high modulus elastomers.

Authors:
 [1];  [1];  [1];  [2];  [1];  [3]
  1. University of North Carolina, Chapel Hill
  2. Hitachi
  3. ORNL
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Center for Nanophase Materials Sciences
Sponsoring Org.:
USDOE Office of Science (SC)
OSTI Identifier:
990691
DOE Contract Number:  
DE-AC05-00OR22725
Resource Type:
Journal Article
Resource Relation:
Journal Name: Nano Letters; Journal Volume: 10; Journal Issue: 4
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; POLYETHYLENES; NANOSTRUCTURES; MOLDING; CASTING MOLDS; GRATINGS; ELASTOMERS; REPLICAS

Citation Formats

Williams, Stuart S, Samulski, Edward, Lopez, Renee, Ruiz, Ricardo, DeSimone, Joseph, and Retterer, Scott T. High resolution PFPE-based molding High resolution PFPE-based molding High resolution PFPE-based molding techniques for nanofabrication of high pattern density sub-20 nm features: A fundamental materials approach. United States: N. p., 2010. Web. doi:10.1021/nl100326q.
Williams, Stuart S, Samulski, Edward, Lopez, Renee, Ruiz, Ricardo, DeSimone, Joseph, & Retterer, Scott T. High resolution PFPE-based molding High resolution PFPE-based molding High resolution PFPE-based molding techniques for nanofabrication of high pattern density sub-20 nm features: A fundamental materials approach. United States. doi:10.1021/nl100326q.
Williams, Stuart S, Samulski, Edward, Lopez, Renee, Ruiz, Ricardo, DeSimone, Joseph, and Retterer, Scott T. Fri . "High resolution PFPE-based molding High resolution PFPE-based molding High resolution PFPE-based molding techniques for nanofabrication of high pattern density sub-20 nm features: A fundamental materials approach". United States. doi:10.1021/nl100326q.
@article{osti_990691,
title = {High resolution PFPE-based molding High resolution PFPE-based molding High resolution PFPE-based molding techniques for nanofabrication of high pattern density sub-20 nm features: A fundamental materials approach},
author = {Williams, Stuart S and Samulski, Edward and Lopez, Renee and Ruiz, Ricardo and DeSimone, Joseph and Retterer, Scott T},
abstractNote = {ABSTRACT. Described herein is the development and investigation of PFPE-based elastomers for high resolution replica molding applications. The modulus of the elastomeric materials was increased through synthetic and additive approaches while maintaining relatively low surface energies (<25 mN/m). Using practically relevant large area master templates, we show that the resolution of the molds is strongly dependant upon the elastomeric mold modulus. A composite mold approach was used to form flexible molds out of stiff, high modulus materials that allow for replication of sub-20 nm post structures. Sub-100 nm line grating master templates, formed using e-beam lithography, were used to determine the experimental stability of the molding materials. It was observed that as the feature spacing decreased, high modulus composite molds were able to effectively replicate the nano-grating structures without cracking or tear-out defects that typically occur with high modulus elastomers.},
doi = {10.1021/nl100326q},
journal = {Nano Letters},
number = 4,
volume = 10,
place = {United States},
year = {Fri Jan 01 00:00:00 EST 2010},
month = {Fri Jan 01 00:00:00 EST 2010}
}