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Title: Ultratough CVD single crystal diamond and three dimensional growth thereof

Patent ·
OSTI ID:988682

The invention relates to a single-crystal diamond grown by microwave plasma chemical vapor deposition that has a toughness of at least about 30 MPa m.sup.1/2. The invention also relates to a method of producing a single-crystal diamond with a toughness of at least about 30 MPa m.sup.1/2. The invention further relates to a process for producing a single crystal CVD diamond in three dimensions on a single crystal diamond substrate.

Research Organization:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
FG03-98NV13367
Assignee:
Carnegie Institution of Washington (Washington, DC)
Patent Number(s):
7,594,968
Application Number:
11/222,224
OSTI ID:
988682
Country of Publication:
United States
Language:
English

References (26)

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Moissanite: A Window for High-Pressure Experiments journal October 2000
Very high growth rate chemical vapor deposition of single-crystal diamond journal September 2002
Diamond nucleation on iridium buffer layers and subsequent textured growth: A route for the realization of single-crystal diamond films journal January 2001
Red luminescence in phosphorous-doped chemically vapor deposited diamond journal July 1997
Multiple twinning and nitrogen defect center in chemical vapor deposited homoepitaxial diamond journal November 1999
The coalescence of [001] diamond grains heteroepitaxially grown on (001) silicon journal December 1996
On the role of penetration twins in the morphological development of vapor-grown diamond films journal July 1994
Growth of {100} textured diamond films by the addition of nitrogen journal February 1996
Fracture of synthetic diamond journal September 1995
Optical excitation of paramagnetic nitrogen in chemical vapor deposited diamond journal November 1996
Nitrogen induced increase of growth rate in chemical vapor deposition of diamond journal February 1996
Suppression of surface cracks on (111) homoepitaxial diamond through impurity limitation by oxygen addition journal November 1998
Oriented CVD diamond films: twin formation, structure and morphology journal April 1994
Vacancy enhanced aggregation of nitrogen in diamond journal May 1980
High Carrier Mobility in Single-Crystal Plasma-Deposited Diamond journal September 2002
Ultrahard polycrystalline diamond from graphite journal February 2003
Resonance Raman and photoluminescence investigations of micro-twins in homoepitaxially grown chemical vapor deposited diamond journal July 1997
Confocal Raman spectroscopic observation of hexagonal diamond formation from dissolved carbon in nickel under chemical vapor deposition conditions journal August 1998
High quality homoepitaxial growth of diamond films journal April 1993
Scanning Tunneling Microscopy Studies of Temperature-Dependent Etching of Diamond (100) by Atomic Hydrogen journal April 2001
Vapor growth of diamond on diamond and other surfaces journal April 1981
The effect of oxygen in diamond deposition by microwave plasma enhanced chemical vapor deposition journal November 1990
HFCVD diamond grown with added nitrogen: film characterization and gas-phase composition studies journal July 1998
Diamond synthesis from gas phase in microwave plasma journal August 1983

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