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Title: SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast

Abstract

Methods and apparatus are described for SEM imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. A method includes mounting a sample onto a sample holder, the sample including a sample material; wire bonding leads from the sample holder onto the sample; placing the sample holder in a vacuum chamber of a scanning electron microscope; connecting leads from the sample holder to a power source located outside the vacuum chamber; controlling secondary electron emission from the sample by applying a predetermined voltage to the sample through the leads; and generating an image of the secondary electron emission from the sample. An apparatus includes a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder electrically connected to the electrical interconnect; a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control the secondary electron emission from a sample mounted on the sample holder; and a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.

Inventors:
 [1];  [1];  [2]
  1. Knoxville, TN
  2. Brooktondale, NY
Publication Date:
Research Org.:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
988294
Patent Number(s):
7,491,934
Application Number:
11/331,840
Assignee:
UT-Battelle, LLC (Oak Ridge, TN) ORO
DOE Contract Number:  
AC05-00OR22725
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Jesse, Stephen, Geohegan, David B, and Guillorn, Michael. SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. United States: N. p., 2009. Web.
Jesse, Stephen, Geohegan, David B, & Guillorn, Michael. SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. United States.
Jesse, Stephen, Geohegan, David B, and Guillorn, Michael. Tue . "SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast". United States. https://www.osti.gov/servlets/purl/988294.
@article{osti_988294,
title = {SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast},
author = {Jesse, Stephen and Geohegan, David B and Guillorn, Michael},
abstractNote = {Methods and apparatus are described for SEM imaging and measuring electronic transport in nanocomposites based on electric field induced contrast. A method includes mounting a sample onto a sample holder, the sample including a sample material; wire bonding leads from the sample holder onto the sample; placing the sample holder in a vacuum chamber of a scanning electron microscope; connecting leads from the sample holder to a power source located outside the vacuum chamber; controlling secondary electron emission from the sample by applying a predetermined voltage to the sample through the leads; and generating an image of the secondary electron emission from the sample. An apparatus includes a sample holder for a scanning electron microscope having an electrical interconnect and leads on top of the sample holder electrically connected to the electrical interconnect; a power source and a controller connected to the electrical interconnect for applying voltage to the sample holder to control the secondary electron emission from a sample mounted on the sample holder; and a computer coupled to a secondary electron detector to generate images of the secondary electron emission from the sample.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2009},
month = {2}
}

Patent:

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